An Experiment on Performance Evaluation of a Direct Atomization Type Air Washer System for Semiconductor Clean Rooms

반도체 클린룸용 직접분무식 에어와셔 시스템의 성능평가실험

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3,\;SO_x$ and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. It is desirable to recover heat from exhaust air and use it to reheat outdoor air. In the present study, an experiment was conducted to investigate the heat recovery and gas removal efficiencies of a direct atomization type heat recovery air washer.