Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Anti-Reflective Coating with Hydrophilic/Abraion-Resistant Properties using TiO2/SiOxCy Double-Layer Thin Film

TiO2/SiOxCy 이중 박막을 이용한 투명 친수성/내마모성 반사방지 코팅

  • Lee, Sung-jun (Department of Advanced Green Energy and Enviornment) ;
  • Lee, Min-kyo (Department of Information Technology, Handong Global University) ;
  • Park, Young-chun (Department of Advanced Green Energy and Enviornment)
  • 이성준 (한동대학교 첨단그린에너지환경학과) ;
  • 이민교 (한동대학교 정보통신공학과) ;
  • 박영춘 (한동대학교 첨단그린에너지환경학과)
  • Received : 2017.10.10
  • Accepted : 2017.10.19
  • Published : 2017.10.31
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Abstract

A double-layered anti-reflective coating with hydrophilic/abrasion-resistant properties was studied using anatase titanium dioxide($TiO_2$) and silicon oxycarbide($SiO_xC_y$) thin film. $TiO_2$ and $SiO_xC_y$ thin films were sequentially deposited on a glass substrate by DC sputtering and PECVD, respectively. The optical properties were measured by UV-Vis-NIR spectrophotometer. The abrasion-resistance and the hydrophilicity were observed by a taber abrasion tester and a contact angle analyzer, respectively. The $TiO_2/SiO_xC_y$ double-layer thin film had an average transmittance of 91.3%, which was improved by 10% in the visible light region (400 to 800 nm) than that of the $TiO_2$ single-layer thin film. The contact angle of $TiO_2/SiO_xC_y$ film was $6.9^{\circ}$ right after UV exposure. After 9 days from the exposure, the contact angle was $10.2^{\circ}$, which was $33^{\circ}$ lower than that of the $TiO_2$ single-layer film. By the abrasion test, $SiO_xC_y$ film showed a superior abrasion-resistance to the $TiO_2$ film. Consequently, the $TiO_2/SiO_xC_y$ double-layer film has achieved superior anti-reflection, hydrophilicity, and abrasion resistance over the $TiO_2$ or $SiO_xC_y$ single-layer film.

Keywords

References

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