• Title/Summary/Keyword: AFm phase

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Effect of Rapid Thermal Annealing and Orientation of Si Substrate on Structural and Electrical Properties of MOCVD-grown TiO2 Thin Films (급속 후 열처리 및 실리콘기판 배향에 따른 MOCVD-TiO2박막의 구조적.전기적 특성)

  • 왕채현;최두진
    • Journal of the Korean Ceramic Society
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    • v.35 no.1
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    • pp.88-96
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    • 1998
  • The structural and electrical properties of titanium dioxide(TiO2) thin films deposited on p-type (100) si and 4$^{\circ}$off(100) Si substartes by metalorganic chemical vapor deposition (MOCVD) have been studied with post rapid thermal annealing. TiO2 thin films of anatase phase were grown at 300-500$^{\circ}C$ using titanium post rapid thermal annealing at a temperature of 800$^{\circ}C$ for 30sec. rutile phase was observed in the condition of the deposition temperature over 350$^{\circ}C$ in the ambient air atmosphere and at 500$^{\circ}C$ in cacuu,. SEM and AFM study show-ed surface roughness were increased slightly from 40${\AA}$to 55${\AA}$ after annealing due to grain growth and phase transformation. From capacitane-voltage measurement of Al/TiO2./p-Si structure after annealing we obtained ideal capacitance-voltage characteristics of MOS structure with dielectric constant of 16-22 in case of (100) Si and about 30- in case of 4$^{\circ}$off(100) Si but showed the higher leakage current.

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Unambiguous 3D Surface Measurement Method for a Micro-Fresnel Lens-Shaped Lenticular Lens Based on a Transmissive Interferometer

  • Yoon, Do-Young;Kim, Tai-Wook;Kim, Minsu;Pahk, Heui-Jae
    • Journal of the Optical Society of Korea
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    • v.18 no.1
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    • pp.37-44
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    • 2014
  • The use of a laser interferometer as a metrological tool in micro-optics measurement is demonstrated. A transmissive interferometer is effective in measuring an optical specimen having a high angle slope. A configuration that consists of an optical resolution of 0.62 micron is adapted to measure a specimen, which is a micro-Fresnel lens-shaped lenticular lens. The measurement result shows a good repeatability at each fraction of facets, however, a reconstruction of the lens shape profile is disturbed by a known problem of $2{\pi}$-ambiguity. To solve this $2{\pi}$-ambiguity problem, we propose a two-step phase unwrapping method. In the first step, an unwrapped phase map is obtained by using a conventional unwrapping method. Then, a proposed unwrapping method based on the shape modeling is applied to correct the wrongly unwrapped phase. A measured height of each facet is compared with a profile result measured by AFM.

Structural and Optical Properties of Self-assembled InAs/InAl(Ga)Ae Quantum Dots on InP (InP 기판에 성장한 자발형성 InAs/InAl(Ga)As 양자점의 구조 및 광학적 특성)

  • Kim Jin-Soo;Lee Jin-Hong;Hong Sung-Ui;Kwack Ho-Sang;Choi Byung-Seok;Oh Dae-Kon
    • Journal of the Korean Vacuum Society
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    • v.15 no.2
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    • pp.194-200
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    • 2006
  • Self-assembled InAs/InAl(Ga)As quantum dots (QDs) were grown on InP substrates by a molecular-beam epiaxy, and their structural and optical properties were investigated by atomic force microscopy (AFM), transmission electron microscopy (TEM), and room-temperature photoluminescence (PL). AFM images indicated that the InAs quantum structures showed various shapes such as quantum dashes, asymmetric and symmetric QDs mainly caused by the initial surface conditions of InAl(Ga)As with the intrinsic phase separation. For the buried InAs QDs in an InAlGaAs matrix, the average lateral size and height of QDs were 23 and 2 nm, respectively. By changing the growth conditions for the QD samples, the emission wavelength of $1.55{\mu}m$ was obtained, which is one of the wavelength windows for fiber optic communications.

A Study on Inhibition of Bacterial Membrane Formation in Biofilm formed by Acne Bacteria in Valine through Property Analysis (물성 분석을 통한 Valine 의 여드름균 바이오필름 내부 세균막 형성 억제 연구)

  • Song, Sang-Hun;Hwang, Byung Woo;Son, Seongkil;Kang, Nae-Gyu
    • Journal of the Society of Cosmetic Scientists of Korea
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    • v.47 no.2
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    • pp.163-170
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    • 2021
  • This study was conducted to create a technology to remove acne bacteria with human-friendly materials. First, the Cutibacterium acnes (C. acnes) were adsorbed to the mica disc to grow, and then the biofilm was checked through an atomic microscope to see if the biofilm had grown. Based on the topographic image, the shape changed round, the size was 17% longer on average, and the phase value of the resonance frequency separating materials was observed as a single value, the biofilm grown by covering the extracellular polymeric substrate (EPS). As a result of processing 50 mM of amino acids in the matured biofilm, the concentration of C. acnes decreased when valine, serine, arginine and leucine were treated. Scanning with nanoindentation and AFM contact modes confirmed that the hardness of biofilms treated with Valine (Val) increased. This indicates that an AFM tip measured cell which may have more solidity than that of EPS. The experiment of fluorescent tagged to EPS displays an existence of EPS at the condition of 10 mM Val, but an inhibition of growth of EPS at the 50 mM Val. Number of C. acnes was also reduced above 10 mM of Val. Weak adhesion of biofilm generated from an inhibition of EPS formation seems to induce decrease of C. acnes. Accordingly, we elucidated that Val has an efficiency which eliminates C. acnes by approach of an inhibition of EPS.

Thermal Annealing Effect on the Machining Damage for the Single Crystalline Silicon (단결정 실리콘의 기계적 손상에 대한 열처리 효과)

  • 정상훈;정성민;오한석;이홍림
    • Journal of the Korean Ceramic Society
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    • v.40 no.8
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    • pp.770-776
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    • 2003
  • #140 mesh and #600 mesh wheels were adopted to grind (111) and (100) oriented single crystalline silicon wafer and the grinding induced change of the surface integrity was investigated. For this purpose, microroughness, residual stress and phase transformation were analyzed for the ground surface. Microroughness was analyzed using AFM (Atomic Force Microscope) and crystal structure was analyzed using micro-Raman spectroscopy. The residual stress and phase transformation were also analyzed after thermal annealing in the air. As a result, microroughness of (111) wafer was larger than that of (100) wafer after grinding. It was observed using Raman spectrum that the silicon was transformed from diamond cubic Si-I to Si-III(body centered tetragonal) or Si-XII(rhombohedral). Residual stress relaxation was also shown in cavities which were produced after grinding. The thermal annealing was effective for the recovery of the silicon phase to the original phase and the residual stress relaxation.

A Syudy on the Deposition Film Properties of Arachidic acid and Stearic acid (Arachidic acid와 Stearic acid의 누적막 특성에 관한 연구)

  • Choi, Young-Il;Kang, Young-Chul;Song, Jin-Won;Lee, Kyung-Sup;Oh, Jea-Han;Cho, Su-Young;Kim, Younq-Geun
    • Proceedings of the KIEE Conference
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    • 2001.07c
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    • pp.1527-1529
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    • 2001
  • The physicochemical properties of the LB films were by AFM. We give pressure stimulation into organic thin films and then manufacture a device under the accumulation condition that the state surface pressure is 2, 10, 30[mN/m]. The stable images are probably due to a s interaction between the monolayer film and substrate. We are unable to obtain molecule res in images of the films but did see a marked co between images of the bare substrate and those the network structure film deposited ont Formation that prevent when gas phase stat liquid phase state measure but Could know o matter that molecules form equal and stable when molecules were not distributed evenly, accumulated in solid state only.

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Dielectric and Structural of BST Thin Films with Ce-doped prepared by Sol-gel method for Phase shifters (Phase shifters 응용을 위한 Sol-gel 법으로 제작된 BST 박막의 Ce 첨가에 따른 구조적, 유전적 특성)

  • Kim, Dong-Pyo;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.776-779
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    • 2004
  • The dielectric and electrical characteristics of Ce doped (Ba0.6Sr0.4)TiO3 (BST) thin films were investigated as a function of Ce content. Both atomic force microscopy (AFM) and x-ray diffraction (XRD) analysis showed that increasing the Ce doping ratio causes the decrease in grain size while the surface remains smooth and crack-free. The dielectric properties of the Ce doped BST films were found to be strongly dependent on the Ce contents. The dielectric constant and dielectric loss of the BST films decreased with increasing Ce content. However, it was also found that, compared with undoped films, the increase of Cecontent improves the leakage-current characteristics. The improvement of the electrical properties of Ce-doped BST films may be related to the decrease in the concentration of oxygen vacancies. The figure of merit (FOM) reached the maximum value of 48.9 at the 1 mol % of Cedoping. The dielectric constant, loss factor, and tunability of the 1 mol% Ce doped Ba0.6Sr0.4TiO3 thin films were 320, 0.011, and 46.3%, respectively.

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A Study on the Image and Surface Structure analysisthat Manufacture by LB Method of LB Thin Film (LB박막의 이미지와 표면구조분석에 관한 연구)

  • Song, Jin-Won;Lee, Kyung-Sup;Choi, Young-Il;Chung, Hun-Sang;Gu, Hal-Bon;Kim, Young-Keun;Lee, Young-Gil
    • Proceedings of the KIEE Conference
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    • 2002.07c
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    • pp.1618-1620
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    • 2002
  • Transformation of molecular film occurs only usually in air-water interface, 2 dimensions domain's growth and crash are achieved. Organic matter thin film that accumulate molecular film in archaism board only that consist of growth of domain can understand correct special quality of accumulation film supplying information about fine structure and properties of matter of device observing information and so on that is surface forward player and optic enemy using AFM one of SPM application by nano electronics. The stable images are probably due to a strong interaction between the monolayer film and glass substrate. We are unable to obtain molecule resolution in images of the films but did see a marked contrast between images of the bare substrate and those with the network structure film deposited onto it. Formation that prevent when gas phase state and liquid phase state measure but Could know organic matter that molecules form equal and stable film when molecules were not distributed evenly, and accumulated in solid state only.

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Preparation of Resveratrol-loaded Poly($\varepsilon$-caprolactone) Nanoparticles by Oil-in-water Emulsion Solvent Evaporation Method

  • Kim, Bum-Keun;Lee, Jun-Soo;Oh, Ju-Kyoung;Park, Dong-June
    • Food Science and Biotechnology
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    • v.18 no.1
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    • pp.157-161
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    • 2009
  • Resveratrol-loaded poly($\varepsilon$-caprolactone) (PCL) nanoparticles were prepared by oil in water (O/W) emulsion solvent evaporation method. The morphology of the nanoparticles was evaluated using atomic force microscope (AFM), in which well-shaped and rigid nanoparticles were prepared. The mean particle size of nanoparticles prepared using only dichloromethane (DCM) ($523.5{\pm}36.7\;nm$) was larger than that prepared with a mixture of DCM and either ethanol (EtOH) ($494.5{\pm}29.2\;nm$) or acetone ($493.5{\pm}6.9\;nm$). The encapsulation efficiency of nanoparticles prepared only with DCM as dispersed phase ($78.3{\pm}7.7%$) was the highest of those prepared with solvent mixtures. An increase in the molecular weight of PCL led to an increase in encapsulation efficiency (from $78.3{\pm}7.7$ to $91.4{\pm}3.2%$). Pluronic F-127 produced the smallest mean size ($523.5{\pm}36.7\;nm$) with the narrowest particle size distribution. These results show that dispersed phase, molecular weight of wall materials, emulsion stabilizer could be important factors to affect the properties of nanoparticles.

Development of Highly Conductive Poly(3,4-ethylenedioxythiophene) Thin Film using High Quality 3-Aminopropyltriethoxysilane Self-Assembled Monolayer (고품질 3-Aminopropyltriethoxysilane 자기조립단분자막을 이용한 고전도도 Poly(3,4-ethylenedioxythiophene) 전극박막의 개발)

  • Choi, Sangil;Kim, Wondae;Kim, Sungsoo
    • Journal of Integrative Natural Science
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    • v.4 no.4
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    • pp.294-297
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    • 2011
  • Quality of PEDOT electrode thin film vapor phase-polymerized on 3-aminopropyltriethoxysilane (APS) self-assembled monolayer (SAM) is very crucial for making an ohmic contact between electrode and semiconductor layer of an organic transistor. In order to improve the quality of PEDOT film, the quality of APS-SAM laying underneath the film must be in the best condition. In this study, in order to improve the quality of APS-SAM, the monolayer was self-assembled on $SiO_2$ surface by a dip-coating method under strictly controlled relative humidity (< 18%RH). The quality of APS-SAM and PEDOT thin film were investigated with a contact angle analyzer, AFM, FE-SEM, and four-point probe. The investigation showed that a PEDOT film grown on the humidity-controlled SAM is very smooth and compact (sheet resistivity = 20.2 Ohm/sq) while a film grown under the uncontrolled condition is nearly amorphous and contains quite many pores (sheet resistivity = 200 Ohm/sq). Therefore, this study clearly proves that a highly improved quality of APSSAM can offer a highly conductive PEDOT electrode thin film on it.