Long-term Stability Optimization of Dynamic Spectroscopic Ellipsometery based on Dual-wavelength Calibration |
Choi, Inho
(Department of Mechanical System Engineering, Jeonbuk National University)
Kheiryzadehkhanghah, Saeid (Department of Mechanical System Engineering, Jeonbuk National University) Choi, Sukhyun (Department of Mechanical System Engineering, Jeonbuk National University) Hwang, Gukhyeon (Department of Mechanical System Engineering, Jeonbuk National University) Shim, Junbo (Department of Mechanical System Engineering, Jeonbuk National University) Kim, Daesuk (Department of Mechanical System Engineering, Jeonbuk National University) |
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