• 대한기계학회논문집A
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• 제25권11호
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• pp.1863-1872
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• 2001

In this Paper, we suggest the precision stage using a novel non-contact planar actuator that utilizes an interaction between an array type of air-core solenoids and permanent magnets. The former with axes arranged in the mutually orthogonal direction is fixed on the stator and the latter with the same polar direction is attached below the stage. The promising magnetic structure has little uncertainty such as hysteresis loss caused by ferromagnetic material, then it is simple to quantify the magnetic phenomenon. And all the magnetic forces are transmitted through narrow air-gap between the coil and the permanent magnet, therefore the structure can be highly compacted. Furthermore, the stage or plate can be perfectly isolated from the stator without any wire connection, leading to diminish the generating possibility of wear particles due to mechanical contact. Then. it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness. or general-purpose nano stage. The main issues rebated to the plate driving are discussed here.

• 한국정밀공학회지
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• 제29권2호
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• pp.161-169
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• 2012

Recently, a study for the functional surface production of super hydrophobic of natural and biomimetic artificial has attracted much attention. To make process methods of super hydrophobic surface has a variety of ways such as lithography, etching, and laser ablation. However, we were used ultra-shot pulse laser ablation process which has the virtue of more environmental friendliness and simple process. In this paper, we were fabricated a multiplicity of super hydrophobic patterns on mold surface(NAK80) using by optimizing the laser processing conditions and it was transferred on PDMS. Also, we measured contact angle super hydrophobic patterns on PDMS. The result showed there is no patterns on PDMS were measured 94 degrees, by contrast, optimized super hydrophobic patterns on PDMS was 157 degrees. Therefore we fabricated super hydrophobic surface on mold. Based on these experimental results, it is possible to mass production using ultra shot pulse laser ablation of super hydrophobic pattern and to be applied for a variety of industries.

• 한국정밀공학회지
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• 제26권6호
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• pp.42-49
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• 2009

The optical elements made of plastics are normally produced by mass production such as injection molding with use of precision dies and molds. It costs to prepare the dies and molds, and it is only justified to prepare such expensive dies and molds when the parts are massively produced. On the other hand, it is too expensive and inefficient when precision plastic parts are needed only in small quantities, such as a case of trial manufacturing of new products. An ultra-precision diamond cutting is one of promising processes to produce the precision plastic parts in such cases. But it is commonly believed that an ultra-precision cutting of plastics for optical components is very difficult, because they are thermo-plastic material. In the present research, an ultra-precision diamond cutting of polycarbonate (PC), that is one of typical optical materials, was tried by using elliptical vibration cutting method. It is experimentally proved that good optical surfaces were obtained by using elliptical vibration cutting in cases of grooving and flat surfaces. The maximum surface roughness of less than 60 nm in peak to valley value is acquired.

• 한국정밀공학회지
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• 제30권4호
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• pp.403-408
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• 2013

In this paper, the characteristics of ablation processing of the eagle glass by pico-second laser are investigated. The laser ablation is used to process micro forms on materials. The ablation causes little thermal effect and little burr on the surface of eagle glass. In order to examine the characteristics of panic cracks, experiments are conducted under various cutting conditions such as a frequency of 600 kHz, laser powers, scan speeds and number of scan(NS). To minimize the panic cracks, the specimens are heated at $30^{\circ}C$, $45^{\circ}C$, and $60^{\circ}C$ for ten minutes respectively and then they are broken by hands. Laser powers, NS and scan speeds have an effect on glass cutting results. The ablation depths increase with an increase in the laser power and NS whereas the panic cracks decrease with an increase in scan speed. The high temperature on processed specimens reduces the panic cracks and makes good results of laser cutting. The optimal condition for eagle glass laser cutting is found to be at 30 W of laser power, 3 mm/s of scan speed and 500 of NS, respectively.

• 한국정밀공학회지
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• 제27권10호
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• pp.23-28
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• 2010

Resistance trimming and cutting processes of printed circuit board by making use of high power UV laser with nano-second pulse width have been proposed and investigated experimentally. Also laser-based application system with high flexibility and complex has been designed and adopted power controller, auto beam size control, auto-focusing and control program developed for ourselves. The function of each module shows that they can be reliable for industrial equipments. Resistance trimming method used a plunge and double cut process with $20{\mu}m$ spot size beam. Results show that double cut process is more effective to control resistance trimming in precision than plunge cut process.

• 한국정밀공학회지
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• 제27권2호
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• pp.20-24
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• 2010

High speed cutting processes of rigid flexible printed circuit board by making use of high power UV laser with nano-second pulse width have been proposed and investigated experimentally. Also robust laser cutting system has been designed and developed in order to obtain a good cutting quality of rigid and flexible PCB with multi-layers (2-6 layers). Power controller module developed for ourselves is adapted to control the laser output power in the range less than 1%. The systems show the good performance of cutting speed, cutting width and cutting accuracy, respectively. Especially we have confirmed that the short circuit problem due to the carbonized contamination occurred in cross section of multi-layers by thermal effect of high power laser has been improved largely by using multi-pass cutting process with low power and high speed.

• 자원환경지질
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• 제35권5호
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• pp.437-444
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• 2002

한반도에 위치한 5곳의 정밀 지자기 관측소에서 수집된 자료를 이용하여 지자기 수직탐사를 수행하였다. 측정된 지자기 자료는 0.01 nT의 정밀도를 가지며, 1초 혹은 5초 간격으로 측정되었고 이번 해석을 위해 16일 분량의 자료를 이용하였다. 지자기 수직 탐사는 그 특성 상 주변에 해양이 존재할 경우 그에 의한 영향이 매우 크지만, 본 연구를 위해 관측자료를 처리한 결과, 인근 해안에 의한 효과보다는 심부의 전기적 구조에 의한 효과를 많이 반영하였다. 자료 해석 결과, 전기 전도체의 방향을 표시하는 유도 표시자(induction arrow)는 한반도의 대표적 지구조를 가리켰으며, 이를 통해 한반도의 심부 구조를 지전기학적으로 이해할 수 있는 증거를 확보할 수 있었다.

• 한국기계가공학회지
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• 제17권1호
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• pp.63-68
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• 2018

At present, ultra-precision cutting technology has been studied in Korean research institutes, focusing on development of ultra-precision cutting tool technology and ultra-precision control engineering. However, the developed technologies are still far behind advanced countries. It focuses on metals including aluminum, copper and nickel, and nonmetals including plastics, silicone and germanium which require high precision while using a lathe. It is hard to implement high precision by grinding the aforementioned materials. To address the issue, the ultra-precision cutting technology has been developing by using ultra-precision machine tools very accurate and strong, and diamond tools highly abrasion-resistant. To address this issue, this study aims to conduct ultra-precision cutting by using ECTS (Error Compensation Tool Servo) to improve motion precision of elements and components, and compensate for motion errors in real time. An IR camera is used for analyzing cutting accuracy differences depending on the heat generated in diamond tools in cutting to examine the heat generated in cutting to study cutting accuracy depending on generated heat.

• 한국공작기계학회논문집
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• 제17권4호
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• pp.51-58
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• 2008

This paper presents a new design of the precision stage for the reticle in lithography process and a low hunting control method for the stage. The stage has three axes for X, Y, ${\theta}_z$ those actuated by three voice coil motors individually. The designed reticle stage system has three gap sensors and voice coil motors, and supported by four air bearings and the forward/inverse kinematics of the stage were solved to get an accurate reference position. When a stage is in regulating control mode, there always exist small fluctuations(stage hunting) in the stage movement. Because the low stage hunting characteristic is very important in recent lithography and nano-level applications, a special regulating controller for ultra low hunting is proposed in this paper. Also this research proposed the 2-step transmission system for preventing the noise infection from environmental devices. The experimental results showed the proposed regulating control system reduced hunting noise as 35nm(rms) when a conventional PID generates 77nm(rms) in the same mechanical system. Besides the reticle stage has 100nm linear accuracy and $1{\mu}rad$ rotation accuracy at the control frequency of 8kHz.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
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• 한국우주과학회 2010년도 한국우주과학회보 제19권1호
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• pp.29.2-29.2
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• 2010

항법분야에 있어서 위성항법시스템의 다양한 오차를 제거한 정밀한 위치 정보를 이용하여 이동체에 활용하는 연구가 진행되고 있다. 실제 환경에서 이동체를 이용한 항법실험을 수행하기 전 실제 환경과 유사한 가상의 실시간 테스트베드를 구축하여 알고리즘 테스트 및 검증 실험을 수행하려 한다. 이를 위해 이동체의 운동을 시뮬레이션하는 운동궤적제어시스템과 실제의 항법신호를 시뮬레이션하는 GNSS 시뮬레이터 사이의 시각동기화는 실시간 시뮬레이션을 구현하기 위해 필수적으로 요구된다. 동기화 되지 않은 시각정보는 이동체 운동궤적제어시스템에 의해 생성된 실제의 궤적과 GNSS 시물레이터로부터 생성된 궤적사이의 오차를 유발하여 항법수신기의 부정확한 항법신호를 유발한다. 이 연구는 GNSS 시뮬레이터를 이용한 실시간 테스트베드의 구축에 있어 필요한 이동체 운동궤적의 시각동기화 기술 개발을 목표로 한다. GNSS 시뮬레이터는 Spirent 사의 GPS 시뮬레이터가 사용되었다. 이동체의 위치, 속도, 가속도와 같은 움직임을 나타내는 운동에 관한 명령은 적용되어야 하는 정확한 시각이 함께 전송되므로, 이는 그 시각 이전에 GPS 시뮬레이터에 도달해야 한다. 따라서 1초(1 Hz) 또는 0.1초(10 Hz) 사이에 원격제어시스템과 GPS 시뮬레이터사이의 시각 동기화를 구현하였다. 시뮬레이터와의 시각정보 동기화를 위해 Amplicon사의 PCI-215 타이머카드를 이용하였고, 그 결과, 이동체 운동궤적제어시스템과 시뮬레이터의 시각정보를 $10^{-3}$ 내의 위치오차를 가지는 정밀도로 동기화됨을 확인할 수 있었다.