Post Annealing Effect on the Characteristics of Al2O3 Thin Films Deposited by Aerosol Deposition on 4H-SiC
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Yu, Susanna
(Department of Electronic Materials Engineering, Kwangwoon University)
Kang, Min-Seok (Department of Electronic Materials Engineering, Kwangwoon University) Kim, Hong-Ki (Department of Electronic Materials Engineering, Kwangwoon University) Lee, Young-Hie (Department of Electronic Materials Engineering, Kwangwoon University) Koo, Sang-Mo (Department of Electronic Materials Engineering, Kwangwoon University) |
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