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http://dx.doi.org/10.3807/JOSK.2014.18.1.037

Unambiguous 3D Surface Measurement Method for a Micro-Fresnel Lens-Shaped Lenticular Lens Based on a Transmissive Interferometer  

Yoon, Do-Young (School of Mechanical and Aerospace Engineering, Seoul National University)
Kim, Tai-Wook (SNU Precision Co., Ltd.)
Kim, Minsu (School of Mechanical and Aerospace Engineering, Seoul National University)
Pahk, Heui-Jae (School of Mechanical and Aerospace Engineering, Seoul National University)
Publication Information
Journal of the Optical Society of Korea / v.18, no.1, 2014 , pp. 37-44 More about this Journal
Abstract
The use of a laser interferometer as a metrological tool in micro-optics measurement is demonstrated. A transmissive interferometer is effective in measuring an optical specimen having a high angle slope. A configuration that consists of an optical resolution of 0.62 micron is adapted to measure a specimen, which is a micro-Fresnel lens-shaped lenticular lens. The measurement result shows a good repeatability at each fraction of facets, however, a reconstruction of the lens shape profile is disturbed by a known problem of $2{\pi}$-ambiguity. To solve this $2{\pi}$-ambiguity problem, we propose a two-step phase unwrapping method. In the first step, an unwrapped phase map is obtained by using a conventional unwrapping method. Then, a proposed unwrapping method based on the shape modeling is applied to correct the wrongly unwrapped phase. A measured height of each facet is compared with a profile result measured by AFM.
Keywords
Metrology; Interferometer; Lenticular; Unwrapping;
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Times Cited By KSCI : 3  (Citation Analysis)
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