Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference (한국윤활학회:학술대회논문집)
- 2000.11a
- /
- Pages.406-413
- /
- 2000
Tribological characteristics of sputtered MoS$_2$ films with Magnetron Sputtering Method in High Vacuum
Magnetron Sputtering법에 의해 증착한 MoS$_2$ 박막의 고진공하에서의 트라이볼로지적 특성
Abstract
The friction and wear behaviors of Magnetron Sputtered MoS
Keywords
- tribosystem;
- outgassing;
- Magnetron sputtered MoS$_2$film, Si$_3$N$_4$;
- Pin on disk type;
- Vacuum;
- friction coefficient;
- Specific wear rate;
- adhesion;
- transfer film