• 한국소음진동공학회논문집
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• 제12권2호
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• pp.124-131
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• 2002

This paper presents the design of an active vibration suppression controller for an air-spring type vibration isolation table. Firstly, isolation system model is constructed considering the isolation table, attached equipment and voice-coil actuator. An active control system is designed based on frequency-shaped sliding mode control theory rewarding high frequency uncertainties with respect to attached equipments on the isolation table. Finally. the performance of the active isolation system is evaluated by simulation under some disturbance conditions which are transmitted from base structure of the isolation system.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 추계학술대회
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• pp.227-232
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• 2003

As the most precision equipment requiring very strict vibration environment are vulnerable to the surrounding vibration condition, they adapt the passive or active vibration isolation system. When it comes to the passive isolation system, the resonance of the isolation system causes excessive resonance response, and finally results in the degrade the equipment performance. This paper deals with the active control method to control this resonance induced response, and includes the experiment on the active control for controlling the resonance response on the table against the excitation of the same frequency with the natural frequency of the isolation system. The electromagnetic actuator was designed and the control effect was verified by the experiment. The experiment showed that the electromagnetic actuator is effective for controlling the low frequency isolation resonance response of the precision equipment.

• 한국소음진동공학회논문집
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• 제21권9호
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• pp.858-867
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• 2011

As applying an active control technique to a pneumatic vibration isolation system, the settling time for the payload excitation could be remarkably reduced as well as the improvement of isolation performance for the ground vibration. Some previous researches were dealt with the settling time through the simulation or experiment but, the discussion on the simulation or experimental results including moving parts, such as a XY-stage, on the isolation table rarely exists. As considering the moving part, the dynamic model could be time varying system and in such a case the force imposed on pneumatic vibration isolation table could be described by inertial forces of moving parts according to Newton's 3rd law, the action and reaction law. In this paper, the simulation procedure of the 3-DOF active pneumatic vibration isolation system including moving parts by TDC(time delay control) technique is proposed and the effectiveness through simulation results are also shown.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.176-179
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• 2005

To control the vibration transmitted to the precision instruments from ground has always been of great interest among the researchers. This paper proposes a single axis vibration isolation system which can be used as a module far a table top six axis isolator for highly precise measurement and actuation system. The combined active-passive isolation principle is used for vertical vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in series which consists of very stiff piezo actuator. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator. The active stage is isolated from the payload disturbance through the Passive stage and thus modularity in control is achieved. This made the control algorithm much easier as it does not need to be tuned to specific payload.

• 소음진동
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• 제2권4호
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• pp.281-292
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• 1992

Two types of vibration problems are encountered in industrial field: active isolation and passive isolation. In a passive type of vibration isolation, a foundation of a delicated machinery such as TEM, SEM, inspection- probe test, photolithograph, etc. is designed to have a vibration amplitude lower than an acceptable limit. In an active type, the isolation is focused on the vibration reduction caused by the machine itself(pump, motor, press, compressor, etc.). The foundation for such a machine should be so designed as to reduce the transmitted vibration below the permissible level prescribed. At any case, a transmissibility and stability must to be considered. Since an active isolation type is aimed for a vibration source, it is useful to isolate the transmitted vibrations energy from a major vibration source at the specific location. In this paper, a designed methodology of double anti-vibration system has been examined in order to have low transmissibility and reliable stability. Also experiment of scale model behavior has been conducted. Finally, the experiment output of the transfer function is compared to the analytical data.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 춘계학술대회논문집
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• pp.185-190
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• 2007

최근 반도체 및 디스플레이 산업 등에서 초정밀 가공, 측정 등이 필요함에 따라, 외란과 내부 진동을 차단하는 방진 시스템에 대한 연구가 활성화 되고 있다. 기존에 소개된 여러 방진 시스템 중에서 가장 많이 연구되는 공기스프링은 압축 공기를 이용하여 큰 하중을 지지할 수 있으면서 상대적으로 낮은 강성으로 낮은 고유진동수를 유지할 수 있다. 본 연구는 기존의 레벨링 밸브를 이용한 수동 방진 시스템을 분석하여 이를 개선하고 능동 방진 시스템을 설계한다. 공기의 비선형 특성에 기인하는 복잡한 비선형 시스템 제어에 PID 제어기 보다 유리한 퍼지 제어기를 설계하였고, 실험과 해석을 비교하였다.

• 반도체디스플레이기술학회지
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• 제6권4호
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• pp.17-22
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• 2007

Vibration isolation equipments are mostly required in precise measurement and manufacturing system. Among all the vibration isolation equipments, air-spring is the most widely used equipment because of low resonant frequency and high damping ratio. In this study, we used Takagi-Sugeno fuzzy method to design an active vibration isolation system using air-spring, and compared the fuzzy method with passive control method and PID control method. Due to the non-linearity characteristics of air-spring, fuzzy controller was verified to be the most effective both in simulation and experiment.

• 대한기계학회논문집A
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• 제33권11호
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• pp.1347-1352
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• 2009

Magnetic force driven six degree-of-freedom active vibration isolation system is developed. The velocity sensor using an electromagnetic principle that is commonly used in the vibration control is investigated since its phase lead characteristic causes an instability problem for a low frequency vibration. A lag-type compensator is adopted to reduce the phase lead and the stability test is performed by using a Bode analysis. The performance of the AVIS is validated by comparing with the passive isolation system by using the frequency responses.

• 대한기계학회논문집A
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• 제20권10호
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• pp.3079-3094
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• 1996

Recently, the high-precision vibration attenuation technology becomes the essence fo the seccessful development of high-integrated and ultra-precision industries, and is expected to continue playing a key role in the enhancement of manufacturing technology. Vibration isolation system using an air-spring is widely employed owing to its excellent isolation characteristics in a wide frequency range. It has, however, some drawbacks such as low-stiffness and low-damping features and can be easily excited by exogenous disturbances, and then vibration of table is remained for a long time. Consequently, the need for active vibration control for an air-spring vibration isolation system becomes inevitable. Furthermore, for an air-spring isolation table to be successfully employed in a variety of manufacturing sites, it should have a guaranteed robust performance not only to exogenous disturbances but also to uncertainties due to various equipments which might be put on the table. In this study, an active vibration suppression control system using H.inf. theory is designed and experiments are performed to verify its robust performance. An air-spring vibration isolation table with voice-coil-motors as its actuators is designed and built. The table is modeled as 3 degree-of-freedom system. An active control system is designed based on $H_\infty$control theory using frequency-shaped weighting functions. Analysis on its performance and frequency responce properties are done through numerical simulations. Robust characteristics of$H_\infty$ control on disturbances and model uncertainties are experimentally verified through (i) the transient response to the impact excitation of the table, (ii) the steady-state response to the harmonic excitation, and (iii) the response to the mass change of the table itself. An LQG controller is also designed and its performance is compared with the $H_\infty$ controller.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 추계학술대회논문집
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• pp.731-736
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• 2007

최근 반도체 및 디스플레이 산업 등에서 초정밀 가공 및 측정에 방진 시스템을 많이 필요로 한다. 기존에 소개된 여러 방진 시스템 중에서 가장 많이 연구되는 공기스프링은 압축 공기를 이용하여 큰 하중을 지지할 수 있으면서 상대적으로 낮은 강성으로 낮은 고유진동수를 유지할 수 있다. 본 연구는 Takagi-Sugeno 퍼지 방법을 이용해서 능동 방진 시스템을 설계한다. 공기의 비선형 특성에 기인하는 복잡한 비선형 시스템 제어에 PID 제어기 보다 유리한 퍼지 제어기를 설계하였고, 실험과 해석을 비교하였다.