• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 춘계학술대회논문집
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• pp.579-584
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• 2008

A nano-imprinting stage has been widely used in various fields of nanotechnology. In this study, an analysis method of a nano-imprinting stage machine using FEM and flexible multi-body vibration has been presented. The simulation using CAE for the imprinting machine is to analyze vibration characteristics of 3-axis nano-imprinting stage and 4-axis nano-imprinting stage. Structural components such as the upper plate have been modeled with finite elements to analyze flexibility effects during the precision stage motion. In this paper flexible multi-body dynamic simulation is executed to support robust design of the precision stage mechanism.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.844-849
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• 2008

A nano-imprinting stage has been widely used in various fields of nano-technology. In this study, A 4-axis nano-imprinting stage is modeled with using the 3D-CAD Tool. Structural components such as an upper-plate, bearings and cross-roller-guides are modeled with finite elements to analyze flexibility effect during the precision stage motion. In addition, Dynamic analysis is executed to reproduce actual motion of 4-axis nano imprinting stage.

• 한국공작기계학회논문집
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• 제16권5호
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• pp.211-217
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• 2007

A nano-imprinting stage has been widely used in various fields of nanotechnology. In this study, an analysis method of a nano-imprinting stage machine using FEM and flexible multi-body kinematics and dynamics has been presented. We have developed a virtual imprinting machine to evaluate the prototype design in the early design stage. The simulation using CAE for the imprinting machine is not only to analyze static and dynamic characteristics of the machine but also to determine design parameters of the components for the imprinting machine, such as dimensions and specifications of actuators and sensors. Structural components as the upper plate, the rotator, the shaft and the translator have been modeled with finite elements to analyze flexibility effects during the precision stage motion. In this paper flexible multi-body dynamic simulation is executed to support robust design of the precision stage mechanism. In addition, we made the 4-axis stage model to compare the dynamic behavior with that of 3-axis stage model.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.948-954
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• 2008

In this study, vibrational characteristics of two nano-imprinting stages is analyzed and compared with respect to the methodology to support the upper-plate of the stage. The first type of the stage has three supporters at each corners of the stage and one thrust bearing at the center of the stage. The other type of the stage has four supporter in each corner of the stage without a thrust bearing. The FEM software with flexible modeling is used for the normal mode analysis. The result depicts the difference of vibrational characteristics caused by the difference of support methods. The design criteria for the precision nano-imprinting stage is also discussed.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2005년도 창립60주년 기념 추계 학술대회
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• pp.156.1-156.1
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• 2005

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 추계학술대회 논문집
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• pp.214-218
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• 2002

In recent years, precision positioning stage is demanded for some industrial fields such as semi-conductor lithography, ultra precision machining, and fabricating of nano structure. In this research, precision multi-axis positioning stage, which consists of pzt actuator, flexure, and capacitance gauge, is designed and developed. The performance of 3-axis positioning, characteristics of motion and resolution are verified.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.304-307
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 춘계학술대회논문집
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• pp.555-558
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• 2005

The precision positioning system requires robust design to obtain enough bandwidth. Therefore, The sub-resonance occurred by the disaccord of force center and mass center should be oppressed. And it is necessary to move the flexible mode to a higher frequency. In this paper, the 3-axis nano stage was proposed and dynamic characteristics was improved by design of experiments (DOE).

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1207-1210
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• 2003

This paper deals with experiments for dynamic characteristics and performance evaluation of the 3-axis fine positioning stage developed in [1]. The features of the developed fine positioning stage are the long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design. The dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the actuator and the stage design. Performance evaluation is also made for the PZT actuators as well as the stage positioning accuracy. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 추계학술대회 논문집
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• pp.213-218
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.