• 한국정밀공학회지
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• 제22권4호
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• pp.84-91
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• 2005

We measured the pitch of one-dimensional (ID) grating specimens using a metrological atomic force microscope (M-AFM). The ID grating specimens a.e often used as a magnification standard in nano-metrology, such as scanning probe microscopy (SPM) and scanning electron microscopy (SEM). Thus, we need to certify the pitch of grating specimens fur the meter-traceability in nano-metrology. To this end, an M-AFM was setup at KRISS. The M-AFM consists of a commercial AFM head module, a two-axis flexure hinge type nanoscanner with built-in capacitive sensors, and a two-axis heterodyne interferometer to establish the meter-traceability directly. Two kinds of ID grating specimens, each with the nominal pitch of 288 nm and 700 nm, were measured. The uncertainty in pitch measurement was evaluated according to Guide to the Expression of Uncertainty in Measurement. The pitch was calculated from 9 line scan profiles obtained at different positions with 100 ㎛ scan range. The expanded uncertainties (k = 2) in pitch measurement were 0.10 nm and 0.30 nm for the specimens with the nominal pitch of 288 nm and 700 nm. The measured pitch values were compared with those obtained using an optical diffractometer, and agreed within the range of the expanded uncertainty of pitch measurement. We also discussed the effect of averaging in the measurement of mean pitch using M-AFM and main components of uncertainty.

• Applied Microscopy
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• 제52권
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• pp.1.1-1.8
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• 2022

As semiconductor device architecture develops, from planar field-effect transistors (FET) to FinFET and gate-all-around (GAA), there is an increased need to measure 3D structure sidewalls precisely. Here, we present a 3-Dimensional Atomic Force Microscope (3D-AFM), a powerful 3D metrology tool to measure the sidewall roughness (SWR) of vertical and undercut structures. First, we measured three different dies repeatedly to calculate reproducibility in die level. Reproducible results were derived with a relative standard deviation under 2%. Second, we measured 13 different dies, including the center and edge of the wafer, to analyze SWR distribution in wafer level and reliable results were measured. All analysis was performed using a novel algorithm, including auto fattening, sidewall detection, and SWR calculation. In addition, SWR automatic analysis software was implemented to reduce analysis time and to provide standard analysis. The results suggest that our 3D-AFM, based on the tilted Z scanner, will enable an advanced methodology for automated 3D measurement and analysis.

• International Journal of Naval Architecture and Ocean Engineering
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• 제3권2호
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• pp.126-135
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• 2011

In this study, numerical analysis was carried out by using the finite element method to construct the first mode shape of damaged stiffened plates, and the damage locations were detected with two-dimensional discrete wavelet analysis. In the experimental analysis, four different damaged stiffened structures were observed. Firstly, each damaged structure was hit with a shaker, and then accelerometers were used to measure the vibration responses. Secondly, the first mode shape of each structure was obtained by using the wavelet packet, and the location of cracks were also determined by two-dimensional discrete wavelet analysis. The results of the numerical analysis and experimental investigation reveal that the proposed method is applicable to detect single crack or multi-cracks of a stiffened structure. The experimental results also show that fewer measurement points are required with the proposed technique in comparison to those presented in previous studies.

• 한국광학회지
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• 제17권4호
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• pp.329-334
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• 2006

마이크로미터 이하 물체의 2차원 및 영상과 3차원 영상을 동시에 측정하기 위하여 off-axis 투과형 디지털 홀로그래피 현미경을 구성하였다. 그리고 3차원 영상을 얻기 위하여 Mask-Cut 위상 펼침 알고리즘을 사용하였다. 측정 결과 2차원 상에는 0.8 $\mu$m 이하의 문양도 측정할 수 있음을 확인하였다. 그리고 마이크로미터 이하 물체의 2차원 영상과 3차원 영상을 동시에 측정 할 수 있음을 확인하였다.

• 대한기계학회논문집A
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• 제29권11호
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• pp.1439-1444
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• 2005

A two-dimensional boundary element method was used for the scattering analysis of side-drilled hole(SDH). The far-field scattering amplitude was calculated for shear vertical(SV) wave, and their frequency and time-domain results were presented. The time-domain scattering amplitude showed the directly reflected wave from the SDH leading edge as well as the creeping wave. In an immersion, pulse-echo testing, two measurement models were introduced to predict the response from SDHs. The 2-D boundary element scattering amplitude was converted to the 3-D amplitude to be used in the measurement model. The receiver voltage was calculated fer SV wave incidence at 45$^{\circ}C$ on the 1 m diameter SDH, and the result was compared with experiment.

• 대한방사선기술학회지:방사선기술과학
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• 제35권2호
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• pp.133-139
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• 2012

핵의학 검사에 있어서 심근 관류스캔은 관상동맥질환의 혈역학적 중요성을 평가하는 좋은 방법이다. 그러나 판독효율을 높이기 위해서 자동화된 정량적 계측 방법이 추가적으로 제시되어야한다. 본 연구에서는 판독에 필요한 심근의 3차원 기능모델과 심근 두께 계산 모델을 제시한다. 개발을 위해서 SPECT로 부터 심장의 단축단면상을 얻었고 전처리를 방정식을 적용하여 좌심근 두께의 모델링을 구현하였다. 실험결과 슬라이스 단축방향 영상으로부터 내벽과 외벽을 계측하는데 성공하였고, 계산된 좌표를 이용해서 3차원 모델링을 구현하였다. 다음 라플라스 식을 사용하여 심벽 두께의 3차원 모델을 완성하였다. 3차원 모델을 통해서 결절 부위가 쉽게 관찰할 수 있고, 3차원 모델의 회전을 통해서 병변의 위치를 빨리 파악할 수 있는 특징을 가진다. 판독 보조지표로서의 개발된 제안된 모델은 보조적 판독정보를 제공하고 오진의 확률을 낮추는데 기여할 것으로 예상한다. 허혈성 심장질환 환자의 조기 진단에도 큰 역할을 할 것이다.

• Imaging Science in Dentistry
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• 제48권2호
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• pp.111-119
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• 2018

Purpose: This study was conducted to evaluate the accuracy of linear measurements of 3-dimensional (3D) images generated by cone-beam computed tomography (CBCT) and facial scanning systems, and to assess the effect of scanning parameters, such as CBCT exposure settings, on image quality. Materials and Methods: CBCT and facial scanning images of an anthropomorphic phantom showing 13 soft-tissue anatomical landmarks were used in the study. The distances between the anatomical landmarks on the phantom were measured to obtain a reference for evaluating the accuracy of the 3D facial soft-tissue images. The distances between the 3D image landmarks were measured using a 3D distance measurement tool. The effect of scanning parameters on CBCT image quality was evaluated by visually comparing images acquired under different exposure conditions, but at a constant threshold. Results: Comparison of the repeated direct phantom and image-based measurements revealed good reproducibility. There were no significant differences between the direct phantom and image-based measurements of the CBCT surface volume-rendered images. Five of the 15 measurements of the 3D facial scans were found to be significantly different from their corresponding direct phantom measurements(P<.05). The quality of the CBCT surface volume-rendered images acquired at a constant threshold varied across different exposure conditions. Conclusion: These results proved that existing 3D imaging techniques were satisfactorily accurate for clinical applications, and that optimizing the variables that affected image quality, such as the exposure parameters, was critical for image acquisition.

• Korean Journal of Radiology
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• 제22권2호
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• pp.168-178
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• 2021

Objective: To provide an automatic method for segmentation and diameter measurement of type B aortic dissection (TBAD). Materials and Methods: Aortic computed tomography angiographic images from 139 patients with TBAD were consecutively collected. We implemented a deep learning method based on a three-dimensional (3D) deep convolutional neural (CNN) network, which realizes automatic segmentation and measurement of the entire aorta (EA), true lumen (TL), and false lumen (FL). The accuracy, stability, and measurement time were compared between deep learning and manual methods. The intra- and inter-observer reproducibility of the manual method was also evaluated. Results: The mean dice coefficient scores were 0.958, 0.961, and 0.932 for EA, TL, and FL, respectively. There was a linear relationship between the reference standard and measurement by the manual and deep learning method (r = 0.964 and 0.991, respectively). The average measurement error of the deep learning method was less than that of the manual method (EA, 1.64% vs. 4.13%; TL, 2.46% vs. 11.67%; FL, 2.50% vs. 8.02%). Bland-Altman plots revealed that the deviations of the diameters between the deep learning method and the reference standard were -0.042 mm (-3.412 to 3.330 mm), -0.376 mm (-3.328 to 2.577 mm), and 0.026 mm (-3.040 to 3.092 mm) for EA, TL, and FL, respectively. For the manual method, the corresponding deviations were -0.166 mm (-1.419 to 1.086 mm), -0.050 mm (-0.970 to 1.070 mm), and -0.085 mm (-1.010 to 0.084 mm). Intra- and inter-observer differences were found in measurements with the manual method, but not with the deep learning method. The measurement time with the deep learning method was markedly shorter than with the manual method (21.7 ± 1.1 vs. 82.5 ± 16.1 minutes, p < 0.001). Conclusion: The performance of efficient segmentation and diameter measurement of TBADs based on the 3D deep CNN was both accurate and stable. This method is promising for evaluating aortic morphology automatically and alleviating the workload of radiologists in the near future.

• 한국정밀공학회지
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• 제32권6호
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• pp.543-551
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• 2015

In this study, a novel method for dimension measurement of large-scale moving objects using stereo camera with 2-degree of freedom (2-DOF) mechanism is presented. The proposed method utilizes both the advantages of stereo vision technique and the enlarged visibility range of camera due to 2-DOF rotary mechanism in measuring large-scale moving objects. The measurement system employs a stereo camera combined with a 2-DOF rotary mechanism that allows capturing separate corners of the measured object. The measuring algorithm consists of two main stages. First, three-dimensional (3-D) positions of the corners of the measured object are determined based on stereo vision algorithms. Then, using the rotary angles of the 2-DOF mechanism the dimensions of the measured object are calculated via coordinate transformation. The proposed system can measure the dimensions of moving objects with relatively slow and steady speed. We showed that the proposed system guarantees high measuring accuracy with some experiments.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.264-267
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• 2003

Pitch measurements of 150 nm pitch one-dimensional grating standards were carried out using an contact mode atomic force microscopy(C-AFM) with a high resolution three-axis laser interferometer. It was called as 'Nano-metrological AFM' In Nano-metrological AFM, Three laser interferometers were aligned well to the end of AFM tip. Laser sources of the three-axis laser interferometer in the nano-metrological AFM were calibrated with an I$_2$-stablilzed He-Ne laser at a wavelength of 633 nm. So, the Abbe error was minimized and the result of the pitch measurement using the nano-metrological AFM has a traceability to the length standard directly. The uncertainty in the pitch measurement was estimated in accordance with the Guide to the Expression of Uncertainty in Measurement(GUM). The Primary source of uncertainty in the pitch-measurements was derived from repeatability of pitch-measurement, and its value was approx 0.186 nm. Expanded uncertainty(k=2) of less than 5.23 nm was obtained. It is suggested that the metrological AFM is a useful tool for the nano-metrological standard calibration.