• 소성∙가공
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• 제13권3호
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• pp.225-229
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• 2004

Chemical Mechanical Polishing(CMP) process becomes one of the most important semiconductor processes. But the basic mechanism of CMP still does not established. Slurry fluid dynamics that there is a slurry film between a wafer and a pad and contact mechanics that a wafer and a pad contact directly are the two main studies for CMP. This paper based on the latter one, especially on the abrasion wear model. Material Removal Rate(MRR) is calculated using the trajectory length of every point on a wafer during the process time. Both the rotational velocity of a wafer and a pad and the wafer oscillation velocity which has omitted in other studies are considered. For the purpose of the verification of our simulation, we used the experimental results of S.H.Li et al. The simulation results show that the tendency of the calculated MRR using the relative velocity is very similar to the experimental results and that the oscillation effect on MRR at a real CMP condition is lower than 1.5%, which is higher than the relative velocity effect of wafer, and that the velocity factor. not the velocity itself, should be taken into consideration in the CMP wear model.

• Tribology and Lubricants
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• 제27권6호
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• pp.321-325
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• 2011

Nanodiamond was dispersed in paraffin liquid oil to investigate the effects of nanodiamond at the marginally lubricated condition. Scuffing test and immediate loading sliding wear test were conducted using the fabricated nanodiamond oil. As a result, dispersion of nanodiamond in oil leads to increase in scuffing life, and nanodiamond contents affects the scuffing life. In case of immediate loading sliding wear test, the result was different according to hardness of specimen. If hardness of specimen was low, abrasion of nanodiamond occurred actively. If hardness of specimen was increased, however, nanodiamond can act as a spacer or rolling between contacting surfaces.

• 한국분말재료학회지
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• 제26권3호
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• pp.214-219
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• 2019

In this study, the microstructure and characterization of an overlay welding layer using Fe-based composite powders are reported. The effects of the number of passes and composition of powders on the microstructure and mechanical properties are investigated in detail. The welding wire and powders are deposited twice on a stainless-steel rod using a laser overlay welding process. The microstructure and structural characterization are performed by scanning electron microscopy and X-ray diffraction. The mechanical properties of the first and second overlay layers are analyzed through the micro-Vickers-hardness tester and abrasion wear tester. In the second overlay layer, the hardness and specific wear are approximately 840 Hv and $2.0{\times}10^{-5}mm^3/Nm$, respectively. It is suggested that the increase of the volume fractions of $(Cr,Fe)_7C_3$ and NbC phases in the second welding layer enhances the hardness and wear resistance.

• 소성∙가공
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• 제28권1호
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• pp.34-42
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• 2019

In this study, various alloying elements (Cr, Sr, Ca, Cd) were added to improve the mechanical properties of ADC12 fabricated by a die casting process. The effect of alloying elements on the microstructure and mechanical properties were investigated. The phase analysis results of the modified ADC12 alloy with conventional ADC12 alloy, showed the similar characteristics of Al matrix, Si phase, $CuAl_2$ phase and the Fe intermetallic phase. As a result of the microstructure observation, the secondary dendrite arm spacing (SDAS) was shown to have decreased after the addition of the alloying elements. The eutectic Si phase, which existed as flake form in the conventional ADC12 alloy, was modified finely as a fiber form in the modified ADC12 alloy. It was observed that the $CuAl_2$ phase as the strengthening phase was relatively finely distributed in the modified ADC12 alloy. The Fe intermetallic appeared as a Chinese script shaped $Al_6$ (Mn,Fe) which is detrimental to mechanical properties in conventional ADC12 alloy. On the other hand, in the modified ADC12 alloy, polyhedral ${\alpha}-Al_{15}Si_2$ $(Fe,Mn,Cr)_3$ was observed. The tensile properties were improved in the modified ADC12 alloy. The yield strength and tensile strength increased by 12.4% and 10.0%, respectively, in the modified ADC12 alloy, and the elongation was also seen to have been increased. As a result of the pin on disk wear test, the wear resistance properties were also improved by up to about 7% in the modified ADC12 alloy. It is noted that the wear deformation microstructures were also observed, and it was found that the fine eutectic Si and strengthening phases greatly improved abrasion resistance.

• 한국터널지하공간학회 논문집
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• 제21권1호
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• pp.49-59
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• 2019

본 연구는 로터리드럼커터에 적용된 두 종류의 코니컬 픽커터에 대한 현장시험을 통해 시험 전과 후의 육안조사와 중량감소 및 마모부피를 측정하여 코니컬 픽커터의 내구성을 비교 분석하였다. 육안조사를 통해 슬림 타입 코니컬 픽커터에서만 총 9개의 삽입재 손실이 나타남을 확인하였고 삽입재 보호를 위해 두부의 두께가 중요함을 알 수 있었다. 시험 전과 후의 픽커터의 중량손실과 마모부피는 헤비타입이 슬림타입에 비해 반이하로 작게 나타나 경암반에서 헤비타입이 더 유용함을 확인할 수 있었다. 픽커터의 마모손실을 판단할 때, 중량측정과 마모부피 측정결과의 상호 비교는 재료의 단위중량과 굴착에 의한 스폴링에 의해 차이가 나타날 수 있으므로 주의해야 할 것으로 판단된다.

• Structural Engineering and Mechanics
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• 제84권1호
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• pp.17-33
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• 2022

An experimental study is carried out to investigate the performance of the cutting tool regarding the insert wear, surface roughness, cutting forces, cutting power and material removal rate of three coated carbides GC2015 (TiCN-Al₂O₃-TiN), GC4215 (Al₂O₃-Ti(C,N)) and GC1015 (TiN) during the dry turning of AISI4140 steel. For this purpose, a Taguchi design (L₉) was adopted for the planning of the experiments, the effects of cutting parameters on the surface roughness (R_a), tangential cutting force (F_z), the cutting power (P_c) and the material removal rate (MRR) were studied using analysis of variance (ANOVA), the response surface methodology (RSM) was used for mathematical modeling, with which linear mathematical models were developed for forecasting of R_a, F_z, P_c and MRR as a function of cutting parameters (V_c, f, and a_p). Then, Multi-Objective Ant Lion Optimizer (MOALO) has been implemented for multi-objective optimization which allows manufacturers to enhance the production performances of the machined parts. Furthermore, in order to characterize and quantify the flank wear of the tested tools, some machining experiments were performed for 5 minutes of turning under a depth of 0.5 mm, a feed rate of 0.08 mm/rev, and a cutting speed of 350 m/min. The wear results led to a ratio (V_B-GC4215/V_B-GC2015) of 2.03 and (V_B-GC1015/V_B-GC2015) of 4.43, thus demonstrating the efficiency of the cutting insert GC2015. Moreover, SEM analysis shows the main wear mechanisms represented by abrasion, adhesion and chipping.

• Tribology and Lubricants
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• 제38권6호
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• pp.274-280
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• 2022

There is a problem that semiconductor probe pin has a short lifespan. In order to solve this problem, Ti having excellent conductivity was doped to tetrahedral amorphous carbon (ta-C) having excellent hardness and abrasion resistance. This experiment was planned through the Taguchi robust design to determine the effect of the control factor of the ta-C:Ti coating film. The effect and contribution of control factors such as Unbalanced Magnetron Sputter(UBM) discharge current, arc discharge current, temperature, and bias voltage on ta-C:Ti characteristics were analyzed from the perspective of electrical and mechanical characteristics. The UBM discharge current was set to 4, 6, and 8 A. The main control factor of thickness and resistance is the UBM discharge current, and the thickness increased and the resistance decreased as the current increased. The decrease in resistance is due to the increase in the Ti content of the ta-C:Ti coating film. The arc discharge current was set to 60, 80, and 100 A. The main control factor of hardness and wear is the arc discharge current, and as the current rises, the hardness increases and the wear area decreases. This is due to the increased ta-C content of the ta-C:Ti coating film. Since resistance and wear are important for Probe Pin, the optimal level is set from the perspective of resistance and wear and a confirmation experiment is conducted.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2008년도 하계학술발표대회 논문집
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• pp.194-202
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• 2008

In this study, we investigated the tribology behaviour of two different bearing materials. One of these alloys content is Cu(90)-Sn(10) alloy and is widely used in the automotive industry.The other is Al alloy. This bearing content is Al-Sn-Si-Cu. Therefore, it is required to study on the lublicating characteristics of bearing according to different materials. In this study, compressor bearings made by respectively "PTFE solid lubricant" and "AI alloy with superior load carrying capacity, rubbing and impact endurance", have gone through journal bearing test. Lubrication and abrasion characteristics are evaluated by analyzing the material characteristics of a scroll compressor bearing bush. The AI alloy bearing showed the most excellent lubrication and abrasion characteristics than Cu-Sn alloy under high load condition.

• 대한금속재료학회지
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• 제48권3호
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• pp.248-255
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• 2010

The effect of various alloying elements and melt treatment on the microstructural control of Al-Sn metallic bearing alloy was investigated. The thickness of tin film crystallized around primary aluminum decreased with the addition of 5% Cu in Al-Sn alloy, with tin particles being reduced in size by intervening the Ostwald ripening. With the addition of Si in Al-10%Sn alloy, the tin particles were crystallized with eutectic silicon, resulting in uniform distribution of tin particles. With the addition of Cu and Si in Al-Sn alloy, both the tensile strength and yield strength increased, with the increasing rate of yield strength being less than that of tensile strength. Although the Al-10%Sn-7%Si alloy has similar tensile strength compared with Al-10%Sn-5%Cu, the former showed superior abrasion resistance, resulting from preventing the tin particles from movement to the abrasion surface.

• 한국산학기술학회논문지
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• 제11권6호
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• pp.2292-2299
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• 2010

온열안마기의 내부천으로 사용되고 있는 직물의 내구성을 향상시키고자 기존 PET/면 혼방직물의 마모현상을 분석하고, 그 문제점을 보완할 수 있는 난연성 PET 직물을 설계/제조한 후 물리적 성능 및 내구성을 평가하였다. 기존 직물의 경우 구동부분의 반복적인 마찰에 의한 마모뿐만 아니라, 구동시 내부천의 이동에 의해 발생하는 접힘 현상이 회복되지 못하기 때문에 직물의 파손이 가속화되는 것으로 나타났다. 따라서 섬유재질의 변경, 신축사, 강연사, 조직의 변경 등을 적용하여 물리적 성능 및 내마모성을 크게 개선한 내부천을 제조하였다. 특히 신축사를 사용 한 직물의 내구성은 크게 향상되어 기존 직물 대비 2배 이상의 사용시간을 증가시킬 수 있었으며, 강연사를 사용한 직물은 약 1.5배 정도 내마모시간이 증가하는 결과를 얻었다.