Nanotribological characteristics of plasma treated hydrophobic thin films on silicon surfaces using SPM (SPM을 이용한 Si 표면위에 플라즈마 처리된 소수성 박막의 나노 트라이볼로지적 특성 연구)
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- Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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- 2001.11a
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- pp.35-42
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- 2001