Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)
- 2004.10a
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- Pages.213-218
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- 2004
Development of Multi-Axis Ultra Precision Stage for Optical Alignment
광소자 정렬용 초정밀 다축 스테이지 개발
Abstract
As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.
Keywords