• Title/Summary/Keyword: 3D 정합

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An Intelligent Monitoring System of Semiconductor Processing Equipment using Multiple Time-Series Pattern Recognition (다중 시계열 패턴인식을 이용한 반도체 생산장치의 지능형 감시시스템)

  • Lee, Joong-Jae;Kwon, O-Bum;Kim, Gye-Young
    • The KIPS Transactions:PartD
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    • v.11D no.3
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    • pp.709-716
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    • 2004
  • This paper describes an intelligent real-time monitoring system of a semiconductor processing equipment, which determines normal or not for a wafer in processing, using multiple time-series pattern recognition. The proposed system consists of three phases, initialization, learning and real-time prediction. The initialization phase sets the weights and tile effective steps for all parameters of a monitoring equipment. The learning phase clusters time series patterns, which are producted and fathered for processing wafers by the equipment, using LBG algorithm. Each pattern has an ACI which is measured by a tester at the end of a process The real-time prediction phase corresponds a time series entered by real-time with the clustered patterns using Dynamic Time Warping, and finds the best matched pattern. Then it calculates a predicted ACI from a combination of the ACI, the difference and the weights. Finally it determines Spec in or out for the wafer. The proposed system is tested on the data acquired from etching device. The results show that the error between the estimated ACI and the actual measurement ACI is remarkably reduced according to the number of learning increases.

Tunnel Reverse Engineering Using Terrestrial LiDAR (지상LiDAR를 이용한 터널의 Reverse Engineering)

  • Cho, Hyung Sig;Sohn, Hong Gyoo;Kim, Jong Suk;Lee, Suk Kun
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.28 no.6D
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    • pp.931-936
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    • 2008
  • Surveying by using terrestrial LiDAR(Light Detection And Ranging) is more rapid than by using total station which enables tunnel section profile surveying to be done in suitable time and minimize centerline error, occurrence of overcut and undercut. Therefore, utilization of terrestrial LiDAR has increased more and more in section profile survey and measurement field Moreover, studies of terrestrial LiDAR for accurate and efficient utilization is now ongoing vigorously. Average end area formula, which was generally used to calculate overcut and undercut, was compared with existing methods such as total station survey and photogrammetry. However, there are no criteria of spacing distance for calculating overcut and undercut through terrestrial LiDAR surveying which can acquire 3D information of whole tunnel. This research performed reverse engineering to decide optimal spacing distance when surveying tunnel section profile by comparing whole tunnel volume and tunnel volume in difference spacing distance. This result was utilized to produce CAD drawing for the test tunnel site where there is no design drawings. In addition to this, efficiency of LiDAR and accuracy of CAD drawing was compared with targetless total station surveying of tunnel section profile. Finally, error analysis of target coordinate's accuracy and incidence angle was done in order to verify the accuracy of terrestrial LiDAR technology.

PTV Margins for Prostate Treatments with an Endorectal Balloon (전립선 암의 방사선치료 시 직장 내 풍선삽입에 따른 계획표적부피마진)

  • Kim, Hee-Jung;Chung, Jin-Beom;Ha, Sung-Whan;Kim, Jae-Sun;Ye, Sung-Joon
    • Radiation Oncology Journal
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    • v.28 no.3
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    • pp.166-176
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    • 2010
  • Purpose: To determine the appropriate prostate planning target volume (PTV) margins for 3-dimensitional (3D) conformal radiotherapy (CRT) and intensity-modulated radiation therapy (IMRT) patients treated with an endorectal balloon (ERB) under our institutional treatment condition. Materials and Methods: Patients were treated in the supine position. An ERB was inserted into the rectum with 70 cc air prior to planning a CT scan and then each treatment fraction. Electronic portal images (EPIs) and digital reconstructed radiographs (DRR) of planning CT images were used to evaluate inter-fractional patient's setup and ERB errors. To register both image sets, we developed an in-house program written in visual $C^{++}$. A new method to determine prostate PTV margins with an ERB was developed by using the common method. Results: The mean value of patient setup errors was within 1 mm in all directions. The ERB inter-fractional errors in the superior-inferior (SI) and anterior-posterior (AP) directions were larger than in the left-right (LR) direction. The calculated 1D symmetric PTV margins were 3.0 mm, 8.2 mm, and 8.5 mm for 3D CRT and 4.1 mm, 7.9 mm, and 10.3 mm for IMRT in LR, SI, and AP, respectively according to the new method including ERB random errors. Conclusion: The ERB random error contributes to the deformation of the prostate, which affects the original treatment planning. Thus, a new PTV margin method includes dose blurring effects of ERB. The correction of ERB systematic error is a prerequisite since the new method only accounts for ERB random error.

Evaluation of Manufactured Device for Radiation therapy in Head and Neck Cancer (두경부암 환자의 방사선 치료시 자체 제작한 고정용구 (Shoulder Retractor)에 대한 유용성 평가)

  • Kim, Tae Jun;Jin, Sun Sik;Kim, Dong Hyun;Kim, Dong Wook;Chung, Weon Kuu;Kim, Kyoung Tae
    • The Journal of Korean Society for Radiation Therapy
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    • v.26 no.1
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    • pp.99-105
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    • 2014
  • Purpose : We compared the set-up accuracy and right-left Shoulder position variation of the manufactured device and other commercial shoulder-retractors in the head and neck radiation treatment. Materials and Methods : Six patients consist of three groups which were used three different Shoulder retractors. We measured position corrections of left and right Shoulder and the couch after the image guidance by using on board imager (OBI) for six head and neck patients who has the extended target to the neck node lower region. Results : The position variation correction of left (right) Shoulder after image guidance were $1.07{\pm}3.99mm$ ($-4.35{\pm}2.09mm$), $-0.37{\pm}5.91mm$ ($1.26{\pm}5.28mm$), $-0.63{\pm}2.44mm$ ($0.25{\pm}1.61mm$) for group A, B and C. The vertical, lateral, longitudinal position and angular corrections of the couch after image guidance were $-2.06{\pm}2.68$, $-1.11{\pm}8.15$, $0.34{\pm}3.78mm$, and $0.51{\pm}0.77$ degree for group A, $-1.18{\pm}1.82$, $-0.94{\pm}2.13$, $-0.67{\pm}1.98mm$, and $0.91{\pm}1.04$ degree for group B and $0.12{\pm}2.18$, $-0.79{\pm}2.64$, $0.79{\pm}2.64$, and $0.00{\pm}0.49$ degree for group C. Conclusion : In this preliminary study, we found the positioning accuracy of the manufactured Shoulder retractor is comparable to other commercial Shoulder retractors. We expect that the reproducibility and accuracy of the patient set-up could be improved by using the home made Shoulder retractor in the head and neck radiation treatment.

A Study of brain Atlases in Hippocampus Volume Measurement Using IBASPM (IBASPM을 이용한 해마체적 측정에서 뇌 Atlases에 대한 고찰)

  • Kim, Ju-ho;Lee, Ju-won;Kim, Seong-hu
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2014.10a
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    • pp.981-984
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    • 2014
  • Volumetric measurement of hippocampus using IBASPM, the 20's normal adults 10 people's brain images were acquired in order to assess the changes according to the type of the Atlas. Images was obtained using MPRAGE of a 3-D gradient echo pulse sequence on Head matrix coil of 1.5T MRI system. The results of Paired t-test using obtained volume of hippocampus depending on the type of the Atlas, Atlas69-Altas84, Atlas69-Atlas116(p=0.729, 0.729) in the left hippocampus and Atlas69-Atlas84, Atlas69-Atlas116(p=0.219, 0.219) in right hippocampal formation were no significant differences but in the area except this, there was significant difference(p=0.000). The volume of the hippocampus using Atlas84 and Atlas116, represented the same value and there was no significant difference. In the image analysis using the overlay of atlas image and original image, Atlas71 could be found that the area of hippocampus did mismatch. In the case of atlas used in this study, because it has been developed by the westerners, there are differences between brain of asian. It would be needed to development of new Atlas for high accuracy measurement of the volume of hippocampus.

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Watermarking for Digital Hologram by a Deep Neural Network and its Training Considering the Hologram Data Characteristics (딥 뉴럴 네트워크에 의한 디지털 홀로그램의 워터마킹 및 홀로그램 데이터 특성을 고려한 학습)

  • Lee, Juwon;Lee, Jae-Eun;Seo, Young-Ho;Kim, Dong-Wook
    • Journal of Broadcast Engineering
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    • v.26 no.3
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    • pp.296-307
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    • 2021
  • A digital hologram (DH) is an ultra-high value-added video content that includes 3D information in 2D data. Therefore, its intellectual property rights must be protected for its distribution. For this, this paper proposes a watermarking method of DH using a deep neural network. This method is a watermark (WM) invisibility, attack robustness, and blind watermarking method that does not use host information in WM extraction. The proposed network consists of four sub-networks: pre-processing for each of the host and WM, WM embedding watermark, and WM extracting watermark. This network expand the WM data to the host instead of shrinking host data to WM and concatenate it to the host to insert the WM by considering the characteristics of a DH having a strong high frequency component. In addition, in the training of this network, the difference in performance according to the data distribution property of DH is identified, and a method of selecting a training data set with the best performance in all types of DH is presented. The proposed method is tested for various types and strengths of attacks to show its performance. It also shows that this method has high practicality as it operates independently of the resolution of the host DH and WM data.

A Study on a Quantified Structure Simulation Technique for Product Design Based on Augmented Reality (제품 디자인을 위한 증강현실 기반 정량구조 시뮬레이션 기법에 대한 연구)

  • Lee, Woo-Hun
    • Archives of design research
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    • v.18 no.3 s.61
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    • pp.85-94
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    • 2005
  • Most of product designers use 3D CAD system as a inevitable design tool nowadays and many new products are developed through a concurrent engineering process. However, it is very difficult for novice designers to get the sense of reality from modeling objects shown in the computer screens. Such a intangibility problem comes from the lack of haptic interactions and contextual information about the real space because designers tend to do 3D modeling works only in a virtual space of 3D CAD system. To address this problem, this research investigate the possibility of a interactive quantified structure simulation for product design using AR(augmented reality) which can register a 3D CAD modeling object on the real space. We built a quantified structure simulation system based on AR and conducted a series of experiments to measure how accurately human perceive and adjust the size of virtual objects under varied experimental conditions in the AR environment. The experiment participants adjusted a virtual cube to a reference real cube within 1.3% relative error(5.3% relative StDev). The results gave the strong evidence that the participants can perceive the size of a virtual object very accurately. Furthermore, we found that it is easier to perceive the size of a virtual object in the condition of presenting plenty of real reference objects than few reference objects, and using LCD panel than HMD. We tried to apply the simulation system to identify preference characteristics for the appearance design of a home-service robot as a case study which explores the potential application of the system. There were significant variances in participants' preferred characteristics about robot appearance and that was supposed to come from the lack of typicality of robot image. Then, several characteristic groups were segmented by duster analysis. On the other hand, it was interesting finding that participants have significantly different preference characteristics between robot with arm and armless robot and there was a very strong correlation between the height of robot and arm length as a human body.

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A Study on Matching Method of Hull Blocks Based on Point Clouds for Error Prediction (선박 블록 정합을 위한 포인트 클라우드 기반의 오차예측 방법에 대한 연구)

  • Li, Runqi;Lee, Kyung-Ho;Lee, Jung-Min;Nam, Byeong-Wook;Kim, Dae-Seok
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.29 no.2
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    • pp.123-130
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    • 2016
  • With the development of fast construction mode in shipbuilding market, the demand on accuracy management of hull is becoming higher and higher in shipbuilding industry. In order to enhance production efficiency and reduce manufacturing cycle time in shipbuilding industry, it is important for shipyards to have the accuracy of ship components evaluated efficiently during the whole manufacturing cycle time. In accurate shipbuilding process, block accuracy is the key part, which has significant meaning in shortening the period of shipbuilding process, decreasing cost and improving the quality of ship. The key of block accuracy control is to create a integrate block accuracy controlling system, which makes great sense in implementing comprehensive accuracy controlling, increasing block accuracy, standardization of proceeding of accuracy controlling, realizing "zero-defect transferring" and advancing non-allowance shipbuilding. Generally, managers of accuracy control measure the vital points at section surface of block by using the heavy total station, which is inconvenient and time-consuming for measurement of vital points. In this paper, a new measurement method based on point clouds technique has been proposed. This method is to measure the 3D coordinates values of vital points at section surface of block by using 3D scanner, and then compare the measured point with design point based on ICP algorithm which has an allowable error check process that makes sure that whether or not the error between design point and measured point is within the margin of error.

Growth and Structural Properties of Fe Thin Films Electrodeposited on n-Si(111) (n-Si(111) 기판 위에 전기증착에 의한 Fe 박막의 성장과 구조적 특성)

  • Kim Hyun-Deok;Park Kyeong-Won;Lee Jong-Duk
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.10 no.9
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    • pp.1663-1670
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    • 2006
  • Single crystal Fe thin films were grown directly onto n-Si(111) substrates by pulsed electrodeposition. Cyclic Voltammogram(CV) indicated that the $Fe^{2+}/n-Si(111)$ interface shows a good diode behavior by forming a Schottky barrier. From Mott-Schottky (MS) relation, it is found that the flat-band potential of n-Si(111) substrate and equilibrium redox potential of $Fet^{2+}$ ions are -0.526V and -0.316V, respectively. The nucleation and growth kinetics at the initial reaction stages of Fe/n-Si(111) substraste was studied by current transients. Current transients measurements have indicated that the deposition process starts via instantaneous nucleation and 3D diffusion limited growth. After the more deposition, the deposition flux of Fe ions was saturated with increase of deposition time. from the as-deposited sample obtained using the potential pulse of 1.4V and 300Hz, it is found that Fe nuclei grows to three dimensional(3D) islands with the average size of about 100nm in early deposition stages. As the deposition time increases, the sizes of Fe nuclei increases progressively and by a coalescence of the nuclei, a continuous Fe films grow on the Si surface. In this case, the Fe films show a highly oriented columnar structure and x-ray diffraction patterns reveal that the phase ${\alpha}-Fe$ grows on the n-Si(111) substrates.

Design of Microstrip Patch Antenna on UHF Band using Multiple Meander for Metal Attached (금속 부착용 멀티 미앤더형 UHF 대역 마이크로스트립 패치 안테나 설계)

  • Park, Chan-Hong;Choi, Yong-Seok;Koo, Dong-Jin;Jang, Sung-Won;Seong, Hyeon-Kyeong
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2012.10a
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    • pp.307-311
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    • 2012
  • In this paper, a novel particle swarm optimization method based on IE3D is used to design a mobile communication Microstrip Patch Antenna. The aim of the thesis is to Design and fabricate an inset fed rectangular Microstrip Antenna and study the effect of antenna dimensions Length (L), Width (W) and substrate parameters relative Dielectric constant (${\varepsilon}r$), substrate thickness on Radiation parameters of Band width. When the antenna was designed, a dual-band, dual-polarized antenna was used to secure the bandwidth and improve performance, and a coaxial probe feeding method so that the phased array of antenna is easy.

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