• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.476-476
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• 2014

서론: 저 전력 소모를 필요로 하는 무선 센서 네트워크 관련 기술의 급격한 발달과 함께 자체 전력 수급을 위한 진동 에너지 수확 기술에 대한 연구가 활발히 이루어지고 있다. 다양한 구조와 소재를 압전 외팔보에 적용하여 제안하고 있다. 그 중에서도 진동 기반의 에너지 수확 소자는 주변 환경에서 쉽게 진동을 얻을 수 있고, 높은 에너지 밀도와 제작 방법이 간단하다는 장점을 가지고 있어 많은 분야에 응용 및 적용 가능하다. 기존 연구에서는 2차원적으로 진동 에너지 수확을 위한 휜 구조의 압전 외팔보를 제안 하였다. 휜 구조를 갖는 압전 외팔보는 각각의 짧은 두 개의 평평한 외팔보가 일렬로 연결된 것으로 볼 수 있다. 하나의 짧고 평평한 외팔보는 진동이 가해지면 접선 방향으로 응력이 생겨 최대 휨 모멘텀을 갖게 된다. 그러므로 휜 구조를 갖는 외팔보는 진동이 인가됨에 따라 길이 방향과 수직 방향으로 진동한다. 하지만, 이 구조는 수평 방향으로 가해지는 진동에 대한 에너지를 수확하기에는 한계점을 가진다. 즉, 3축 방향에서 임의의 방향에서 진동 에너지를 수확하기는 어렵다. 본 연구에서는 3축 방향에서 에너지를 효율적으로 수확할 수 있도록 헤어-셀 구조의 압전 외팔보 에너지 수확소자를 제안한다. 제안된 소자는 길이 방향과 수직 방향뿐만 아니라 수평 방향으로도 진동하여 임의의 방향에서 진동 에너지를 수확할 수 있다. 구성 및 공정: 제안하는 소자는 3축 방향에서 임의의 진동을 수확하기 위해서 길이를 길게 늘이고 길이 방향을 따라 휘어지는 구조의 헤어-셀 구조로 제작하였다. 외팔보의 구조는 외팔보의 폭 대비 길이의 비가 충분히 클 때, 추가적인 자유도를 얻을 수 있다. 그러므로 헤어-셀 구조의 에너지 수확 소자는 기본적인 길이 방향, 수직방향 그리고 수평방향에 더불어 추가적으로 뒤틀리는 방향을 통해서 3차원적으로 임의의 주변 진동 에너지를 수확하여 전기적인 에너지로 생성시킬 수 있다. 제작된 소자는 높은 종횡비를 갖는 무게 추($500{\times}15{\times}22{\mu}m3$)와 길이 방향으로 길게 휜 압전 외팔보($1000{\times}15{\times}1.7{\mu}m3$)로 구성되어있다. 공정 과정은 다음과 같다. 먼저, 실리콘 웨이퍼 위에 탄성층을 형성하기 위해 LPCVD SiNx를 $0.8{\mu}m$와 LTO $0.2{\mu}m$를 증착 후, 각각 $0.03{\mu}m$과 $0.12{\mu}m$의 두께를 갖는 Ti와 Pt을 하부 전극으로 스퍼터링한다. 그리고 Pb(Zr0.52Ti0.48)O3 박막을 $0.35{\mu}m$ 두께로 졸겔법을 이용하여 증착하고 상부 Pt층을 두께 $0.1{\mu}m$로 순차적으로 스퍼터링하여 형성한다. 상/하부 전극은 ICP(Inductively Coupled Plasma)를 이용해 건식 식각으로 패턴을 형성한다. PZT 층과 무게 추 사이의 보호막을 씌우기 위해 $0.2{\mu}m$의 Si3N4 박막이 PECVD 공정법으로 증착되고, RIE로 패턴을 형성된다. Ti/Au ($0.03/0.35{\mu}m$)이 E-beam으로 증착되고 lift-off를 통해서 패턴을 형성함으로써 전극 본딩을 위한 패드를 만든다. 초반에 형성한 실리콘 웨이퍼 위의 SiNx/LTO 층은 RIE로 외팔보 구조를 형성한다. 이후에 진행될 도금 공정을 위해서 희생층으로는 감광액이 사용되고, 씨드층으로는 Ti/Cu ($0.03/0.15{\mu}m$) 박막이 스퍼터링 된다. 도금 형성층을 위해 감광액을 패턴화하고, Ni0.8Fe0.2 ($22{\mu}m$)층으로 도금함으로써 외팔보 끝에 무게 추를 만든다. 마지막으로, 압전 외팔보 소자는 XeF2 식각법을 통해 제작된다. 제작된 소자는 소자의 여러 층 사이의 고유한 응력 차에 의해 휨 변형이 생긴다. 실험 방법 및 측정 결과: 제작된 소자의 성능을 확인하기 위하여 일정한 가속도 50 m/s2로 3축 방향에 따라 입력 주파수를 변화시키면서 출력 전압을 측정하였다. 먼저, 소자의 기본적인 공진 주파수를 얻기 위하여 수직 방향으로 진동을 인가하여 주파수를 변화시켰다. 그 때에 공진 주파수는 116 Hz를 가지며, 최대 출력 전압은 15 mV로 측정되었다. 3축 방향에서 진동 에너지 수확이 가능하다는 것을 확인하기 위하여 제작된 소자를 길이 방향과 수평 방향으로 가진기에 장착한 후, 기본 공진 주파수에서의 출력 전압을 측정하였다. 진동이 길이방향으로 가해졌을 때에는 33 mV, 수평방향으로 진동이 인가되는 경우에는 10 mV의 최대 출력 전압을 갖는다. 제안하는 소자가 수 mV의 적은 전압은 출력해내더라도 소자는 진동이 인가되는 각도에 영향 받지 않고, 3축 방향에서 진동 에너지를 수확하여 전기에너지로 얻을 수 있다. 결론: 제안된 소자는 3축 방향에서 진동 에너지를 수확할 수 있는 에너지 수확 소자를 제안하였다. 외팔보의 구조를 헤어-셀 구조로 길고 휘어지게 제작함으로써 기본적인 길이 방향, 수직방향 그리고 수평방향에 더불어 추가적으로 뒤틀리는 방향에서 출력 전압을 얻을 수 있다. 미소 전력원으로 실용적인 사용을 위해서 무게추가 더 무거워지고, PZT 박막이 더 두꺼워진다면 소자의 성능이 향상되어 높은 출력 전압을 얻을 수 있을 것이라 기대한다.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.28 no.5
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• pp.467-475
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• 2015

In this paper, the behaviour of a cantilevered beam was predicted to examine the difference between linear and non-linear static, dynamic analysis for a structure by using CR nonlinear formulation. Then, external transverse static and dynamic loads were applied at the free tip of the beam. Classical theories were used for the present linear analysis and co-rotational dynamic FEM program was used for the present nonlinear analysis. In the static analysis, effects of the load for the beam deflection were observed in both linear and nonlinear analysis. Then, normalized displacement at the tip of the beam was predicted for different frequency ratio and a significant difference was obtained in the vicinity of the resonant frequency. In addition, effects of frequency and time for the beam deflection were investigated to find the frequency delay.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.1
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• pp.11-20
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• 1993

Sensitivity information is required in the optimal design process. In structural optimization, sensitivity calculation is a bottleneck due to its complexities and expensiveness. Various schemes have been proposed for the calculation. Analytic and finite difference methods are the most popular at the present time. However, they have advantages and disadvantages in different ways. Semi-anayltic method has been suggested to overcome the difficulties. In spite of the excellency, the semi-analytic method has been found to possess numerical error quite much with respect to shape variables. In this research, the error from each method is evaluated and compared using a shape variable. A two-dimensional beam is selected for an example since it has mathematical solution. An efficient method is suggested for the structural optimization which utilizes finite element method.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.37 no.7
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• pp.833-839
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• 2013

In this study, an experiment was performed to monitor the two-dimensional shape of a cantilever composite structure using fiber Bragg grating (FBG) sensors. To monitor the shape of a composite structure, a deflection equation developed by NASA was applied and a composite beam attached to three FBG sensors was used. In the experiment, the shape of the composite beam was successfully estimated and an error was evaluated by comparing a real deflection. The error increased with real deflection; therefore, it was compensated by using the linear relationship between the error and the real deflection. After compensating the error, the measured deflection shows good agreement with the real deflection. Finally, the experiment shows that the FBG sensor and the deflection equation are suitable for monitoring the deflection curve of the beam structure with compensation of the error.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.20 no.6
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• pp.719-730
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• 2007

This study presents a thin-walled space frame element based on the classical Timoshenko beam theory. The element is derived according to the assumed strain field in order to resolve the shear-locking phenomenon. The shape function is developed in accordance with the strain field which is assumed to be constant at a 2-noded straight frame element. In this study, the geometrically nonlinear analysis applies the Corotational procedure in order to evaluate unbalanced loads. The bowing effect is also considered faithfully. Two numerical examples are given; monosymmetric curved and nonsymmetric straight cantilever. When these example structures behave lateral-torsional bucking, the critical loads are obtained by this study and ABAQUS shell elements. Also, the post-buckling behavior is examined. The results give good agreement between this study and ABAQUS shell.

• The Journal of the Acoustical Society of Korea
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• v.37 no.2
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• pp.99-109
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• 2018

The precision of the vibration-sensors, contact or non-contact types, is usually satisfactory for the practical measurement applications, but a sensor is confined to the measurement of a point or a direction. Although the precision and frequency span of the low-cost camera are inferior to these sensors, it has the merits in the cost and in the capability of simultaneous measurement of a large vibrating area. Furthermore, a camera can measure multi-degrees-of-freedom of a vibrating object simultaneously. In this study, the calibration method and the dynamic characteristics of the low-cost machine vision camera as a sensor are studied with a demonstrating example of the two-dimensional vibration of a cantilever beam. The planar image of the camera shot reveals two rectilinear and one rotational motion. The rectilinear vibration motion of a single point is first measured using a camera and the camera is experimentally calibrated by calculating error referencing the LDV (Laser Doppler Vibrometer) measurement. Then, by measuring the motion of multiple points at once, the rotational vibration motion and the whole vibration motion of the cantilever beam are measured. The whole vibration motion of the cantilever beam is analyzed both in time and frequency domain.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.5
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• pp.1208-1217
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• 1993

The simple and effective optical technique synthesizing holographic interferometry and speckle photography is presented. The optical system used in this experiment is based on image holography. A cantilever beam located on the precision translator is used to evaluate this measurement system. Experimental results agree well with the actual displacements within the error of 2.8%. As an its application, three dimensional contact deformation in the ball indentation is measured by using this optical system and compared with the numerical analysis by finite element method.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.41 no.1
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• pp.31-40
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• 2017

Absolute nodal coordinate formulation was developed in the mid-1990s, and is used in the flexible dynamic analysis. In the process of deriving the equation of motion, if the order of polynomial referring to the displacement field increases, then the degrees of freedom increase, as well as the analysis time increases. Therefore, in this study, the primary objective was to reduce the analysis time by transforming the dimensional equation of motion to a non-dimensional equation of motion. After the shape function was rearranged to be non-dimensional and the nodal coordinate was rearranged to be in length dimension, the non-dimensional mass matrix, stiffness matrix, and conservative force was derived from the non-dimensional variables. The verification and efficiency of this non-dimensional equation of motion was performed using two examples; cantilever beam which has the exact solution about static deflection and flexible pendulum.

• Transactions of the Korean Society of Mechanical Engineers
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• v.11 no.6
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• pp.923-934
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• 1987

A flexible one-link robotic manipulator is modelled as a rotating cantilever beam with a hub and tip mass. An active control law is developed with consideration of the distributed flexibility of the arm. Equation of motion is derived by Hamilton's principle and, for modal control, represented as state variable form using Galerkin's mode summation method. Feedback coefficients are chosen to minimize the linear quadratic performance index(PI). To reconstruct the complete state vector from the measurements, an observer is proposed. In order to suppress vibration of the manipulator arm to desirable extent and to obtain accuracy of the positioning, weighting factor of input in PI is adjusted. Spillover effect due to the controller which controls several important modes is examined. Experiment is also performed to validate the theoretical analysis.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.12
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• pp.1805-1810
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• 2010

We present a simple, cost-effective, and fast fabrication process for three-dimensional (3D) microstructures; this process is based on multi-step electrochemical etching of metal foils which facilitates the mass production of 3D microstructures. Compared to electroplating, this process maintains uniform and well-controlled material properties of the microstructure. In the experimental study, we perform single-step electrochemical etching of aluminum foils for the fabrication of 2D cantilever arrays. In the single-step etching, the depth etch rate and bias etch rate are measured as $1.50{\pm}0.10 {\mu}m/min$ and $0.77{\pm}0.03 {\mu}m/min$, respectively. Using the results of single-step etching, we perform two-step electrochemical etching for 3D microstructures with probe tips on cantilevers. The errors in height and lateral fabrication in the case of the fabricated structures are $15.5{\pm}5.8% $ and $3.3{\pm}0.9%$, respectively; the surface roughness is $37.4{\pm}9.6nm$.