Post Annealing Effect on the Characteristics of Al2O3 Thin Films Deposited by Aerosol Deposition on 4H-SiC (4H-SiC기판 위에 Aerosol Deposition으로 증착된 Al2O3박막의 후열처리 효과)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.27 no.8
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- pp.486-490
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- 2014