• Title/Summary/Keyword: 3중 접합

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n-type GaN 위에 형성된 Ti/Al/Mo/Au 및 Ti/Al/Ni/Au 오믹 접합의 isolation 누설전류 분석

  • Hwang, Dae;Ha, Min-U;No, Jeong-Hyeon;Choe, Hong-Gu;Song, Hong-Ju;Lee, Jun-Ho;Park, Jeong-Ho;Han, Cheol-Gu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.266-267
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    • 2011
  • 질화갈륨(GaN)은 높은 전자이동도 및 높은 항복전계를 가지며 낮은 온저항으로 인하여 에너지효율이 우수하기 때문에 고출력 전력소자 분야에서 많은 관심을 받고 있다. GaN을 이용한 고출력 전력소자의 경우 상용화 수준에 근접할 만한 기술적 진보가 있었으나, 페르미 레벨 고정(Fermi-level pinning) 현상, 소자의 누설전류 등 아직 해결되어야 할 문제를 갖고 있다. 본 연구에서는 실리콘 기판 위에 성장된 GaN 에피탁시를 활용한 고출력 전력소자의 누설전류를 억제시키기 위해 오믹 접합 중 Au의 상호확산을 억제하는 중간층 금속(Mo or Ni)을 변화시켰으며 오믹 열처리 온도에 따른 특성을 비교 연구하였다. $Cl_2$$BCl_3$를 이용하여 0.6 ${\mu}m$ 깊이의 메사 구조가 활성영역을 형성하였고, Si 도핑된 n-GaN 위에 Ti/Al/Mo/Au (20/100/25/200 nm) 와 Ti/Al/Ni/Au (20/100/25/200 nm) 오믹 접합을 각각 설계, 제작하였다. 오믹 열처리시의 GaN 표면오염을 방지하기 위해 $SiO_2$ 희생층을 증착하였다. 오믹 접합 형성을 위해 각 750$^{\circ}C$, 800$^{\circ}C$, 850$^{\circ}C$에서 30초간 열처리를 진행 하였으며, 이후 6 : 1 BOE 용액으로 $SiO_2$ 희생층을 제거하였다. 750, 800, 850$^{\circ}C$에서 Ti/Al/Mo/Au 구조의 오믹 접합 저항은 각 2.56, 2.34, 2.22 ${\Omega}$-mm 이었으며, Ti/Al/Ni/Au 구조의 오믹 접합 저항은 각 43.72, 2.64, 1.86 ${\Omega}$-mm이었다. Isolation 누설전류를 측정하기 위해서 두 개의 오믹 접합 사이에 메사 구조가 있는 테스트 구조를 제안하였다. Isolation 누설전류는 Ti/Al/Mo/Au 구조에서 두 오믹 접합 사이의 거리가 25 ${\mu}m$이고 100 V일 때 750, 800, 850 $^{\circ}C$의 열처리 온도에서 각 1.25 nA/${\mu}m$, 2.48 nA/${\mu}m$, 8.76 nA/${\mu}m$이었으며, Ti/Al/Ni/Au 구조에서는 각 1.58 nA/${\mu}m$, 2.13 nA/${\mu}m$, 96.36 nA/${\mu}m$이었다. 열처리 온도가 증가하며 오믹 접합 저항은 감소하였으나 isolation 누설전류는 증가하였다. 750$^{\circ}C$ 열처리에서 오믹 접합 저항은Ti/Al/Mo/Au 구조가 Ti/Al/Ni/Au 구조보다 약 17배 우수하였고, 850$^{\circ}C$ 고온의 열처리 경우 Ti/Al/Mo/Au 구조의 isolation 누설전류는 8.76 nA/${\mu}m$로 Ti/Al/Ni/Au의 누설전류 96.36 nA/${\mu}m$보다 약 11배 우수하였다. Ti/Al/Mo/Au가 Ti/Al/Ni/Au 보다 오믹 접합 저항과 isolation 누설전류 측면에서 전력용 GaN 소자에 적합함을 확인하였다.

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Element to Change the Bonding Structures of SnO2 Thin Films (SnO2 박막의 결정에 영향을 주는 요소)

  • Oh, Teresa
    • Industry Promotion Research
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    • v.3 no.1
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    • pp.1-5
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    • 2018
  • $SnO_2$ films were annealed in a vaccum atmosphere conditions to research the temperature dependency of current-voltage characteristics in according to the bonding structures. The $SnO_2$ film annealed in a vacuum became an amorphous structure but films annealed in an atmosphere condition had a crystal structure. The defects or depletion layer were formed by the electron-hole combination after annealing processes, and the electrical properties were changed depending on the crystal structure, binding energy and the variation of carriers. $SnO_2$ became more crystal-structural with increasing the annealing temperature, and the current increased at $SnO_2$ film annealed at $150^{\circ}C$ with Schottky current.

Effect of the Fatty Acid Synthase Gene for Beef Quantity Traits in Hanwoo Breeding Stock (한우 Fatty Acid Synthase (FASN) 유전자 반수체형의 후대검정우 육량 및 육질에 미치는 영향)

  • Kim, Sang-Wook;Lee, Jun-Heon;Kim, Jin-Ho;Won, You-Seog;Kim, Nae-Soo;Kim, Kwan-Suk
    • Journal of Animal Science and Technology
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    • v.52 no.1
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    • pp.9-16
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    • 2010
  • A previous study has shown that the g.17924G>A polymorphism of fatty acid synthase (FASN) is associated with unsaturated fatty acid composition in the Hanwoo beef, hence this study was conducted to evaluate the effect of single nucleotide polymorphisms (SNPs) within FASN gene on the selection phenotypes of Hanwoo breeding stock. A total of 925 progeny test steers were used to genotype g.11280G>A, g.13125T>C, and g.17924G>A polymorphisms and significant associations were found among g.11280G>A, g.17924G>A, and carcass traits, such as carcass weight, backfat thickness, and beef quantity index. No significant association was found between g.13125T>C and carcass traits. Although the degree of linkage disequilibrium (LD) was not strong among g.11280G>A, g.13125T>C, and g.17924G>A in the LD analysis, four major haplotype classes were formed with the genotypic information within the FASN gene; the frequencies of the halpotypeswere -GCG-[0.378], -ATG-[0.301], -GTA-[0.191], and -ACG-[0.063], respectively. Phenotypic association was performed among these haploptypes, and the haplotype 2 (-ATG-)was significantly associated with higher carcass weight when compared to the other haplotypes, i.e. haplotype 1 (-GCG-) and haplotype 3 (-GTA-). A copy number of the FASN haplotype 3 (-GTA-) had also a significant association with carcass weight of subjects. In conclusion, it was observed that two polymorphisms (g.11280G>A and g.17924G>A) and their haplotypes within the FASN gene are consistently associated with carcass traits. Therefore, it is desirable to use the FASN polymorphisms for pre-selection program as genetic marker with improved carcass yield and beef quality of the Hanwoo sire at the Hanwoo Improvement Center as well as for commercial Hanwoo producers, the FASN genotypic information can be used for a part of selecting Hanwoo dam for superior calf production.

Bond of Deformed Bars to Concrete : Effects of Confinement and Strength of Concrete (철근 콘크리트 보-기둥 접합부의 부착거동에 대한 콘크리트 강도 및 보강철근의 효과)

  • 최기봉
    • Magazine of the Korea Concrete Institute
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    • v.3 no.2
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    • pp.115-121
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    • 1991
  • Slippage of beam longitudinal reinforcement at beam-column connections is an important cause of damage to reinforced concrete frames under static and dynamic loads, This paper summarizes the results of an experimen¬tal study on the effects of confinements and compressive strength of concrete on the local bond stress-slip cha¬racteristics of deformed bars. I t is concluded from experimental results that, as far as the bond splittmg cracks are restrained by the vertical column reinforcement, confinement of concrete by transverse reinforcement has insignigicant direct effect on the local bond behavior. The ultimate bond strength, however, Increases pro¬portionally with the square root of concrete compressive strength. An empirical model was developed for local bond st ressslip relationslip of deformed bars in confined concrete of different compressive strengths.

Characteristics of a planar Bi-Sb multijunction thermal converter with Pt-heater (백금 히터가 내장된 평면형 Bi-Sb 다중접합 열전변환기의 특성)

  • Lee, H.C.;Kim, J.S.;Ham, S.H.;Lee, J.H.;Lee, J.H.;Park, S.I.;Kwon, S.W.
    • Journal of Sensor Science and Technology
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    • v.7 no.3
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    • pp.154-162
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    • 1998
  • A planar Bi-Sb multijunction thermal converter with high thermal sensitivity and small ac-dc transfer error has been fabricated by preparing the bifilar thin film Pt-heater and the hot junctions of thin film Bi-Sb thermopile on the $Si_{3}N_{4}/SiO_{2}/Si_{3}N_{4}$-diaphragm, which functions as a thermal isolation layer, and the cold junctions on the dielectric membrane supported with the Si-substrate, which acts as a heat sink, and its ac-dc transfer characteristics were investigated with the fast reversed dc method. The respective thermal sensitivities of the converter with single bifilar heater were about 10.1 mV/mW and 14.8 mV/mW in the air and vacuum, and those of the converter with dual bifilar heater were about 5.1 mV/mW and 7.6 mV/mW, and about 5.3 mV/mW and 7.8 mV/mW in the air and vacuum for the inputs of inside and outside heaters, indicating that the thermal sensitivities in the vacuum, where there is rarely thermal loss caused by gas, are higher than those in the air. The ac-dc voltage and current transfer difference ranges of the converter with single bifilar heater were about ${\pm}1.80\;ppm$ and ${\pm}0.58\;ppm$, and those of the converter with dual bifilar heater were about ${\pm}0.63\;ppm$ and ${\pm}0.25\;ppm$, and about ${\pm}0.53\;ppm$ and ${\pm}0.27\;ppm$, respectively, for the inputs of inside and outside heaters, in the frequency range below 10 kHz and in the air.

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A Die-matching Method for 3D Memory Yield Enhancement considering Additional Faults during Bonding (3차원 메모리의 수율 증진을 위해 접합 공정에서 발생하는 추가 고장을 고려한 다이 매칭 방법)

  • Lee, Joo-Hwan;Park, Ki-Hyun;Kang, Sung-Ho
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.48 no.7
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    • pp.30-36
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    • 2011
  • Three-dimensional (3D) memories using through-silicon vias (TSVs) as vertical bus across memory layers are implemented by many semiconductor companies. 3D memories are composed of known-good-dies (KGDs). If additional faults are arisen during bonding, they should be repaired. In order to enhance the yield of 3D memories with inter-die redundancies, a die-matching method is needed to effectively stack memory dies in a 3D memory. In this paper, a new die-matching method is proposed for 3D memory yield enhancement with inter-die redundancies considering additional faults arisen during bonding. Three boundary-limited conditions are used in the proposed die-matching method; they set bounds to the search spaces for selecting memory dies to manufacture a 3D memory. Simulation results show that the proposed die-matching method can greatly enhance the 3D memory yield.

Performance Evaluation of Steel Moment Frame and Connection including Inclined Column (경사기둥을 포함한 철골모멘트 골조 및 접합부의 성능평가)

  • Kim, Yong-Wan;Kim, Taejin;Kim, Jongho
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.26 no.3
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    • pp.173-182
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    • 2013
  • The building design projects which are being proceeded nowadays pursue a complex and various shape of structures, escaping from the traditional and regular shape of buildings. In this new trend of the architecture, there rises a demand of the research in the structural engineering for the effective realization of such complex-shaped buildings which disassembles the orthogonality of frames. As a distinguished characteristics of the buildings in a complex-shape, there frequently are inclined columns included in the structural frame. The inclined column causes extra axial force and bending moment at the beam-column connection so it is necessary to assess those effects on the structural behavior of the frame and the connection by experiment or analysis. However, with comparing to the studies on the normal beam-column connections, the inclined column connections have not been studied sufficiently. Therefore, this study evaluated the beam-column connections having an inclined column using nonlinear and finite element analysis method. In this paper, steel moment frames having inclined columns were analyzed by the nonlinear pushover analysis to check the global behavior and beam-column connection models were analyzed by the finite element analysis to check the buckling behavior and the fracture potentials.

Si 기판 저항률이 GaAs/Ge 이중접합 태양전지 효율에 미치는 영향

  • O, Se-Ung;Yang, Chang-Jae;Sin, Geon-Uk;Jeon, Dong-Hwan;Kim, Chang-Ju;Park, Won-Gyu;Go, Cheol-Gi;Yun, Ui-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.210-210
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    • 2012
  • Ge 기판을 이용한 GaInP/GaAs/Ge 삼중접합 태양전지는 43.5%의 높은 광전효율을 기록하고 있으며, 이를 지상용 태양광 발전시스템에 이용하려는 연구가 진행 중이다[1]. 그러나, 이러한 다중접합 태양전지는 셀 제작 비용에 있어 Ge기판의 가격이 차지하는 비중이 높고 대면적 기판을 이용하기 힘든 단점이 있다. 한편, 무게, 기계적 강도와 열전도도 측면에서 Si 기판은 Ge 기판에 비해 장점이 있다. 아울러, 상대적으로 낮은 가격의 대면적 기판을 사용할 수 있기 때문에 Si 기판으로 Ge 기판을 대체할 경우 다중접합 태양전지의 높은 제작 비용을 낮추는 효과도 기대할 수 있다. Si 기판의 장점을 취하며 고효율 태양전지를 제작하기 위해, 이번 실험에서 우리는 Ge 에피층이 성장된 Si 기판 위에 GaAs 태양전지를 제작하였다. GaAs, GaInP와 비슷한 격자상수를 갖고 있는 Ge과 달리, Si은 이들 물질(GaAs, GaInP)과 4%의 격자상수 차이를 갖고 있으며 이로 인해 성장과정에서 관통전위가 발생하게 된다. 이러한 관통전위는 소자의 개방전압을 감소시키는 원인으로 작용한다. 실제로 Si 기판 위에 제작된 GaAs/Ge 이중접합 태양전지에서 관통전위 밀도에 따른 개방전압 감소를 확인할 수 있었다. 관통전위로 인한 영향 이외에, Si 기판위에 제작된 태양전지에서는Ge 기판 위에 제작된 태양전지에 비하여 낮은 fill factor가 관찰되었다. 이것은 Si 기판 위에 제작된 GaAs/Ge 이중접합 태양전지가 높은 직렬저항을 가지고 있기 때문이다. 따라서 이번 실험에서는 Si 기판 위에 제작한 GeAs/Ge 이중접합 태양전지의 직렬저항의 원인을 전산모사와 실험을 통하여 규명하였다. TCAD (APSYS-2010)를 이용한 전산모사 결과, Si 기판의 낮은 불순물 농도 ($1{\times}10^{15}/cm^3$)에 따른 직렬저항의 원인으로 파악되었으며, 전류-전압 특성을 측정하여 실험적으로 이를 확인하였다. 이러한 직렬저항 성분을 줄이기 위하여 Si 기판의 p형 불순물 농도가 전류 전압 특성 곡선에 미치는 영향을 전산모사를 통하여 알아보았으며, Si 기판의 불순물 농도가 $1{\times}10^{17}/cm^3$ 이상으로 증가할 경우, 직렬저항 성분이 크게 감소 하는 것을 전산모사 결과로 예상할 수 있었다.

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Comparative Study of Interfacial Reaction and Drop Reliability of the Sn-3.0Ag-0.5Cu Solder Joints on Electroless Nickel Autocatalytic Gold (ENAG) (Electroless Nickel Autocatalytic Gold (ENAG) 표면처리와 Sn-Ag-Cu솔더 간 접합부의 계면반응 및 취성파괴 신뢰성 비교 연구)

  • Jun, So-Yeon;Kwon, Sang-Hyun;Lee, Tae-Young;Han, Deog-Gon;Kim, Min-Su;Bang, Jung-Hwan;Yoo, Sehoon
    • Journal of the Microelectronics and Packaging Society
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    • v.29 no.3
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    • pp.63-71
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    • 2022
  • In this study, the interfacial reaction and drop impact reliability of Sn-Ag-Cu (SAC) solder and electroless nickel autocatalytic gold (ENAG) were studied. In addition, the solder joint properties with the ENAG surface finish was compared with electroless nickel immersion gold (ENIG) and electroless nickel electroless palladium immersion gold (ENEPIG). The IMC thickness of SAC/ENAG and SAC/ENEPIG were 1.15 and 1.12 ㎛, respectively, which were similar each other. The IMC thickness of the SAC/ENIG was 2.99 ㎛, which was about two times higher than that of SAC/ENAG. Moreover, it was found that the IMC thickness of the solder joint was affected by the metal turnover (MTO) condition of the electroless Ni(P) plating solution, and it was found that the IMC thickness increased when the MTO increased from 0 to 3. The shear strength of SAC/ENEPIG was the highest, followed by SAC/ENAG and SAC/ENIG. It was found that when the MTO increased, the shear strength was lowered. In terms of brittle fracture, SAC/ENEPIG was the lowest among the three joints, followed by SAC/ENAG and SAC/ENIG. Likewise, it was found that as MTO increased, brittle fracture increased. In the drop impact test, it was confirmed that the 0 MTO condition had a higher average number of failures than the 3 MTO condition, and the average number of failures was also higher in the order of SAC/ENEIG, SAC/ENAG, and SAC/ENIG. As a result of observing the fracture surface after the drop impact, it was found that the fracture was between the IMC and the Ni(P) layer.

The Clinicopathological Characteristics of Adenocarcinoma of the Gastro-esophageal Junction (위식도접합부선암의 임상병리학적 특성)

  • Kim, Han-Su;Jeong, Oh;Park, Young-Kyu;Kim, Dong-Yi;Ryu, Seong-Yeop;Kim, Young-Jin
    • Journal of Gastric Cancer
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    • v.8 no.4
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    • pp.210-216
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    • 2008
  • Purpose: Siewert's classification of adenocarcinoma of the esophagogastric junction (AEG) has been widely adopted, but there is a wide discrepancy of the clinicopathological features of AEG of the Asian patients as compared to that of the Western patients. The aim of this study was to investigate the clinicopathological characteristics of AEG according to the Siewert classification. Materials and Methods: Among the patients who underwent surgery for gastric carcinoma in our institution between May 2004 and February 2008, the AEG patients were selected based on their operation records and the photographs according to Siewert's classification. Results: There were 70 AEG patients (3.9%) among the total of 1,778 patients. There were 3 patients (4.3%) with type I, 30 patients (42.8%) with type II and 37 patients (52.8%) with type III. Curative resection (R0) was achieved in 68 cases (97.1%). No significant differences in gender, stage, Barrett's esophagus and the proximal margin were found between the patients with type II and type III AEG. The patients with type III were younger than the patients with type II (59 vs 64 years, respectively, P=0.049). Well differentiated histology (P=0.045) and the intestinal type (P=0.055) were significantly more frequent in the patients with type II as compared with that in the patients with type III. Conclusion: There was a striking difference of the Asian patients from the Western patients for the incidence of AEG (and especially type I). Some of the differences between type II and type III patients were similar to those of the previous Western studies. A large study is needed to investigate whether these features are typical in the Korean population.

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