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Long-term Stability Optimization of Dynamic Spectroscopic Ellipsometery based on Dual-wavelength Calibration  

Choi, Inho (Department of Mechanical System Engineering, Jeonbuk National University)
Kheiryzadehkhanghah, Saeid (Department of Mechanical System Engineering, Jeonbuk National University)
Choi, Sukhyun (Department of Mechanical System Engineering, Jeonbuk National University)
Hwang, Gukhyeon (Department of Mechanical System Engineering, Jeonbuk National University)
Shim, Junbo (Department of Mechanical System Engineering, Jeonbuk National University)
Kim, Daesuk (Department of Mechanical System Engineering, Jeonbuk National University)
Publication Information
Journal of the Semiconductor & Display Technology / v.20, no.3, 2021 , pp. 178-183 More about this Journal
Abstract
This paper describes a dynamic spectroscopic ellipsometry based on dual-wavelength calibration. DSE provides ellipsometric parameters at rates above 20 Hz, but the interferometer's sensitivity to temperature makes it difficult for that proposed system to maintain stable 𝜟k over long periods of time. To solve this problem, we set up an additional path in the DSE to perform simulations of the polarization phase calibration method using dual wavelengths. Through simulation, we were able to eliminate most of the polarization phase error and maintain a stable 𝜟k in the long-term stability experiment for 10 hours. This is the result that the 𝜟k stability of the proposed system is improved tens of times compared to the existing system.
Keywords
Dynamic Spectroscopic Ellipsometer; One-piece Interferometer; Dual-wavelength Calibration;
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