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Wear Characteristics of Atomic force Microscope Tip  

정구현 (연세대학원 기계공학과)
김대은 (연세대학교 기계공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.5, 2003 , pp. 189-195 More about this Journal
Abstract
Atomic Force Microscope (AFM) has been widely used in micro/nano-scale studies and applications for. the last few decade. In this work, wear characteristics of silicon-based AFM tip was investigated. AFM tip shape was observed using a high resolution SEM and the wear coefficient was approximately calculated based on Archard's wear equation. It was shown that the wear coefficient of silicon and silicon nitride were in the range of ${10}^{-1}$~${10}^{-3}$ and ${10}^{-3}$~${10}^{-4}$, respectively. Also, the effect of relative humidity and sliding distance on adhesion-induced tip wear was discussed. It was found that the tip wear has more severe for harder test materials. Finally, the probable wear mechanism was analyzed from the adhesive and abrasive interaction point of view.
Keywords
Adhesion; AFM; Si tip; Si$_3$N$_4$ tip; Nano-wear;
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