Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2006.10a
- /
- Pages.184-189
- /
- 2006
공기스프링을 이용한 방진 테이블의 능동 제어
-
Im, Gyeong-Hwa
;
- Jin, Gyeong-Bok ;
- An, Chae-Heon ;
- Park, Jeong-Geun (GW-TECH)
- Published : 2006.10.12
Abstract
In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by rising experiment and simulation. Optimal design for a passive air spring can be obtained by fluting the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the act ive vibration isolation table wi th the bet ter isolation performance.
Keywords