• Title/Summary/Keyword: 측정값

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공정 플라즈마에서 실시간 유전박막두께 측정법의 보상연구

  • Lee, Yeong-Ho;Choe, Ik-Jin;Kim, Yu-Sin;Jang, Seong-Ho;Jeong, Jin-Uk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.442-442
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    • 2010
  • 공정 플라즈마 장치에서 이중 주파수법을 이용하여 실시간 유전박막 두께 측정법에 대한 보상연구를 하였다. 이중 주파수법은 유전박막과 플라즈마 쉬스를 간단한 전기적인 등가회로로 모델링하여 유전박막의 두께를 측정하는 방법이다. 이중 주파수법의 문제는 측정탐침의 인가전압에 따른 유전박막의 두께 측정치가 다르다는 점이다. 플라즈마 쉬스를 선형 저항만으로 등가하였기 때문에, 쉬스의 인가전압에 상관없이 쉬스 저항의 값이 일정하다는 가정이 존재한다. 그러나 쉬스 저항은 쉬스의 인가전압에 종속적이면서 비선형적인 특성을 갖는다. 측정 탐침에 출력 전압이 인가될 때 쉬스 양단에서 인가전압에 따른 쉬스의 등가저항의 비선형성을 고려하여 측정 탐침에 증착된 유전박막의 커패시턴스성분에 대한 방정식을 Numerical analysis로 풀어 유전박막의 두께 측정값을 보상하였다. 보상된 위의 방법으로 다양한 RF파워, 압력에 따라 $Al_2O_3$박막의 두께를 실시간으로 측정하여 비교하였다. 그 결과 이 방법은 낮은 플라즈마 밀도(${\sim}10^9cm^{-3}$)에서도 인가전압에 따른 유전 박막두께측정의 오차를 줄일 수 있었다.

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Bayesian Analysis for Uncertainty of Radiocarbon Dating (방사성탄소연대측정법의 불확실성에 대한 베이지안 분석)

  • Lee, Youngseon;Lee, Jaeyong;Kim, Jangsuk
    • The Korean Journal of Applied Statistics
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    • v.28 no.3
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    • pp.371-383
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    • 2015
  • Use of radiocarbon dating is increasing for chronology; however, its variability and discrepancy with existing chronologies can cause doubts in regards to credibility. In this paper, we explore factors that influence radiocarbon dating variabilities. We obtained estimated radiocarbon ages by sending identical samples to several labs multiple times. A Bayesian method was used to analyze the obtained data. From the analysis, we conclude that some factors (such as type of labs and megasamples) can induce variability when estimating radiocarbon age. We identify the size of variability caused by each factor and analyze the estimated variability in each lab corresponds with the reported variability.

Exophthalmometric values using White-light Scanning Interferometer (백색광 간섭계를 이용한 안구 돌출 값 측정)

  • Chang, Jung-soo;Kim, Young-kil
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.21 no.12
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    • pp.2341-2346
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    • 2017
  • The relative position of the eyeballs in the orbit can be a criterion for estimating multiple pathological conditions. Especially, it is useful to diagnose orbital fracture, thyroid eye disease, orbital tumor, and to evaluate the result of drug and surgical treatment. The Hertel and Naugle exophthalmometer, which are the most commonly used measuring instruments for measuring the prominence of the eye, are different from each other. Even if the same examiner repeatedly measures, it is inevitable. Also, even if the same exophthalmometer is different from the manufacturing company, the design of the fixed part of the orbit is different, and a measurement error is caused by the inspectors. In this paper, we propose a method of automatic measurement that can increase the accuracy and repeatability of measurement of exophthalmos using white light scanning interferometer, which is a 3D image measurement technique.

Comparison of Swirl Ratio Measured by Impulse Swirl Meter and Particle Image Velocimetry in a Steady Flow Bench of SI Engine (SI 엔진의 정상유동장치에서 충격식 스월미터와 입자영상유속계의 스월비 측정에 대한 비교 연구)

  • Lee, Sukjong;Ohm, In Yong;Sung, Jaeyong
    • Journal of Advanced Marine Engineering and Technology
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    • v.39 no.4
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    • pp.437-442
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    • 2015
  • The swirl ratio in a SI engine is investigated in a steady flow bench according to the measurement methods: an impulse swirl meter and particle image velocimetry (PIV). When measuring the swirl ratio using the PIV, the torque is evaluated based on the cylinder center and swirl center, respectively. The position of the measurement plane is considered. As a result, in the upstream, the swirl ratio measured by the impulse swirl meter is estimated to be larger than that from the PIV measurements due to the unstable vortex motions. Regarding the PIV measurements, the swirl ratio based on the cylinder center has been found to be lower than that based on the swirl center. On the other hand, the difference in swirl ratio has decreased smaller as the measurement plane moved downstream due to the stabilization of the vortex motion.

Change of PAE according to Detector Measurement Method (검출기 측정방법에 따른 PAE값의 변화)

  • Im, In-Chul
    • The Journal of the Korea Contents Association
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    • v.10 no.6
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    • pp.307-311
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    • 2010
  • The aim of this study is to investigate PAE, as the result of the test of kVp accuracy, according to detector measurement method. Based on the indicated value of 70kVp, each distance between a focus and a kVp meter was 100cm, 80cm and 60cm and the angle of X-ray tube was set on $5^{\circ},\;10^{\circ},\;15^{\circ},\;20^{\circ},\;25^{\circ},\;30^{\circ}$. Each indicated value, 60kVp, 70kVp, 80kVp, 90kVp and 100 kVp, was used compare Small focus with Large focus. As a result, PAE on the side of cathode was higher than it on the side of anode in the case of 100cm and PAE on the side of anode was higher in the case of 80cm and 60cm. The coefficient rate was stable both the side of cathode and anode in the case of 100cm and it was fluctuated in the case of 80cm and 60cm. PAE in the case of Small focus was higher than Large focus and it was disproportionate to an indicated value. Error rate was in inverse proportion to the indicated value.

Measurement and Analysis of Electric and Magnetic Fields near 345[kV] Transmission Tower (345[kV] 송전철탑 주변에서 전장과 자장의 측정과 분석)

  • 이복희;이승칠;안창환;길형준;전덕규;길경석
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.12 no.3
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    • pp.14-21
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    • 1998
  • In this paper, the measurements of ELF electric and magnetic fields due to double circuit 345[kV} transmission lines are made using planar-type electric field sensor and multitum loop-type magnetic field sensor, and the magnitudes of electric and magnetic fields are illustrated by a three-dimensional plot. Also, in order to predict the magnetic field strength with lad variation, a typical daily load current curves of the transmission lines are displayed because the magnetic field is changed with load current. experimental results of ELF electric and magnetic fields along center line versus lateral distance are compared with the theoretical values computed by using the FIELDS program. The electric field intensity in and around a transmission tower is lowered, and the greatest point of the magnetic field is shifted to the heavy load line but generally is given the trend that the peak value appear at the central part of the transmission tower. The magnitudes of the maximum electric and magnetic fields in the vicinity of a transmission tower are less than 3.5[kV/m] and $20[{\mu}T]$, respectively. The measured electric and magnetic fields are satisfied with limits and guidelines recommended by various authorized international institutes.

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Measurement of ECF for $CaSO_4:Dy$ Thermoluminescent Dosimeters ($CaSO_4:Dy$ 열형광선량계의 소자보정인자(ECF) 산출)

  • Lim, Kil-Sung;Kim, Jang-Lyul
    • Journal of Radiation Protection and Research
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    • v.30 no.4
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    • pp.231-236
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    • 2005
  • Dosimeters are manufactured from same process in the manufacturer but the deviation of TL raw counts exists among the dosimeters. TL raw counts are also gradually degrade due to multiple readings and physical abuse. ECF (Element Correction Factor) correct the degradation and deviation of TL raw counts to the average TL raw counts of reference dosimeters. Procedures for producing ECF of thermoluminescent dosimeters were described In detail. ECFs of 319 reference, control and field dosimeters were measured three times and average of three ECF values was calculated. Also, % CV(Coefficient of Variation) of three ECF values was calculated to verify ECF. ECF & % CV distributions for the field and control dosimeters are presented. TL raw counts of field dosimeters, being used about 6 times for the past 3 years, were almost unchanged, but those of control dosimeters being used more frequently, were degraded about 4.7 %.

Review of International Research Cooperation Results for Intercomparison of Luminescence Dating (루미네선스 연대측정 상호비교를 위한 국제공동연구 결과 고찰)

  • Jin Cheul Kim
    • The Korean Journal of Quaternary Research
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    • v.34 no.1
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    • pp.31-40
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    • 2024
  • The Risø Research Institute in Denmark conducted the luminescence dating intercomparison project, which derives equivalent dose, annual dose, and absolute age results for each laboratory from the same sample, and compares the results between laboratories. This project was carried out from 2006 to 2012. In this project, 30 international laboratories worldwide participated, including the luminescence laboratory at the Korea Institute of Geoscience and Mineral Resources (KIGAM). As a result of the project's synthesis, the average value of the results generally shows an over-dispersion value between laboratories of about 13%. The equivalent dose value obtained through the provided quartz analyzed in KIGAM shows results almost identical to the final equivalent dose value of the project. On the other hand, the equivalent dose value obtained from self-extracted quartz analyzed in KIGAM shows a difference of about 0.9 Gy from the final result of the project, which is thought to be due to the difference in particle size of the separated quartz. This international joint research project is the first large-scale international joint study related to luminescence dating and is expected to have contributed to the reliability and use of luminescence dating internationally.

Principle Measurement for Sheet Resistance of Large Size Conductive Thin Films (대면적 전도성 박막의 면저항 정밀측정)

  • Kang, Jeon Hong;Yu, Kwang Min;Lee, Sang Hwa
    • Proceedings of the KIEE Conference
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    • 2015.07a
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    • pp.1515-1516
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    • 2015
  • Touch panel 및 Touch screen 등의 투명전극으로 많이 사용되고 있는 ITO(Indium Tin Oxide)나 CNT(Carbon Nano Tube) 등 전도성 박막의 면저항을 쉽고 빠르게 측정하기 위하여 van der Pauw method를 이용한 면저항 측정기를 개발하였다. 이 면저항 측정기는 대면적 시료의 면저항을 측정 할 수 있어 매우 편리하다. 면저항 측정은 주로 Four Point Probe method로 측정하는 것이 일반적이나 본 연구에서는 van der Pauw method를 이용한 측정값과 Four Point Probe method로 측정한 결과를 비교한 결과 1 % 이내에서 일치하였다. 개발된 측정기의 측정 정확도는 지시값의 1.0 % 이하이고, 측정범위는 $2{\Omega}/{\square}{\sim} 5k{\Omega}/{\square}$이다.

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Implementation of Automatic measurement system for a Change of channel etching thickness with a HTS Transistor (고온 초전도 트랜지스터의 채널 식각 두께에 따른 임계 특성 자동 측정장치 구축)

  • Hyun, Ong-Ok;Kang, Hyeong-Gon;Ko, Seok-Cheol;Han, Byoung-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.561-564
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    • 2003
  • 본 연구는 고온 초전도 자속 흐름 트랜지스터의 채널 식각 두께에 따른 임계 특성의 자동 측정을 위해 나노옴/마이크로 볼트 미터 와 전원공급기 등 측정에 필요한 장비들을 GPIB 인터페이스 보드를 통해 PC와 연결하여 측정 장치를 구축후 직접 제작한 측정 프로그램을 통해 자동으로 시편에 전류, 전압을 가한후 임계 특성값을 효율적인 방법으로 측정하고 측정 결과값들을 시간순서 및 측정 대상에 따라 데이터 베이스화 하는 방법에 대하여 소개한다. 부수적으로 임계 특성의 정확한 측정을 위해 실험에 변수가 되는 요소들을 찾아내고 실험 데이터값들로부터 오차를 발견, 오차의 원인이 되는 식각 방법 및 실험 환경등의 부가적인 요소들을 고려하여 개선된 측정 장치를 구축하는데 경제적, 시간적인 효율성 측면에 대해 언급했다.

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