• Title/Summary/Keyword: 후방 산란 전자상

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Surface Structure Analysis of Solids by Impact Collision Ion Scattering Spectroscopy(2): Atomic Structure of Semiconductor Surface (직충돌 이온산란 분광법(ICISS)에 의한 고체 표면구조의 해석(2): 반도체 재료의 표면구조 해석)

  • Hwang, Yeon
    • Korean Journal of Crystallography
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    • v.19 no.1
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    • pp.7-13
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    • 2008
  • 고체 표면의 구조해석 방법에는 LEED(저에너지 전자선 회절법)나 RHEED(반사 고에너지 전자선 회절법) 등과 같이 표면의 2차원적 회절상을 해석하는 방법이 있고(역격자 공간의 해석), 또는 ISS(이온산란 분광법), RBS(러더포드 후방산란법) 등과 같이 표면 원자의 실공간에 대한 정보를 직접 얻는 방법이 있다. 실제로는 두 가지 종류의 분석법을 상호 보완적으로 조합하여 효율적인 구조해석을 수행한다. 본고에서는 직충돌 이온산란 분광법(ICISS: Impact Collision Ion Scattering Spectroscopy)에 대한 원리, 장치, 측정방법 등을 소개한 전고에 이어서 이를 이용한 반도체 표면구조 해석에 관하여 기술하고자 한다. 표면의 원자구조를 알아내기 위해서는 산란된 입자의 강도를 입사각도와 출사각도에 대하여 조사하여야 하는데, 이온이 원자와 충돌하여 산란될 때 원자의 후방으로 형성되는 shadow cone에 의하여 생성되는 집속 효과(focusing effect) 및 가리움 효과(blocking effect) 중에서 ICISS는 집속 효과만을 고려하여 해석하면 실공간에서의 원자구조를 해석할 수 있다. 본 고에서는 ICISS를 이용하여 금속 또는 절연체 물질이 반도체 표면 위에서 흡착 또는 성장될 때 초기의 계면 구조 해석, 금속/반도체 계면에서 시간에 따른 동적변화 해석, III-V족 반도체의 표면구조 해석, 반도체 기판 위에서 박막 성장 과정 해석 등에 관한 연구 사례를 소개하고자 한다.

Fabrication of Backscatter Electron Cones for Radiation Therapy (산란전자선을 이용한 강내측방조사기구의 제작과 특성)

  • Chu, Sung-Sil;Suh, Chang-Ok;Kim, Gwi-Eon
    • Radiation Oncology Journal
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    • v.19 no.1
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    • pp.74-80
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    • 2001
  • Purpose : Irradiation cones by using backscatter electrons are made for the treatment of superficial small lesions of skin, oral cavity, and rectum where a significant dose gradient and maximum surface dose is desired. Methods and Materials : Backscatter electrons are produced from the primary electron beams from the linear accelerators. The design consists of a cylindrical cone that has a thick circular plate of high atomic number medium (Pb or Cu) attached to the distal end, and the plate can be adjusted the reflected angle. Primary electrons strike the metal plate perpendicularly and produce backscatter electrons that reflect through the lateral hole for treatment. Using film and a parallel plate ion chamber, backscatter electron dose characteristics are measured. Results : The depth dose characteristic of the backscatter electron is very similar to that of the hard x-ray beam that is commonly used for the intracavitary and superficial lesions. The basckscatter electron energy is nearly constant and effectively about 1.5 MeV from the clinical megavoltage beams. The backscatter electron dose rate of $35\~85\;cGy/min$ could be achieved from modern accelerators without any modification. and the depth in water of $50\%$ depth dose from backscatter electron located at 6mm for $45^{\circ}$ angled lead scatter. The beam flatness is dependent on the slit size and the depth of treatment, but is satisfactory to treat small lesions. Conclusions : The measured data for backscatter electron energy, depth dose flatness dose rate and absolute dose indicates that the backscatter electrons are suitable for clinical use.

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Steel Plate Thickness Gauge by means of Gamma-Ray Backscattering (감마선 빽스켓터링을 이용한 철판 두께 측정에 관하여)

  • 김덕진;김동훈
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.3 no.1
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    • pp.18-23
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    • 1966
  • An experimental study of a steel plate thickness gauge by means of the measurements of backscatered gamma-rays has been carried out. The difference between this and other methods is that this method does not include any shilding matterials in the detecting probe, because the primary radiations and the backscattered radiations are detected simultaneously by an NaI (TI) scintillating crystal, and the activity of the Co-60 source used is low enough. In this thickness gauge, the thickness of the steel plates can be read directly on the counting ratemeter scale. The optimum conditions in the source-to-detector distance, window width of the analyzer, energy and strength of the gamma-ray source were found experimentally. The results have shown that the accuracy of the gauge was about $\pm$3% in the range of 3 to 8mm thickness. This gauge can be used to detect the pits or corrosions on the inner walls of the steel pipes.

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Microstructure analyses of aluminum nitride (AlN) using transmission electron microscopy (TEM) and electron back-scattered diffraction (EBSD) (투과전자현미경과 전자후방산란회절을 이용한 AlN의 미세구조 분석)

  • Joo, Young Jun;Park, Cheong Ho;Jeong, Joo Jin;Kang, Seung Min;Ryu, Gil Yeol;Kang, Sung;Kim, Cheol Jin
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.25 no.4
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    • pp.127-134
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    • 2015
  • Aluminum nitride (AlN) single crystals have attracted much attention for a next-generation semiconductor application because of wide bandgap (6.2 eV), high thermal conductivity ($285W/m{\cdot}K$), high electrical resistivity (${\geq}10^{14}{\Omega}{\cdot}cm$), and high mechanical strength. The bulk AlN single crystals or thin film templates have been mainly grown by PVT (sublimation) method, flux method, solution growth method, and hydride vapor phase epitaxy (HVPE) method. Since AlN suffers difficulty in commercialization due to the defects that occur during single crystal growth, crystalline quality improvement via defects analyses is necessary. Etch pit density (EPD) analysis showed that the growth misorientations and the defects in the AlN surface exist. Transmission electron microscopy (TEM) and electron back-scattered diffraction (EBSD) analyses were employed to investigate the overall crystalline quality and various kinds of defects. TEM studies show that the morphology of the AlN is clearly influenced by stacking fault, dislocation, second phase, etc. In addition EBSD analysis also showed that the zinc blende polymorph of AlN exists as a growth defects resulting in dislocation initiator.

Intergrowth and Interlayering of Muscovite, Chlorite, and Biotite in a Garnet Zone Metamorphic Rock of the Ogcheon Belt, South Korea (옥천대의 석류석데 변성암에서 산출되는 백운모, 녹니석 및 흑운모의 Intergrowth와 Interlayering)

  • Yeong Boo Lee;Jung Hoo Lee;Chang Whan Oh
    • Journal of the Mineralogical Society of Korea
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    • v.15 no.2
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    • pp.122-131
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    • 2002
  • Muscovite, chlorite and biotite in metapelites of the Ogcheon Hetamorphic Belt are studied using electron probe microanalysis (EPMA), backscattered electron images (BEI) of scanning electron microscopy (SEM) and lattice fringe images of transmission electron microscopy (TEM). These minerals are observed to be intergrown under a polarized light microscope and are apparently interlayered below EPMA resolution; EPMA data often indicate mixtures of phyllosilicates such as muscovite/chlorite (M/C), biotite/chlorite (B/C), muscovite/pyrophyllite/chlorite (M/P/C). biotite/pyrophyllite/chlorite (B/P/C) or biotite/muscovite/chlorite (B/M/C). BEI observations show that the three minerals (muscovite, chlorite and biotite) are mixed at various scales in a grain through the garnet zone, and the interlayering of the three minerals are observed from TEM lattice fringe images and selected area electron diffraction patterns. The result of TEM observations reveals that 7-$\AA$ layers (serpentine, precursor of chlorite) are interlayered within 10-$\AA$ layers (muscovite) at 100~200 $\AA$ scale as well as M/C in the chlorite zone. The 7-$\AA$ layers become smaller in size and less frequent in the biotite tone, and 10-$\AA$ layers are interlayered with chlorite (14 $\AA$) at an individual layer scale. The 7-$\AA$ layers are no longer observed in the garnet zone, and 10-$\AA$ layers (biotite) are interlayered with chlorite (B/C) at 50~100 $\AA$ scale. Relatively large scale (1000~2000 $\AA$) of intergrowth is also frequently observed from the garnet zone samples. However, rocks from all three metamorphic zones show interlayering of a few units of 7-, 10- and 14-$\AA$ layers with each other at TEM observations. The result of this study implies that metamorphic minerals such as muscovite, chlorite and biotite form through disequilibrum mineral reactions resulting in inhomogenious phases.

Effect of Long-Term Aging Degradation on Magnetic Properties of Ferritic 11Cr Low-Carbon Steel (페라이트기 11Cr 저탄소강의 자기적 특성에 대한 고온 장시간 시효열화 효과)

  • Kim, Chungseok;Ryu, Kwon-Sang
    • Journal of the Korean Society for Nondestructive Testing
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    • v.36 no.5
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    • pp.377-383
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    • 2016
  • The effect of long-term aging degradation on magnetic properties of ferritic 11Cr low-carbon steel was investigated. Coercivity and hysteresis loss measured from the hysteresis loops decreased with long-term aging time and showed that the relation was well fitted by a second order exponential function. Vickers hardness also decreased with aging time and resulted in mechanical softening. In addition, the microstructural evolution was observed by the scanning electron microscopy, backscattered electron image and X-ray diffraction. The $Cr_{23}C_6$ precipitates along grain boundary grew fast and Laves ($Fe_2W$) phase on martensitic lath boundaries in interior grains was developed. The solid solution atoms depleted in matrix and lath subgrains recovered owing to precipitate coarsening with long-term aging degradation. There was a close relation with softening of magnetic and mechanical properties.

Shock Metamorphism of Plagioclase-maskelynite in the Lunar Meteorite Mount DeWitt 12007 (달운석 Mount DeWitt 12007의 마스컬리나이트 충격 변성 특성 연구)

  • Kim, Hyun Na;Park, Changkun
    • Journal of the Mineralogical Society of Korea
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    • v.29 no.3
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    • pp.131-139
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    • 2016
  • Detailed knowledge on maskelynite, a glassy phase of plagioclase found in shocked meteorites and impact craters, is essential to understand a shock metamorphism. Here, we explore an inhomogeneous shock metamorphism in the lunar meteorite Mount DeWitt (DEW) 12007 with an aim to understand the formation mechanism of maskelynite. Most plagioclase grains in the DEW 12007 partially amorphized into maskelynite with a unidirectional orientation. Back-scattered electron (BSE) images of maskelynite show a remnant of planar deformation fracture possibly indicating that the maskelynite would be formed by solid-state transformation(i.e., diaplectic glass). Plagioclase with flow texture is also observed along the rim of maskelynite, which would be a result of recrystallization of melted plagioclase. Results of Raman experiments suggest that shock pressure for plagioclase and maskelynite in the DEW 12007 is approximately 5-32 GPa and 26-45 GPa, respectively. The difference in shock pressures between plagioclase and maskelynite can be originated from 1) external factors such as inhomogeneous shock pressure and/or 2) internal factors such as chemical composition and porosity of rock. Unfortunately, Raman spectroscopy has a limitation in revealing the detailed atomic structure of maskelynite such as development of six- or five-coordinated aluminum atom upon various shock pressure. Further studies using nuclear magnetic resonance spectroscopy are necessary to understand the formation mechanism of maskelynite under high pressure.

Formation of $CoSi_2$ Film and Double Heteroepitaxial Growth of $Si/epi-CoSi_2/Si$(111) by Solid Phase Epitaxy (고상 에피택시에 의한 초박막 $CoSi_2$ 형성과 $Si/epi-CoSi_2/Si$(111)의 이중헤테로 에피택셜 성장)

  • Choi, Chi-Kyu;Kang, Min-Sung;Moon, Jong;Hyun, Dong-Geul;Kim, Kun-Ho;Lee, Jeong-Yong
    • Korean Journal of Materials Research
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    • v.8 no.2
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    • pp.165-172
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    • 1998
  • Epitaxial ultrathin films of $CoSi_2$ and double heteroepitaxial structure of Si/$CoSi_2$/Si(lll) were prepared on Si(111)-$7\times{7}$ substrate by in situ solid-phase epitaxy in a ultrahigh vacuum(LHV). The phase, chemical composition, crystallinity, and the microsructure of the Si/$CoSi_2$/Si(lll) interface were investigated by 2-MeV $^4He^{++}$ ion backscattering spectrometry, X-ray diffraction, and high-resolution transmission electron microscopy. The growth mode of the Co film was the Stransky-Krastanov type with texture when the substrate temperature was room temperature. A-type $CoSi_2$ ultrathin film was grown by deposition of about 50A Co on Si(ll1)-$7\times{7}$ substrate followed by in situ annealing at $700^{\circ}C$ for 10 min. The matching face relationships were $CoSi_2$[110]//Si[110] and $CoSi_2$(002)//Si(002) with no misorientation angle. The A-type $CoSi_2$/Si(lll) interface was abrupt and coherent. The best epi-Si/epi-$CoSi_2$2(A-type)/Si(lll) structure was obtained by deposition of Si film on the CoSii at $500^{\circ}C$ followed by in situ annealing at $700^{\circ}C$ for 10 min in UHV.

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Mineralogical Characteristics and Genesis of Phlogopite in the Talc Deposits of the Chungnam Area, Korea (충남지역 활석광상에서 산출되는 금운모의 광물특성 및 기원)

  • Kim Geon-Young;Kim Soo Jin;Koh Yong Kwon;Bae Dae Seok
    • Journal of the Mineralogical Society of Korea
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    • v.17 no.3
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    • pp.221-233
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    • 2004
  • Mineralogical characteristics and genesis of phlogopite in the talc deposits of the chungnam area were studied. Mica is one of the major impurity of talc ores in the study area. Talc-related micas show typical phlogopite composition, whereas talc-unrelated micas show wide compositional variations between biotite and phlogopite. Phlogopite mainly occurs in the black-wall type zone, especially in the nodular talc ores near the outer part of talc ore bodies. Interleaving textures of phlogopite and chlorite are easily observed under the optical microscope and back-scattered electron images. Interleaving textures of phlogopite and talc are observed also. Examination of the phlogopite by transmission electron microscope reveals that 14 $\AA$ layers of chlorite are randomly interlayered within the 10 $\AA$ layers of phlogopite, which suggests that the genesis of phlogopite is closely related to chlorite. Considering the occurrence and mineralogical characteristics of phlogopite, and the possible origin of K for the formation of phlogopite, phlogopite of the study area was formed by interaction between talc ore body and hydrothermal solution containing sufficient K at the late stage of talc formation. K might be introduced from the granitic gneiss at the contact zone between the talc ore body and the granitic gneiss under favorable structural condition for the potash metasomatism.

Reproductive Cycle of Small Filefish, Rudarius ercodes (그물코쥐치, Rudarius ercodes의 생식주기)

  • LEE Taek Yuil;HANYU Isao
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.17 no.5
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    • pp.423-435
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    • 1984
  • The reproductive cycle of the small filefish, Rudarius ercodes was investigated based on the annual variations of gonadosomatic index(GSI) and hepatosomatic index(HSI) by electronic and photic microscophy. The specimens used were collected at the coastal area of Benden island, Sizuokagen, Japan, from September 1982 to August 1983. GSI began to increase from March, starting season of longer daylength and higher water temperature, and reached the maximum value between June and August. It began to decrease from September with the lowest value appearing between November and February without any evident variation. The annual variations of HSI were not distinct in male filefish and were negatively related to GSI in female : HSI decreased in the summer season when the ovary was getting mature and reached the maximum in the winter season when the ovary was getting retrogressive. The ovary consisted of a pair of saccular structure with numerous ovarian sacs branched toward the median cavity. Oogonia divided and proliferated along the germinal epithelium of the ovarian sac. Young oocytes with basophile cytoplasm showed several scattering nucleoli along the nuclear membrane. when the oocytes growing to about 300 ${\mu}m$, nuclear membrane to disappear with nucleus migrating toward the animal pole. The regions of protoplasm were extremely confined within the animal hemisphere in which most of cytoplasms were filled with yolk materials and oil drops. After ovulation, residual follicles and growing oocytes remaining in the ovarian sacs degenerated. But perinucleatic young oocytes without follicles formed were not degenerated, and growing continuously still in the next year. Mitochondria and endoplasmic reticula in the cytoplasm remarkably increased with oocytes maturing and yolk accumulating. Those were considered to be functionally related to the yolk accumulation. Five or six layers of possible vitellogenin, oval-shaped disc structures with high electron density, appeared in the apex of follicular processes stretching to the microvilli pits of mature oocytes. Testis consisting of a pair of lobular structures in the right and left were united in the posterior seminal vesicle, Cortex of testis was composed of several seminiferous tubules, and medulla consisting of many sperm ducts connected with tubules. Steroid hormone-secreting cells with numerous endoplasmic reticula and large mitochondria of well developed cristae were recognized in the interstitial cells of the growing testis. Axial filament of spermatozoon invaginated deeply in the central cavity of the nucleus and the head formed U-shape with acrosome severely lacking, mitochondria formed large globular paranuclei at the posterior head, and microtubular axoneme of the tail represented 9+9+2 type. The annual reproductive cycles could be divided into five successive stages : growth(March to July), maturation(May to September), Spawning(mid May to early October) and resting stages(October to February). The spawning peak occurred from June to August.

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