• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.1047-1048
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• 2009

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.10a
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• pp.292-298
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• 2009

This paper investigates the control performance of the proposed hybrid mount system for vibration isolation table. The hybrid mount system consists of an air spring as a passive device and a PZT stack actuator as an active device in series. The feasibility of the PZT stack actuator as an active actuator was examined through the simple experiments. After that, a series of numerical simulations were carried out to evaluate the control performance of the proposed hybrid mount system. The equations of motion of the table with a set of hybrid mount systems consisting of four devices are derived. The air spring is considered as a 1 spring and 1 dashpot elements, and PID control algorithm is adopted to estimate the control force. The results of the numerical simulations presents that the proposed hybrid mount system could be the promising control system for vibration isolation table.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.219-219
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• 2007

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.184-189
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• 2006

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by rising experiment and simulation. Optimal design for a passive air spring can be obtained by fluting the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the act ive vibration isolation table wi th the bet ter isolation performance.

• Journal of Power System Engineering
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• v.18 no.2
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• pp.77-82
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• 2014

The air spring is widely used in various fields such as a suspension system and an anti-vibration system because the natural frequency is kept constant regardless of the change in the load, spring constant is easy to change, and, vibration and shock isolation performance are excellent. The purpose of this study is to derive a nonlinear governing equation of an air spring, to analyze the effect of the various parameters on the dynamic stiffness of the air spring, and, to suggest a more efficient design method of an air spring system. In order to do so, this study investigates the impact of all the parameters that could affect the dynamic stiffness of the air spring while changing the excitation amplitude and the frequency with a developed governing equation.

• Journal of the Semiconductor & Display Technology
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• v.10 no.1
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• pp.43-49
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• 2011

In this study, the dynamic characteristics of an air spring connected with an external chamber through a flexible tube are examined. The uncoupled dynamic parameters of the air spring are identified through experiments, followed by the suggestion of a model-based approach to obtain the remaining coupled dynamic parameters using the various frequency response functions derived in PART I paper [1]. To improve or control the damping characteristics of the air spring, this vibration isolation air spring system is physically established in laboratory scale. And we attempt to identify various parameters used to describe to air spring system by both theoretically [1] and experimentally, which is performed in this report. The damping parameter of the tube system is identified through experiments on the system incorporated with the air cylinder, and a nonlinear regression procedure is employed to find solutions. The resulting value is used to expect the frequency response function of dynamic pressure in the top chamber (air spring) with respect to that in the bottom chamber (external chamber). Comparison with the experimental data supports the validity of the present estimation procedures. Also, the dynamic mechanism of the damping effects particularly in a low frequency range is investigated through this experimental endeavor.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.12 no.2
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• pp.124-131
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• 2002

This paper presents the design of an active vibration suppression controller for an air-spring type vibration isolation table. Firstly, isolation system model is constructed considering the isolation table, attached equipment and voice-coil actuator. An active control system is designed based on frequency-shaped sliding mode control theory rewarding high frequency uncertainties with respect to attached equipments on the isolation table. Finally. the performance of the active isolation system is evaluated by simulation under some disturbance conditions which are transmitted from base structure of the isolation system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.4
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• pp.411-423
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• 2008

Pneumatic vibration isolator has a wide application for ground-vibration isolation of vibration-sensitive equipments. Recent advances In precision machine tools and instruments such as nano-technology or medical devices require a better isolation performance, which can be efficiently done by precise modeling- and design- of the isolation system. This paper will discuss an efficient transmissibility design method for pneumatic vibration isolator by employing the complex stiffness model of dual-chamber pneumatic spring developed in our previous research. Three design parameters of volume ratio between the two pneumatic chambers, the geometry of capillary tube connecting the two pneumatic chambers and finally the stiffness of diaphragm necessarily employed for prevention of air leakage were found to be important factors in transmissibility design. Based on design technique that maximizes damping of dual-chamber pneumatic spring, trade-off among the resonance frequency of transmissibility, peak transmissibility and transmissibility in high frequency range was found, which was not ever stated in previous researches. Furthermore this paper will discuss about negative role of diaphragm in transmissibility design. Then the design method proposed in this paper will be illustrated through experiment at measurements.

• Journal of Drive and Control
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• v.13 no.3
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• pp.8-14
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• 2016

This study describes the effect of the critical pressure ratio of a control valve on the performance of an air spring system composed of an air spring, auxiliary chamber, control valve and mass in order to suggest a more efficient design for an air spring system. The critical pressure ratio of the control valve is assumed to have a fixed value, but the critical pressure ratio of the control valve is known to have various values between 0.05 and 0.6, and the effect of the variation of the critical pressure ratio on the performance of the air spring system has not yet been reported. The analysis derives nonlinear and linear governing equations of the air spring system, including the critical pressure ratio of the control valve. This simulation study is presented to show that the impedance and transmissibility characteristics of the air spring system change due to variations in the critical pressure ratio of the control valve as well as its sonic conductance. As a result, the critical pressure ratio of the control valve should be maintained as large as possible to improve the vibration isolation characteristics of the air spring system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.903-908
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• 2006

As environmental vibration requirements on precision equipment become more stringent. use of pneumatic isolators has become more popular and their performance is subsequently required to be further improved. Dynamic performance of passive pneumatic isolators is related to various design parameters in a complicated manner and, hence, is very limited especially in low frequency range by volume of chambers. In this study, an active control technique, so called time delay control which is considered to be adequate for a low frequency or nonlinear system, is applied to a single chamber pneumatic isolator. The procedure of applying the time delay control law to the pneumatic isolator is presented and its effectiveness in enhancement of transmissibility performance is shown based on simulation and experiment. Comparison between passive and active pneumatic isolators is also presented.