• Proceedings of the KIEE Conference
• /
• 2007.07a
• /
• pp.1379-1380
• /
• 2007

본 연구에서는 XeCl 엑시머 레이저를 통해서 GaN를 선별적으로 고농도 도핑 할 수 있는 새로운 방법을 제안했으며, 제안된 방법에 의해 제작된 소자는 낮은 ohmic contact 저항을 나타내었다. 증착된 실리콘 film에 XeCl 엑시머 레이저를 사용하여 GaN 위에 sputtering 함으로써 조사하였으며 레이저에 의해 조사된 영역에는 ohmic contact을 형성하였다. 기존 방법에 의한 ohmic contact 저항이 0.66 ohm-mm이었던 반면, 레이저 도핑 공정에 의한 ohmic contact 저항은 0.27 ohm-mm로 효과적으로 감소되었다. SIMS 분석을 통해 레이저 조사를 하는 동안 높은 에너지에 의해 실리콘이 GaN로 확산되었으며, ohmic contact 저항이 ohmic contact 영역 아래의 도핑 농도 증가로 인해 감소한 것을 확인했다.

• The Journal of Society for e-Business Studies
• /
• v.15 no.2
• /
• pp.205-217
• /
• 2010

IPTV Service was launched with great expectation, but it is having difficulty due to the low number of subscribers and contents. In addition, the study of IPTV is still in its infancy and most of previous studies are only focused how IPTV is adopted and spread. In this study, we defined that resistance is the users not tend to accept IPTV service, and analyzed factors affecting resistance which are Innovative characteristics, User characteristics, Service characteristics and proposed implications for IPTV service vitalization. The results that relative advantage, complexity, attitude of an existing product, contents, cost, innovativeness have significant effects on resistance to IPTV.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2012.05a
• /
• pp.84-84
• /
• 2012

소자가 고집적화 됨에 따라, 비저항이 낮고 electro migration (EM), Stress Migration (SM) 특성이 우수한 구리(Cu)를 배선재료로서 사용하고 있다. 그러나, 구리는 Si과 $SiO_2$의 내부로 확산이 빠르게 일어나, Si 소자 내부에 deep donor level을 형성하고, 누설 전류를 증가시키는 등 소자의 성능을 저하시킬 수 있는 문제점을 가지고 있다. 그러나, electroplating 을 이용하여 증착한 Cu 박막은 일반적으로 확산 방지막으로 쓰이는 TiN, TaN, 등의 물질과의 접착 (adhesion) 특성이 나쁘다. 따라서, Cu CMP 에서 증착된 Cu 박막의 벗겨지거나(peeling), EM or SM 저항성 저하 등의 배선에서의 reliability 문제를 야기하게된다. 따라서 Cu 와 접착 특성이 좋은 새로운 확산방지막 또는 adhesion layer의 필요성이 대두되고 있다. 본 연구에서는 이러한 Cu 배선에서의 접착성 문제를 해결하고자 Metal organic chemical vapor deposition (MOCVD)을 이용하여 제조한 코발트(Co) 박막을 $Cu/TaN_x$ 사이의 접착력 개선을 위한 adhesion layer로 적용하려는 시도를 하였다. Co는 비저항이 낮고, Cu 와 adhesion이 좋으며, Cu direct electroplating 이 가능하다는 장점을 가지고 있다. 하지만, 수소 분위기에서 $C_{12}H_{10}O_6(Co)_2$ (dicobalt hexacarbonyl tert-butylacetylene, CCTBA) 전구체에 의한 MOCVD Co 박막의 경우 탄소, 산소와 같은 불순물이 다량 함유되어 있어, 비저항, surface roughness 가 높아지게 된다. 따라서 구리 전착 초기에 구리의 핵 생성(nucleation)을 저해하고 핵 생성 후에도 응집(agglomeration)이 발생하여 연속적이고 얇은 구리막 형성을 방해한다. 이를 해결하기 위해, MOCVD Co 박막 증착 시 수소 반응 가스에 암모니아를 추가로 주입하여, 수소/암모니아의 분압을 1:1, 1:6, 1:10으로 변화시켜 $Co/TaN_x$ 박막의 특성을 비교 분석하였다. 각각의 수소/암모니아 분압에 따른 $Co/TaN_x$ 박막을 TEM (Transmission electron microscopy), XRD (X-ray diffraction), AES (Auger electron spectroscopy)를 통해 물성 및 조성을 분석하였고, AFM (Atomic force microscopy)를 이용하여, surface roughness를 측정하였다. 실험 결과, $Co/TaN_x$ 박막은 수소/암모니아 분압 1:6에서 90 ${\mu}{\Omega}-cm$의 낮은 비저항과 0.97 nm 의 낮은 surface roughness 를 가졌다. 뿐만 아니라, MOCVD 에 의해 증착된 Co 박막이4-6 % concentration 의 탄소 및 산소 함량을 가지는 것으로 나타났고, 24nm 크기의 trench 기판 위에 약 6nm의 $Co/TaN_x$ 박막이 매우 균일하게 형성된 것을 확인 할 수 있었다. 이러한 결과들은, 향후 $Co/TaN_x$ 박막이 Cu direct electroplating 공정이 가능한 diffusion barrier로서 성공적으로 사용될 수 있음을 보여준다.

• Analytical Science and Technology
• /
• v.6 no.2
• /
• pp.217-223
• /
• 1993

Thin films of the Au/Cr, Au/Ni/Cr and Au/Pd/Cr systems were deposited on alumina substrates at ambient temperature and $250^{\circ}C$ in a high-vacuum resistance heating evaporator and annealed at $300^{\circ}C$, $450^{\circ}C$ and $600^{\circ}C$ for 1 hour in air, respectively. The film thicknesses of Au, Ni(or pd), and Cr were $1000{\AA}$, $300{\AA}$, and $50{\AA}$, respectively. The substrate temperature during deposition and the post-deposition annealing temperature affected the sheet resistance of thin-films due to the inter-diffusion of each layer. As a result of Auger depth profile analysis, in the Au/Cr system Cr already diffused out to Au surface during deposition at the substrate temperature of $250^{\circ}C$ and Au distribution changed after heat treatment. In the Au/Ni/Cr and Au/Pd/Cr systems, diffusion phenomena of Ni and Pd were found and especially Ni (approximately 45 at.%) diffused out to Au surface and oxidized.

• Journal of the Korean Recycled Construction Resources Institute
• /
• v.10 no.4
• /
• pp.600-608
• /
• 2022

This study investigates the effect of layered double hydroxide (LDH) on the healing performance of self-healing concrete by assessing the chloride penetration resistance of self-healing cement mortars using electrical chloride ion migration-diffusion test. Test results show that both mortars containing healing materials only and mortars containing healing materials and Ca-Al LDH together mostly had higher migration-diffusion coefficients right after cracking, but the migration-diffusion coefficients decreased more than that of OPC with increasing healing ages, and thus, they yielded higher healing capacities than OPC. Also, mortars containing Ca-Al LDH together with healing materials showed higher reduction of their migration-diffusion coefficients, and thus, higher healing capacities than mortars containing healing materials only. This suggests that as the self-healing product increases on the crack surface, the binding of chloride ions by LDH inside the crack increases.

• Journal of the Korea institute for structural maintenance and inspection
• /
• v.15 no.2
• /
• pp.79-87
• /
• 2011

In this study, the chloride penetration tests were performed for the initially cracked reinforced concrete members. The chloride diffusion characteristics and the critical crack width are compared, and the properties of self-healing are investigated. According to the test results, the chloride penetration resistance was greatly reduced as the surface crack width increased. When the mineral admixtures are added, the chloride penetration resistance of uncracked specimens were effectively increased, however, in case of the blast furnace slag and fly ash, the cracked specimens showed the more reduced resistance than OPC case, inversely. Also, the critical width was $29{\mu}m$, on average, for immersion test. The crack width with $4{\sim}15{\mu}m$ was restored by self-healing, The parts restored by self-healing were seemed to be visually restored, however, the chloride penetration resistance was not restored, perfectly.

• Journal of the Korea institute for structural maintenance and inspection
• /
• v.19 no.6
• /
• pp.37-45
• /
• 2015

In this experimental study, effect of milled glass fibers was investigated on corrosion resistance of PSC grout mortar. In order to check whether the mortar mixture with milled glass fibers satisfy the required properties as a PSC grout, time of flow, bleeding and compressive strength measured. The corrosion resistance were investigated through chloride ion migration test, mortar absorption test and surface resistivity measurement. It is confirmed that all proportions with milled glass fibers have better corrosion resistance than that with only OPC binder. Time of flow was reduced but the bleeding was increased to unacceptable level by using milled glass fibers. Consequently, the mix proportion with milled glass fibers for a PSC grout should be modified to have lower water/binder ratio.

• Proceedings of the Korea Concrete Institute Conference
• /
• 2008.04a
• /
• pp.625-628
• /
• 2008

This study is performed to evaluate the carbonation resistance by measuring carbonation penetration depth and diffusion equivalent air layer thickness for 3 types of repair materials and 2 types of surface protection materials. Diffusion equivalent air layer thickness($S_D$) is thickness of a static air layer that possesses, under the same conditions, the same carbon dioxide permeability as the coating in accordance BS EN 1062-6. There is a significant advantage that continuous test is possible because it does not destroy the specimen. From experiment results, it is concluded that determination of carbon dioxide permeability is effective to evaluate for surface coating materials.

• Geophysics and Geophysical Exploration
• /
• v.1 no.1
• /
• pp.57-63
• /
• 1998

The electrical resistivity method, one of old and widely used geophysical prospecting methods, has extended its scope to civil & environmental engineering areas. The electrical resistivity imaging technique was performed at the waste disposal site located in Junju to verify the applicability to the environmental engineering area. The dipole-dipole array, with the dipole spacing of 10 m, was applied along eight survey lines. The field data were obtained under the control of automatic acquisition softwares and topographic effects were corrected during processing stage. The processed resistivity images show that very low resistivity develops inside the disposal site and the distribution of low resistivity is exactly in accord with the boundary of the site except the river side. The depth of low resistivity zones is deeper toward the river side, which is interpreted that there is a high possibility for contaminants to be scattered to the river. From resistivity images, it was feasible to deduce the depth of waste disposal as well as the horizontal/vertical distribution of the contaminated zone, which proved the applicability of the electrical resistivity imaging technique to the environmental engineering area.

• The Journal of the Korea Contents Association
• /
• v.16 no.6
• /
• pp.123-134
• /
• 2016

As the internet of things has come into the spotlight, wearable devices have been emerging as a new and growing market and the next hot thing in the world. However, wearable device growth in the market has not met expectations. For continued growth and diffusion of wearable devices, it is important to investigate user resistance factors to them. This study gives attention to people who have resistance to wearable devices' tendency towards innovative uses. Specifically, this study is intended to find out which factors influence consumers' resistance and intention to use wrist-worn wearable devices, which are in high demand among wearable device. Results of the study show that the relative advantage, innovation expectation, complexity, financial risk and physical risk are the predictors of innovation resistance on wrist-worn wearable devices. And consumers' resistance affects the intention of positive acceptance. These findings confirm the importance of consumer resistance to the wrist-worn wearable device.