• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.90-93
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• 2007

밀도가 높고 주기적으로 배열된 실리콘 나노점이 실리콘 기판위에 형성 되었다. 실리콘 나노점을 형성하기 위해 사용된 나노패턴의 지름은 20 나노미터(nm)이고 깊이는 40 nm 이었으며 기공과 기공사이의 거리는 50 nm 였다. 나노미터 크기의 패턴을 형성시키기 위해서 자기조립물질을 사용했으며 폴리스티렌(PS) 바탕에 벌집형태로 평행하게 배열된 실린더 모양의 폴리메틸메타아크릴레이트(PMMA)의 구조를 형성하였다 폴리메틸메타아크릴레이트를 아세트산으로 제거하여 폴리스티렌만 남아있는 나노크기의 마스크를 만들었다. 형성된 나노패턴에 전자빔 기상증착장치를 사용하여 금 박막을 $100\;{\AA}$ 증착하고 리프트오프(lift-off) 방식으로 금 나노점을 만들었다. 형성된 금 나노점을 불소기반의 화학반응성 식각법을 이용하여 식각하고 황산으로 제거하였다. 형성된 실리콘 나노점의 지름은 24 nm 였고 높이는 20 nm 였다.

• Journal of the Korean Vacuum Society
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• v.16 no.5
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• pp.366-370
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• 2007

Nano-scopic holes which are distributed densely and uniformly were fabricated on $SiO_2$ surface. Self-assembling resists were used to produce a layer of uniformly distributed parallel poly methyl methacrylate (PMMA) cylinders in a polystyrene (PS) matrix. The PMMA cylinders were degraded and removed by acetic acid rinsing. Subsequently, PS nanotemplates were fabricated. The patterned holes of PS template were approximately $8{\sim}30\;nm$ wide, 40 nm deep, and 60 nm apart. The porous PS template was used as a dry etching mask to transfer the pattern of PS template into the silicon oxide thin film during reactive ion etching (RIE) process. The sizes of the patterned holes on $SiO_2$ layer were $9{\sim}33\;nm$. After pattern transfer by RIE, uniformly distributed holes of which size were in the range of $6{\sim}22\;nm$ were fabricated on Si substrate. Sizes of the patterned holes were controllable by PMMA molecular weight.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.147-147
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• 2004

폴리메틸메타크릴레이트(polymethylmethacrylate, PMMA)는 아크릴레이트계 고분자이자 열가소성 플라스틱으로써 LCD용 도광판, 콘택트렌즈, 치과용 레진, DVD 디스크용 소재, 나노임프린트용 피가공재, 나노리소그래피 공정용 레지스트 등 많은 분야에서 활발히 사용되고 있다. PMMA 와 같은 점소성 점탄성 소재의 기계적 성질 측정 및 가공을 위해서는, 응력완화 (stress relaxation), 크립 (creep)등과 같은 시간의존적 변형거동에 대한 연구가 선행되어야 한다.(중략)

• Polymer(Korea)
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• v.27 no.5
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• pp.493-501
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• 2003

Poly(methyl methacrylate) (PMMA) particles, denture base resin, were synthesized by suspension polymerization through control of polymerization conditions (stabilizer concentration, co-monomer concentration, and the agitation speed) and evaluated changes in molecular weight and particle size. We also investigated their mechanical properties of compression-molded samples which were from synthesized polymer powder mixed with methyl methacrylate (MMA) solution. under the condition of volumetric ratio as 2:1(PMMA powder and MMA solution). The results shows that the mechanical properties were mainly affected by particle size over 100 ${\mu}$m (in particle size) and by molecular weight under 100 ${\mu}$m (in particle size). From these results, we concluded that the most appropriate particle size of PMMA powder for heat-cured denture base resins is around 100 ${\mu}$m. and its molecular weight is around 300000 (M$\sub$n/).

• Journal of the Microelectronics and Packaging Society
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• v.13 no.3 s.40
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• pp.13-17
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• 2006

Dense and periodic arrays of holes and tungsten none dots were fabricated on silicon oxide and silicon. The holes were approximately 25 nm wide, 40 nm deep, and 60 nm apart. To obtain nano-size patterns, self-assembling resists were used to produce layer of hexagonally ordered parallel cylinders of polymethylmethacrylate(PMMA) in polystyrene(PS) matrix. The PMMA cylinders were degraded and removed with acetic acid rinse to produce a PS mask for pattern transfer. The silicon oxide was removed by fluorine-based reactive ion etching(RIE). Selectively deposited tungsten nano dots were formed inside nano-sized trench by using a low pressure chemical vapor deposition(LPCVD) method. Tungsten nano dot and trenched silicon sizes were 26 nm and 30 nm, respectively.

• Journal of the Korean Society of Radiology
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• v.15 no.3
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• pp.345-353
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• 2021

Digital radiography imaging systems can also help diagnose lesions in patients, but if x-rays that enter the human body cause scatter x-ray due to interaction with substances, they affect the signal and noise characteristics of digital x-ray images. To regard the human body as polymethyl methacrylate (PMMA) and observe the properties of scattered x-ray generated from PMMA on x-ray images, we analyze signal and noise in the spatial domain as well as noise-power spectrum (NPS), and detective quantum efficiency (DQE) at zero frequency. As PMMA thickness increased, signals decreased, the noise increased, and NPS degradation was identified in overall spatial frequencies. Based on these characteristics, zero-frequency performance was also shown to be degraded. Comparative analysis with Monte-carlo simulations will need to be made to analyze the zero-frequency performance by scattered x-ray of indirect conversion-type x-ray detectors more quantitatively.

• Journal of the Korean Society of Radiology
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• v.16 no.4
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• pp.395-403
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• 2022

Flat-panel detector (FPD) used in digital radiographic imaging systems was used to perform a quantitative power spectrum evaluation as a result of the thickness change of polymethyl methacrylate (PMMA), a tissue equivalent. As the PMMA thickness increases with the resolution-chart phantom image, the effect of the scattering line increases, indicating that the modulation characteristics decrease, and the image is bright. The results show that the noise of the image increases, and noise-power spectral images are obtained by Fourier transform to confirm by spatial frequency. Thus, it can be verified that the PMMA thickness and noise are proportional through the result of evaluating the change of resolution characteristics and representing the 2D noise-power spectrum as one-dimensional values by evaluating the change of scattering line with MTF as the PMMA thickness increases in the image.

• Journal of the Microelectronics and Packaging Society
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• v.14 no.2 s.43
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• pp.17-21
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• 2007

Dense and periodic arrays of holes and Si nano dots were fabricated on silicon substrate. The nanopatterned holes were approximately $15{\sim}40nm$ wide, 40 nm deep and $40{\sim}80\;nm$ apart. To obtain nano-size patterns, self?assembling diblock copolymer were used to produce layer of hexagonaly ordered parallel cylinders of polymethylmethacrylate (PMMA) in polystyrene(PS) matrix. The PMMA cylinders were degraded and removed with acetic acid rinse to produce a PS. $100\;{\AA}-thick$ Au thin film was deposited by using e-beam evaporator. PS template was removed by lift-off process. Arrays of Au nano dots were transferred by using Fluorine-based reactive ion etching(RE). Au nano dots were removed by sulfuric acid. Si nano dots size and height were $30{\sim}70\;nm$ and $10{\sim}20\;nm$ respectively.

• Journal of the Korean Society of Radiology
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• v.15 no.2
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• pp.173-179
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• 2021

Scattered x-ray generated by digital radiography systems also have the advantage of increasing signals, but ultimately detectability is reduced by decreasing resolution and increasing noise of x-ray images transmitted objects. An indirect method of measuring scattered x-ray in a modulation-transfer function (MTF) for evaluating resolution in a spatial-frequency domain can be considered as a drop in the MTF value corresponding to zero-frequency. In this study, polymethyl methacrylate (PMMA) was used as a patient tissue equivalent, and MTFs were obtained for various thicknesses to quantify the effect of scattered x-ray on resolution. X-ray image signals were observed to decrease by 35 ~ 83% with PMMA thickness increasing, which is determined by the absorption or scattering of x-rays in PMMA, resulting in reduced MTF and increased scatter fraction. The method to compensate for MTF degradation by PMMA resulted in the MTF inflation without considering the optical spreading generated by the indirect-conversion type detector. Data fitting or zero-padding are needed to compensate for MTF more reasonably on edge-spread function or line-spread function.

• Applied Chemistry for Engineering
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• v.29 no.4
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• pp.395-398
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• 2018

In this work, profound microscale behaviors of block copolymer and polymer blend under electric field were investigated using microscopic methods and compared systematically. To this end, both the block copolymer and blend containing polyacrylonitrile (PAN) and poly(methyl methacrylate) (PMMA) were introduced. The two polymers have a similar dielectric constant. Under an identical experimental condition such as temperature, film thickness, field intensity, and exposure time, the polymer blend responded more sensitively than the block copolymer. The presence of covalent bond suppressed the mobility of constituents in block copolymer. This study will be essential for future research activities regarding behaviors of polymeric materials under external fields.