Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference (한국윤활학회:학술대회논문집)

Korean Tribology Society (한국트라이볼로지학회)
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Nanotribological characteristics of plasma treated hydrophobic thin films on silicon surfaces using SPM

SPM을 이용한 Si 표면위에 플라즈마 처리된 소수성 박막의 나노 트라이볼로지적 특성 연구

  • Yoon, Eui-Sung (Tribology Research Center, KIST) ;
  • Park, Ji-Hyun (Tribology Research Center, KIST) ;
  • Yang, Seung-Ho (Tribology Research Center, KIST) ;
  • Han, Hung-Gu (Tribology Research Center, KIST) ;
  • Kong, Ho-Sung (Tribology Research Center, KIST) ;
  • Koh, Seok-Keun (Thin Film Technology Research Center, KIST)
  • 윤의성 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 박지현 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 양승호 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 한흥구 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 공호성 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 고석근 (한국과학기술연구원 박막기술 연구센터)
  • Published : 2001.11.01
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Abstract

Nanotribological characteristics between a Si$_3$N$_4$ AFM tip and hydrophobic thin films were experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM(atomic force microscope) and LFM(lateral force microscope) modes in various ranges of normal load. Plasma-modified thin polymeric films were deposited on Si-wafer (100). Results showed that wetting angle of plasma-modified thin polymeric film increased with the treating time, which resulted in the hydrophobic surface and the decrease of adhesion and friction. Nanotribological characteristics of these surfaces were compared with those of other hydrophobic surfaces, such as DLC, OTS and IBAD-Ag coated surfaces. Those of OTS coated surface was superior to those of others, though wetting angle of plasma-modified thin polymeric film is higher.

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