• Proceedings of the Optical Society of Korea Conference
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• 2000.02a
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• pp.36-37
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• 2000

최근 Micro-Opto-Electro-Mechanical(MOEMS)기술의 발달과 더불어 적응 광학(Adaptive optics)분야나 패턴 인식 분야에 적용 가능한 공간 빛 변조기의 개발이 이루어지고 있다. 적응 광학용 공간 빛 변조기는 대기의 turbulence에 의하여 왜곡된 빛의 위상을 파면 센서(wave sensor)와 실시간 제어기를 통해 보정하는 역할을 한다. 적응 광학 분야에서 상업적으로 사용되던 기존의 공간 빛 변조기는 전왜소자 배열(piezoelectric actuator array)에 의하여 지지되는 평면 거울을 사용하여 크기가 크고 전력 소비도 심하며 무엇보다도 가격이 비싸다는 단점이 있었다$^{(1)}$ . 그러나 MOEMS 기술의 적용으로 인해 공간 빛 변조기의 크기 및 무게 그리고 소비 전력이 줄어들었으며 반도체 공정을 통한 대량 생산으로 저가로 생산할 수 있게 되었다. (중략)

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.64-67
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• 2009

Vibrational micro-forming of pyramidal shape patterns was conducted for an Al superplastic alloy, Al 5083 and a Zr-based bulk metallic glass, $Zr_{62}Cu_{17}Ni_{13}Al_8$. A vibrational micro-forming system was specially designed for generating vibrational load by combining a PZT actuator with a signal generator. Single crystal Si micro dies with wet-etched pyramidal patterns were used as master dies for vibrational micro-forming. The micro-formed pattern height was increasing with increasing the frequency of the vibrational load. In particular, the vibrationally-microformed pattern height was similar or even higher than the statically-microformed pattern height when the load frequency exceeded about 125 kHz. It was also observed that the crystal grains affect the surface quality of the microformed pattern and the distribution of the pattern height in the die cavity array.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.1058-1062
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• 2003

This paper proposes a self-organizing fuzzy controller (SOFC) design technique applied to the vibration control of a dynamic system under irregular disturbance. In this controller, the fuzzy rules generate control signal continuously using the array of input and output pairs without using any special controller model. The generated rules are saved in the fuzzy rule matrix in real-time by self-organizing methods. This fuzzy logic control is demonstrated by simulation and shows the efficiency of the real-time self-organizing fuzzy controller in this system.

• Advances in robotics research
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• v.2 no.1
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• pp.99-112
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• 2018

The main contribution of this work is the design of a field programmable gate array (FPGA) based ARX-Laguerre proportional-integral observation (PIO) system for fault detection and identification (FDI) in a multi-input, multi-output (MIMO) nonlinear uncertain dynamical robot manipulators. An ARX-Laguerre method was used in this study to dynamic modeling the robot manipulator in the presence of uncertainty and disturbance. To address the challenges of robustness, fault detection, isolation, and estimation the proposed FPGA-based PI observer was applied to the ARX-Laguerre robot model. The effectiveness and accuracy of FPGA based ARX-Laguerre PIO was tested by first three degrees of the freedom PUMA robot manipulator, yielding 6.3%, 10.73%, and 4.23%, average performance improvement for three types of faults (e.g., actuator fault, sensor faults, and composite fault), respectively.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.147-154
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• 2004

This paper presents a procedure for analysis and design of a fine positioning stage, which has many applications in industries for machine tools, semiconductor, LCD and so forth. The stage considered here is based on a single module with 3 axes which is composed of flexures hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs(the flexures hinges). An experimental design procedure is applied to determine the dimension of flexures hinges. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage. An actual fine stage is made and verified through an experiment on the dynamic characteristics.

• Laser Solutions
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• v.14 no.2
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• pp.8-12
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• 2011

As the aged population grows around the world, many medical instruments and devices have been developed recently. Among the devices, a drug delivery stent is a medical device which requires precision machining. Conventional drug delivery stent has problems of residual polymer and decoating because the drug is coated on the surface of stent with the polymer. If the drug is impregnated in micro hole array on the surface of the stent, the problem can be solved. Micro sized holes are generally fabricated by laser machining; however, the fabricated holes do not have an enough aspect ratio to contain the drug or a good surface finish to deliver it to blood vessel tissue. To overcome these problems, we propose a vibration-assisted machining mechanism with PZT (Piezoelectric Transducers) for the fabrication of micro sized holes. If the mechanism vibrates the eyepiece of the laser machining head, the laser spot on the workpiece will vibrate vertically because objective lens in the eyepiece shakes by the mechanism's vibration. According to the former researches, the vibrating frequency over 20kHz and amplitude over 500nm are preferable. The vibration mechanism has cylindrical guide, hollowed PZT and supports. In the cylinder, the eyepiece is mounted. The cylindrical guide has upper and low plates and side wall. The shape of plates and side wall are designed to have high resonating frequency and large amplitude of motion. The PZT also is selected to have high actuating force and high speed of motion. The support has symmetrical and rigid characteristics.

• Proceedings of the KIEE Conference
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• 2007.11a
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• pp.148-149
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• 2007

We present the design and fabrication prcoess of a two-axis tilting micromirror device driven by the electrostatic vertical comb actuator. A high aspect-ratio comb actuator is fabricated by multiple DRIE process in order to achieve large scan angle. The proposed fabrication process enables a mirror to be fabricated on the wafer-scale. By bonding a double-side polished (DSP) wafer and a silicon-on-insulator (SOI) wafer together, all actuators on the wafer are completely hidden under the reflectors. Nickel lines are embedded on a Pyrex wafer for the electrical access to numerous electrodes of mirrors. An anodic bonding step is implemented to contact electrical lines with ail electrodes on the wafer at a time. The mechanical angle of a fabricated mirror has been measured to be 1.9 degree and 1.6 degree, respectively, in the two orthogonal axes under driving voltages of 100 V. Also, a $8{\times}8$ array of micromirrors with high fill-factor of 70 % is fabricated by the same fabrication process.

• The Transactions of the Korean Institute of Power Electronics
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• v.3 no.3
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• pp.165-172
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• 1998

The electromechanical energy conversion conditioning and processing implementation in USM direct motion control system is generally divided into two power stages: the two-phase high-frequency ac power inversion stage for driving piezoelectric ceramic PZT transducer array off the USM stator and the mechanical thrust power conversion stage based on the frictional force between the piezo electric stator array and the rotary slider of the USM. However, the dynamic and steady-state mathematical modeling of the USM is extremely default from a theoretical point of view because it contains many complicated an nonlinear characteristics dependant on operation temperature. In +2$0^{\circ}C$~3$0^{\circ}C$, the operating characteristics of the USM has represented normal condition. But the other temperature, it has abnormal condition so that driving frequency, current and motor speed will be down. The recent USM has controller without temperature compensation. This study represents the fuzzy controller for speed compensation according to operating temperature by driving frequency.

• Smart Structures and Systems
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• v.14 no.6
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• pp.1151-1172
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• 2014

This paper presents a user programmable computational/control platform developed to conduct real-time hybrid simulation (RTHS). The architecture of this platform is based on the integration of a real-time controller and a field programmable gate array (FPGA).This not only enables the user to apply user-defined control laws to control the experimental substructures, but also provides ample computational resources to run the integration algorithm and analytical substructure state determination in real-time. In this platform the need for SCRAMNet as the communication device between real-time and servo-control workstations has been eliminated which was a critical component in several former RTHS platforms. The accuracy of the servo-hydraulic actuator displacement control, where the control tasks get executed on the FPGA was verified using single-degree-of-freedom (SDOF) and 2 degrees-of-freedom (2DOF) experimental substructures. Finally, the functionality of the proposed system as a robust and reliable RTHS platform for performance evaluation of structural systems was validated by conducting real-time hybrid simulation of a three story nonlinear structure with SDOF and 2DOF experimental substructures. Also, tracking indicators were employed to assess the accuracy of the results.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.1
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• pp.77-84
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• 2013

In this paper, we review two-dimensional measuring methods referring to target patterns. The patterns consist of two linearly-repeated patterns or is designed repeatedly in two-dimension. The repeated properties are reflectivity, refractivity, air-gapping distance, capacitance, magnetic reluctance, electrical resistance and sloping gradient, etc. However, the optical methods are generally used for high speed processing and density, and their encoding principles are treated here. In case of two-dimensional pattern, as there is not inherently error between single units encoding the pattern except for the metrology frame errors, the end-effector position of an object accompanying the pattern can be measured with respect of the global frame without via error. Therefore, it is regarded as a substitute for laser interferometer with severe environmental constraints and has been applied to the high-accurate planar actuator.