• Journal of the Korean Vacuum Society
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• v.17 no.2
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• pp.138-147
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• 2008

$SiO_2/TiO_2/ZrO_2$ broadband anti-reflective multi-layer thin films were prepared at room temperature by RF sputtering system. Optical constants and structural properties on each layer of films were analyzed by spectroscopic ellipsometer and transmittance spectra of the films were measured by $UV-V_{is}$ spectrophotometer in the range of 300$\sim$900 nm. To evaluate the films, we compared the measured and analyzed spectra with designed spectra. We investigated influence of discrepancy of thickness and refractive indices of each layer on changes of the transmittance spectra. It was found that refractive indices and shape of dispersion of deposition materials are more contributed to changes of the transmittance spectra than thickness of layer.

• Korean Journal of Optics and Photonics
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• v.13 no.3
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• pp.215-222
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• 2002

Using an in-situ ellipsometer, we monitored the growth curve of optical recording media in real time. For confirmation of the thickness control using in-situ ellipsometry, we analyzed the deposited multi-layer sample made of Ge-Sb-Te alloy film and ZnS-Si0$_2$ dielectric films using an exsitu spectroscopic ellipsometer. The target material in the first sputtering gun is ZnS-SiO$_2$ as the protecting dielectric layer and that in the second gun is Ge$_2$sb$_2$Te$_{5}$ as the receding layer. While depositing ZnS-SiO$_2$, Ge$_2$Sb$_2$Te$_{5}$ and ZnS-SiO$_2$ films on c-Si substrate in sequence, we measured Ψ $\Delta$ in real time. Utilizing the complex refractive indices of Ge$_2$Sb$_2$Te$_{5}$ and ZnS-SiO$_2$ obtained from the analysis of spectroscopic ellipsometry data, the evolution of ellipsometric constants Ψ, $\Delta$ with thickness is calculated. By comparing the calculated evolution curve of ellipsometric constants with the measured one, and by analyzing the effect of density variation of the Ge$_2$Sb$_2$Te$_{5}$ recording layer on ellipsometric constants with thickness, we precisely monitored the growth rate of the Ge-Sb-Te multilayer and controlled the growth process. The deviation of the real thicknesses of Ge-Sb-Te multilayer obtained under the strict monitoring is post confirmed to be less than 1.5% from the target structure of ZnS-SiO$_2$(1400 $\AA$)IGST(200 $\AA$)$\mid$ZnS-SiO$_2$(200$\AA$).(200$\AA$).

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.167-167
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• 2012

Aluminium-zinc-tin oxide (AZTO) 박막 트랜지스터는 Spin-coating 방법으로 제작되었다. AZTO용액의 용매는 2-Methoxyethanol, 용질은 각각 Aluminium nitride, Zinc acetate dihydrate, Tin chloride가 사용되어 제작되었다. 용액의 안정성을 위해서 미량의 Mono ethyl amine이 첨가되었다. 용액의 Zn:Sn의 몰 비율은 1 : 1로 고정 되었으며 Al의 mole비를 다양하게 늘리면서 실험을 진행하였다. 이렇게 만들어진 AZTO용액은 3,000 rpm으로 30초간 Spin-coating하였으며 이후 Furnace system을 통하여 $500^{\circ}C$의 온도로 1시간 동안 후열처리 공정을 진행하였다. AZTO박막을 활성층으로 제작된 박막 트랜지스터는 Al의 비율이 늘어남에 따라 처음엔 이동도가 증가하였으나 이후 이동도가 낮아지며 소자특성이 나빠지는 것을 보였다. 이러한 현상의 원인을 알아보고자 물리적, 전기적, 광학적 분석을 통해서 Al양의 변화가 박막트랜지스터 구동에 미치는 영향을 해석하였다. 먼저 AZTO용액은 열중량측정/시차열분석법(Thermo Gravimetry/Differential Thermal Analysis)을 이용하여 spin-coating 이후 후 열처리 온도 결정 및 박막의 변화를 관찰하였으며, X-선 분광(X-ray photoelectron spectroscopy)을 이용하여 박막의 조성 및 전자구조의 변화를, 타원분광해석법(Spectroscopic Ellipsometry)분석을 통하여 밴드 갭과 전도대 이하 밴드 갭 내에 존재하는 결함상태변화를 관찰하였다. AZTO 박막 내의 Al양을 조절하는 것은 박막내의 에너지 준위의 변화를 야기하고 그로인해 박막트랜지스터의 특성을 변화킨다는 결과를 도출하였다.

• Journal of the Semiconductor & Display Technology
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• v.22 no.3
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• pp.90-95
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• 2023

We describe an optimal alignment method for improving accuracy of dynamic spectroscopic polarimeter based on monolithic polarizing interferometer. The dynamic spectroscopic polarimeter enables real-time measurements of spectral ellipsometric parameters by using a spectral carrier frequency concept. However, the non-polarizing beam splitter used in the monolithic polarizing interferometer cannot maintain the polarization state perfectly due to phase retardation caused by optical anisotropic characteristics of the non-polarizing beam splitter, resulting in degraded measurement accuracy. The effect of the beam splitter can be minimized through optimal alignment of the polarizers used in the polarizing interferometer and the analyzer. We demonstrate how much the proposed alignment method can enhance the measurement accuracy by comparing with previous alignment approach.

• Korean Journal of Optics and Photonics
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• v.15 no.3
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• pp.258-262
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• 2004

The uncertainty of the detector-based candela scale is limited by the area measurement uncertainty of radiometric apertures. The apertures were fabricated with a diamond-turning machine which trimmed the edge of the apertures as sharply as a knife edge. The positions of the apertures were controlled by a digital feedback algorithm to scan the laser spot with the beam waist less than 5 ${\mu}{\textrm}{m}$. The knife edge scan yielded a set of coordinates on the edges of the aperture. The areas of the apertures were obtained by fitting the coordinates to the ellipses. The relative standard uncertainty of the measurement was estimated to be 8${\times}$10$^{-5}$.

• Journal of Korean Ophthalmic Optics Society
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• v.10 no.4
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• pp.267-272
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• 2005

We deposited thin films of organic light-emitting-material $Alq_3$(alumina quinoline) on silicon and slide-glass substrates using thermal evaporation method, and measured spectra of ellipsometry angles ${\Delta}$ and ${\Psi}$ in the photon-energy range of 1.5~5.0 eV using a variable angle spectroscopic ellipsometer. The optical constants, refractive index and extinction coefficient, of $Alq_3$ were determined via the dispersion parameters extracted from the curve-fitting process based on Jellison-Modine dispersion function. The reliability of determined optical constants were verified through the comparison of measured and simulated transmittance curves and the good agreement between simulated absorption-coefficient curves and absorbance spectra measured using a spectrophotometer.

• Journal of the Semiconductor & Display Technology
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• v.20 no.3
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• pp.178-183
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• 2021

This paper describes a dynamic spectroscopic ellipsometry based on dual-wavelength calibration. DSE provides ellipsometric parameters at rates above 20 Hz, but the interferometer's sensitivity to temperature makes it difficult for that proposed system to maintain stable 𝜟k over long periods of time. To solve this problem, we set up an additional path in the DSE to perform simulations of the polarization phase calibration method using dual wavelengths. Through simulation, we were able to eliminate most of the polarization phase error and maintain a stable 𝜟k in the long-term stability experiment for 10 hours. This is the result that the 𝜟k stability of the proposed system is improved tens of times compared to the existing system.

• Journal of Astronomy and Space Sciences
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• v.19 no.1
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• pp.25-30
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• 2002

Black hole binary candidates are known to be composed of a black hole with 10 $M_{\odot}$ and a K or M type companion. Because the companion is believed to fill the Roche lobe that is very aspherical, the light curves of black hole binaries are characterized by an ellipsoidal variation. It has been known that the ellipsoidal light curves exhibit asymmetric maximum brightness at the orbital phases 0.25 and 0.75, which has been attributed to star spots or the hot impact points of the accretion flow on to the accretion disk around the black hole. In this paper, it is pointed out that the special relativistic beaming effect contributes to the asymmetry of several percent often observed in the light curves. The typical orbital velocity 400 km $s^{-1}$ observed in black hole binaries may induce the temperature difference $\DeltaT/T$ ~ 1/400 of the late type companion star in the observer`s rest frame, because of the special relativistic Doppler beaming effect. This difference in temperature can result in several per cent of brightness sensitively dependent on the wavelength band, which is comparable to what has been observed in most black hole binary candidates. Considering the significant contribution of the special relativistic Doppler beaming effect, we conclude that the estimation of the sizes and temperatures of the star spots or the hot impact point needs serious revision.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.37 no.2
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• pp.137-141
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• 2011

Sunscreen is divided into the organic agent of UV absorption and inorganic agent of reflection. These are evaluated by sun protection factor (SPF) in-vivo test requiring high cost and time, while in-vitro tests are adopted commonly because of short test time, easy result collection. Generally, test method of SPF use SPF 290a by UV-vis spectrometer. The evaluate by SPF 290 has low reproducibility. Although analysis using UV-vis spectrometer has high reproducibility, it is hard to separated results of transmission, adsorption, and reflection. In this study, suggested method of elipsometer has some merit such as high reproducibility, easy separation of transmission/adsorption/re- flection, analysis using various incident angle. We tested the validity of elipsometer for SPF measurement, using commercially available sun-block (SPF 50).

• Journal of Korea Water Resources Association
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• v.40 no.10
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• pp.769-781
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• 2007

Factor analysis has been usually employed in reducing quantity of data and summarizing information on a system or phenomenon. In this analysis methodology, variables are grouped into several factors by consideration of statistic characteristics, and the results are used for dropping variables which have lower weight than others. In this study, factor analysis was applied for extracting primary factors influencing multi-dam system operation in the Han River basin, where there are two multi-purpose dams such as Soyanggang Dam and Chungju Dam, and water has been supplied by integrating two dams in water use season. In order to fulfill factor analysis, first the variables related to two dams operation were gathered and divided into five groups (Soyanggang Dam: inflow, hydropower product, storage management, storage, and operation results of the past; Chungju Dam: inflow, hydropower product, water demand, storage, and operation results of the past). And then, considering statistic properties, in the gathered variables, some variables were chosen and grouped into five factors; hydrological condition, dam operation of the past, dam operation at normal season, water demand, and downstream dam operation. In order to check the appropriateness and applicability of factors, a multiple regression equation was newly constructed using factors as description variables, and those factors were compared with terms of objective function used in operation water resources optimally in a river basin. Reviewing the results through two check processes, it was revealed that the suggested approach provided satisfactory results. And, it was expected for extracted primary factors to be useful for making dam operation schedule considering the future situation and previous results.