Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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3-Dimensional Measurement using Digital Holographic Microscope and Phase Unwrapping

디지털 홀로그래피 현미경과 위상 펼침을 이용한 3차원 측정

  • Published : 2006.04.01
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Abstract

We have reconstructed 3-dimensional images by using the digital holographic microscope and the Mask-cut phase unwrapping algorithm. Off-axis holograms recorded with a magnified image of the microscopic object lens and reference beam are numerically reconstructed in amplitude and phase image by the Fresnel diffraction approximation. We have simultaneously reconstructed 2-dimensional and 3-dimensional images of the sub-micrometer objects.

마이크로미터 이하 물체의 2차원 및 영상과 3차원 영상을 동시에 측정하기 위하여 off-axis 투과형 디지털 홀로그래피 현미경을 구성하였다. 그리고 3차원 영상을 얻기 위하여 Mask-Cut 위상 펼침 알고리즘을 사용하였다. 측정 결과 2차원 상에는 0.8 $\mu$m 이하의 문양도 측정할 수 있음을 확인하였다. 그리고 마이크로미터 이하 물체의 2차원 영상과 3차원 영상을 동시에 측정 할 수 있음을 확인하였다.

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