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http://dx.doi.org/10.9725/kts.2022.38.6.274

Conductive and Mechanical Properties Study of Ti-doped DLC (ta-C:Ti) Film on Semiconductor Probe through Taguchi Bobust Design  

Kim, Do-young (Dept. of Energy, Materials & Chemical Engineering, Korea University of Technology and Education)
Shin, Jun-ki (Dept. of Bio-industrial Machinery Engineering Pusan National University)
Jang, Young-Jun (Korea Institute of Materials Science (KIMS))
Kim, Jongkuk (Korea Institute of Materials Science (KIMS))
Publication Information
Tribology and Lubricants / v.38, no.6, 2022 , pp. 274-280 More about this Journal
Abstract
There is a problem that semiconductor probe pin has a short lifespan. In order to solve this problem, Ti having excellent conductivity was doped to tetrahedral amorphous carbon (ta-C) having excellent hardness and abrasion resistance. This experiment was planned through the Taguchi robust design to determine the effect of the control factor of the ta-C:Ti coating film. The effect and contribution of control factors such as Unbalanced Magnetron Sputter(UBM) discharge current, arc discharge current, temperature, and bias voltage on ta-C:Ti characteristics were analyzed from the perspective of electrical and mechanical characteristics. The UBM discharge current was set to 4, 6, and 8 A. The main control factor of thickness and resistance is the UBM discharge current, and the thickness increased and the resistance decreased as the current increased. The decrease in resistance is due to the increase in the Ti content of the ta-C:Ti coating film. The arc discharge current was set to 60, 80, and 100 A. The main control factor of hardness and wear is the arc discharge current, and as the current rises, the hardness increases and the wear area decreases. This is due to the increased ta-C content of the ta-C:Ti coating film. Since resistance and wear are important for Probe Pin, the optimal level is set from the perspective of resistance and wear and a confirmation experiment is conducted.
Keywords
Taguchi robust design; ta-C:Ti; Conductive; Hardness; wear;
Citations & Related Records
Times Cited By KSCI : 7  (Citation Analysis)
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