• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.11
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• pp.715-720
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• 2015

The photoinduced hydrophilicity of $TiO_2/WO_3$ double layer films was fabricated by using a conventional rf-magnetron sputtering method. The photoinduced hydrophilic reaction of the $TiO_2$ surface was enhanced by the presence of $WO_3$ under the $TiO_2$ layer by irradiation of a 10 W cylindrical fluorescent light bulb. However, when the $TiO_2$ and $WO_3$ layers were separated by an insulating layer, the surface did not appeared high hydrophilic, under the same light bulb. The enhanced photoinduced hydrophilic reaction can be explained by the charge transfer between $TiO_2$ and $WO_3$ layers. It was also demonstrated that visible light passing through the $TiO_2$ layer could excite $WO_3$. Thus, visible light can be used for the hydrophilic reaction in the present $TiO_2/WO_3$ system.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.89-89
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• 2017

가속기 기술을 이용한 재료에의 표면처리기술은 일정에너지를 가지는 이온이 재료표면에 충돌함으로서, 스퍼터링, 이온주입, 미세구조 변화 등의 현상을 이용하여 재료표면의 특성을 변화시켜 기계적, 화학적, 광학적, 전기적 특성 등을 변화시키는 표면개질기술에 활용되어져 왔다. 이러한 이온빔 표면처리기술은 이온의 종류나 시편의 제한 없이 치밀한 원자혼합물을 형성하고, 계면형성이 없고, 또한 저온공정이 가능하므로, 정밀도가 요구되는 부품의 내마모성과 내부식성 등을 포함한 기본적인 표면특성 뿐만 아니라 전기전도도, 친소수특성, 내광성 등 표면에 관계된 특성을 개선시키는 역할을 하며, 이온빔 믹싱, 이온빔 스퍼터링, 이온빔 전처리 후 코팅 등의 복합공정을 통해 보다 개선된 표면특성을 가지는 박막제조공정에 적용될 수 있다. 본 발표에서는 지난 10년간 가속기기술을 응용한 이온빔 장치기술 개발현황을 발표하고, 이러한 장치를 활용하여 이온빔 표면처리기술 사례인 내광성/내스크래치성 향상 고분자, 정전기방지, 초친수 표면처리, 기체투과도제어, 자외선차단 필름, 고속에칭기술 등의 기술개발 현황을 발표하고자 한다. 한국원자력연구원 양성자가속기연구센터에서는 수백 keV급의 이온빔 표면처리 장치 이외에도 100MeV 선형 양성자가속기를 이용하여 2013년부터 다양한 분야의 양성자빔/이온빔 이용자들에게 이온빔 장치와 20MeV와 100MeV 이용시설에서 양성자빔/이온빔 서비스를 제공하고 있다. 2016년 기준 이용자수는 양성자가속기 392명, 이온빔장치 279명이며, 이용자 수행과제는 양성자가속기, 이온빔장치 각각 130여개 과제가 수행되었다. 이러한 이용자들의 빔이용연구를 통해 20여편의 논문투고, 10여편의 특허출원의 성과를 얻었으며, 나노분야, 생명공학분야 등의 다양한 분야에서의 빔이용기술을 통해 활발한 연구가 이루어질 것으로 예상된다.

• Journal of the Microelectronics and Packaging Society
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• v.4 no.1
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• pp.19-30
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• 1997

고분자 Polyimide (PI) film 표면을 반응성 가스 분위기에서 1KeV의 에너지를 가지 는 여러 종류의 이온빔으로 조사하여 표면을 개질하였다. PI표면의 친수성과 표면에너지를 측정하기 위해 접촉각 측정기를 사용하였으며 개질 된 표면의 화학적 변화를 측정하기 위해 X-ray photoelectron spectroscopy (XPS)를 사용하였다. 표면 개질을 위한 이온조사량은 5 $\times$1014 -1$\times$1017 ions/cm2이며 반응가스는 0-8scm까지 변화시켰다. 아르곤 이온빔으로 표면 개질시에는 67。에서 40。까지 감소하였고 표면에너지는 46 dyne/cm에서 64dyne/cm까지 증가하였다. 산소를 6sccm 주입하면서 산소 이온빔으로 표면 개질시 물과의 접촉각은 67。 에서 최대 12。까지 감소하였으며 표면에너지는 46dyne/cm에서 72dyne/cm까지 증가하였고 이때의 이온조사량은 5$\times$1014 -1$\times$1017 ions/cm2 이였다. 여러 종류의 반응성 가스와 이온을 사용하여 개질하여 본 결과 산소분위기에서 산소 이온을 이용하여 개질 하였을 때 접촉각이 8。인 표면을 얻을수 있었다, 산소분위기에서 아르곤 이온빔으로 1$\times$1017 ions/cm2 의 이온 조사량으로 개질 된 Pi 시료를 대기 중에 보관하였을 때에는 110시간 후 65。로 증가하였고 물속에서 보관하였을 때에는 46。로 증가하였다. 그러나 산소 이온빔에 산소분위기에서 개 질 된 시료의 경우 물속에 보관할 경우 접촉강의 증가없이 일정한 값을 나타내었다. 이온조 사로 개질된 시료의 화학적 변화를 확인하기 위하여 XPS 사용하였다. 표면 개질 전의 PI 시료와 산소 분위기에서 1$\times$1017 ions/cm2의 아르곤 이온빔으로 개질한 XPS peak 결과로 보아 Cls의 spectra를 보면 C-C, C-N 그리고 C=O의 결합들은 intensity가 감소하였고 C-O 의 intensity는 증가하였다. Nls peak로 보아 imide N 성분은 이온빔의 조사로 인하여 감소 하였고 C-O의 intensity는 증가하였다. Nls peakk로 보아 imide N성분은 이온빔의조사로 감소하였고 Ols peak로 보아 C-O는 증가하였고 C=O는 약간의 감소가 나타났다. 또한 이온 보조 반응법을 이용하여 처리한 시료의 경우 접착력이 증가하는데 이는 주로 C-O 결합의 산소와 Cu와의 상호작요에 의한 것임을 알수 있었다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.8
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• pp.516-521
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• 2014

An excellent hydrophobic surface has a high contact angle over 147 degree and the contact angle hysteresis below $5^0$ was produced by using roughness combined with hydrophobic PTFE coatings, which were also confirmed to exhibit an extreme adhesion to glass substrate. To form the rough surface, the glass was etched by Ar-plasma. A very thin PTFE film was coated on the plasma etched glass surface. Roughness factors before or after PTFE coating on the plasma etched glass surface, based on Wensel's model were calculated, which agrees well with the dependence of the contact angle on the roughness factor is predicted by Wensel's model. The PTFE films deposited on glass by using a conventional rf-magnetron sputtering. The glass substrates were etched Ar-plasma prior to the deposition of PTFE. Their hydrophobicities are investigated for application as a anti-fouling coating layer on the screen of displays. It is found that the hydrophobicity of PTFE films mainly depends on the sputtering conditions, such as rf-power, Ar gas content introduced during deposition. These conditions are closely related to the deposition rate or thickness of PTFE film. Thus, it is also found that the deposition rate or the film thickness affects sensitively the geometrical morphology formed on surface of the rf-sputtered PTFE films. In particular, 1,950-nm-thick PTFE films deposited for 30 minute by rf-power 50 watt under Ar gas content of 20 sccm shows a very excellent optical transmittance and a good anti-fouling property and a good durability.

• Journal of the Korean institute of surface engineering
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• v.50 no.5
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• pp.345-351
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• 2017

A double-layered anti-reflective coating with hydrophilic/abrasion-resistant properties was studied using anatase titanium dioxide($TiO_2$) and silicon oxycarbide($SiO_xC_y$) thin film. $TiO_2$ and $SiO_xC_y$ thin films were sequentially deposited on a glass substrate by DC sputtering and PECVD, respectively. The optical properties were measured by UV-Vis-NIR spectrophotometer. The abrasion-resistance and the hydrophilicity were observed by a taber abrasion tester and a contact angle analyzer, respectively. The $TiO_2/SiO_xC_y$ double-layer thin film had an average transmittance of 91.3%, which was improved by 10% in the visible light region (400 to 800 nm) than that of the $TiO_2$ single-layer thin film. The contact angle of $TiO_2/SiO_xC_y$ film was $6.9^{\circ}$ right after UV exposure. After 9 days from the exposure, the contact angle was $10.2^{\circ}$, which was $33^{\circ}$ lower than that of the $TiO_2$ single-layer film. By the abrasion test, $SiO_xC_y$ film showed a superior abrasion-resistance to the $TiO_2$ film. Consequently, the $TiO_2/SiO_xC_y$ double-layer film has achieved superior anti-reflection, hydrophilicity, and abrasion resistance over the $TiO_2$ or $SiO_xC_y$ single-layer film.

• Elastomers and Composites
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• v.39 no.4
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• pp.301-308
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• 2004

Three types of parylene (PA-N, PA-C, PA-D) were used for coating the surface on natural latex rubbers in order to improve surface characteristics including mechanical properties and biocompatibility. The parylene coating was the CVD (chemical vapor deposition) method, and the surface properties of the modified latex were measured. Annealing effects on the mechanical properties of the coated latex were also investigated. The adhesion between latex and parylene was good for all the types of parylene used. As annealing temperature was increased, latex modified with PA-N became more hydrophobic, while the latex treated with PA-C and PA-D became more hydrophilic. As the annealing temperature was raised, the tensile strength was increased, and the elongation was decreased. The biocompatibility was noticeably improved on the latex surface modified with the parylenes through CVD method.

• Korean Chemical Engineering Research
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• v.50 no.5
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• pp.929-932
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• 2012

Novel platform technology has been developed to replace the photolithography used currently for manufacturing semiconductors and display devices. As a substrate, plastics, especially polycarbonates, have been considered for future application such as flexible display. Other plastics, i.e. polyimide, polyetheretherketon, and polyethersulfone developed for the substrate at this moment, are available for photolithography due to their high glass transition temperature, instead of high price. After thin polystyrene film was coated on the polycarbonate substrate, microstructure of the film was formed with polydimethylsiloxane template over the glass transition temperature of the polystyrene. The surface of the structure was treated with potassium permanganate and octadecyltrimethoxysilane so that the surface became hydrophobic. After this surface treatment, the nanoparticles dispersed in aqueous solution were aligned in the structure followed by evaporation of the DI water. Without the treatment, the nanoparticles were placed on the undesired region of the structure. Therefore, the interfacial interaction was also utilized for the nanoparticle alignment. The surface was analyzed using X-ray photoelectron spectrometer. The evaporation of the solvent occurred after several drops of the solution where the hydrophilic nanoparticles were dispersed. During the evaporation, the alignment was precisely guided by the physical structure and the interfacial interaction. The alignment was applied to the electric device.

• Membrane Journal
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• v.21 no.2
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• pp.193-200
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• 2011

An amphiphilic graft copolymer comprising a poly(vinyl chloride) (PVC) backbone and poly (styrene sulfonic acid) (PSSA) side chains (PVC-g-PSSA) was synthesized via atom transfer radical polymerization (ATRP). Mesoporous titanium dioxide $(TiO_2)$ films with crystalline anatase phase were synthesized via a sol-gel process by templating PVC-g-PSSA graft copolymer. Titanium isopropoxide (TTIP), a $TiO_2$ precursor was selectively incorporated into the hydrophilic PSSA domains of the graft copolymer and grew to form mesoporous $TiO_2$ films, as confirmed by scanning electron microscopy (SEM) and X-ray diffraction (XRD) analysis. The performances of dye-sensitized solar cell (DSSC) were systematically investigated by varying spin coating times and the amounts of P25 nanoparticies. The energy conversion efficiency reached up to 2.7% at 100 mW/$cm^2$ upon using quasi-solid-state polymer electrolyte.

• Journal of the Korean Vacuum Society
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• v.7 no.3
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• pp.221-228
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• 1998

Enhancement of adhesion between polymer films and metal films are obtained by forming the hydrophilic functional groups on the polymer surfaces by ion assisted reaction which uses ion beam in reactive gas environments. In ion assisted reaction, ion dose, blown gas flow rate and ion energy were changed from $5\times 10^{14}$ to $1\times 10^{17}\textrm{ions/cm}^2$, from 0 to 8 sccm, and 0.3 to 1.2 kV, respectively. Wetting angle of water on polymer films modified by $ Ar^+$ ion without blowing oxygen decreases to ~$40^{\circ}$. Contact angle of water on polymer films modified by $ Ar^+$ ion with blowing oxygen decreases to ~$20^{\circ}$, and the surface free energy increases to ~70 dyne/$\textrm{cm}^2$. However, contact angle of water on polytetraflouroethylene (PTFE) modified by ion assisted reaction increases with ion dose. The adhesion strength of metal film deposited on the polymer surface was investigated. In the case of the metal film deposited on the untreated polymers, the metal films are detached from the polymer surface. While, In the case of the metal film deposited on the polymers treated by ion assisted reaction, the metal films are strongly adhere to the polymer surfaces.