Electrical Characterization of PZT and Electrodes after Dry Etching in Inductively Coupled plasma (유도결합 플라즈마를 이용한 PZT/전극의 식각 후 전기적 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2001.07a
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- pp.275-278
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- 2001