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http://dx.doi.org/10.5757/JKVS.2008.17.2.138

The Optical Properties of SiO2/TiO2/ZrO2 Broadband Anti-reflective Multi-layer Thin Films Prepared by RF-Magnetron Sputtering  

Kang, M.I. (Department of Physics, Kongju National University)
Ryu, J.W. (Department of Physics, Kongju National University)
Kim, K.W. (Chungnam Science High School)
Kim, C.H. (Chungnam Science High School)
Baek, Y.K. (Chungnam Science High School)
Lee, D.H. (Chungnam Science High School)
Lee, S.R. (Chungnam Science High School)
Publication Information
Journal of the Korean Vacuum Society / v.17, no.2, 2008 , pp. 138-147 More about this Journal
Abstract
$SiO_2/TiO_2/ZrO_2$ broadband anti-reflective multi-layer thin films were prepared at room temperature by RF sputtering system. Optical constants and structural properties on each layer of films were analyzed by spectroscopic ellipsometer and transmittance spectra of the films were measured by $UV-V_{is}$ spectrophotometer in the range of 300$\sim$900 nm. To evaluate the films, we compared the measured and analyzed spectra with designed spectra. We investigated influence of discrepancy of thickness and refractive indices of each layer on changes of the transmittance spectra. It was found that refractive indices and shape of dispersion of deposition materials are more contributed to changes of the transmittance spectra than thickness of layer.
Keywords
anti-reflective multi-layer; spectroscopic ellipsometry; RF sputtering; Sellmeier; Tauc-Lorentz;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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