• Journal of the Korean Society for Precision Engineering
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• v.19 no.10
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• pp.60-65
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• 2002

For optimal design of micro stage, we measured the displacement of piezoelectric transducer that was based on voltage value. And the micro stage was analyzed using FEM with displacement data including voltage value of piezoelectric transducer. For verification of analysis results, the displacements were measured by using Laser-interferometer. And researchers confirmed to propriety on design of micro stage with FEM, we obtained 3.5% error rate between measurement results and analyzing results.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.543-544
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.671-672
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.800-803
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• 2004

The refractive index of the laser interferometer is compensated using the simultaneously measured variations of room temperature and humidity in the method. In order to investigate the limit of compensation, the stationary test against two fixed reflectors mounted on the zerodur plate is performed firstly. From the experiment, it is confirmed that the measuring error of the laser interferometer can be improved from 0.12$\mu$m to 0.17$\mu$m by the application of the method. Secondly, for the verification of the compensating effect, it is applied to estimate the positioning accuracy of an ultra precision aerostatic stage. Two times of the refractive index compensation are performed to acquire the positioning error of the stage from the initially measured data, that is, to the initially measured positioning error and to the measured positioning error profile after the NC compensation. Although the positioning error of anaerostatic stage cannot be clarified perfectly, it is known that by the compensation method, the measuring error by the laser interferometer can be improved to within 0.15$\mu$m. English here.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.894-897
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• 2004

In this paper, we address a position control scheme for a stage system, which is levitated and driven by electric magnetic actuators. This consists of a levitating object (called platen) with 4 permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion by the vertical and horizontal forces. Dynamic equations of the stage system are derived based on Newton-Euler method and its special Jacobian matrix describing a relation between the Joint velocity and platen velocity is done. There are proposed two control schemes for positioning, which are Cartesian space controller and Joint space controller. The control performance of the Cartesian space controller is better than the Joint space controller in task space trajectory while the Joint space controller is simpler than the Cartesian space controller in controller realization.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.221-225
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• 2001

Recently, high accuracy and high precision are required in various industrial fields that are composed of semiconductor manufacturing apparatus and ultra precision positioning apparatus and information system and so on. The positioning technology is a very important one among them. This technology has been rapidly developed, its field needs for positioning accuracy to high as submicron. It is expected that accuracy with 10 nm in precision working and accuracy with 1 nm in ultra precision working are reached at the beginning of 2000s. Recently, to accomplish this positioning technology, many researches are concerned about it and make efforts it. This paper contain design technology of ultra precision 2-axis(X-Y Delta) stage for materialize to positioning accuracy with submicron, where, Delta stage is design as optimum against load and disturbance. And computer simulation is performed for stability and dynamic characteristic of Delta stage.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.05a
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• pp.150-155
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• 2006

PZT는 높은 분해능을 구현할 수 있는 구동기이지만 그 구동 범위가 협소하다는 단점이 있다. 최근에는 이러한 단점을 극복하기 위한 여러가지 메커니즘들이 제안되고 있다. 본 논문에서는 PZT를 이용하여 넓은 범위의 높은 분해능을 갖는 회전형 스테이지를 개발하였다. 개발되어진 회전형 스테이지는 빔 형태의 예압구조를 이용하였으며 일정한 마찰력을 구현하기 위하여 알루미나와 오닉스를 사용하였다. 대 변위와 미소변위를 동시에 구동하기 위하여 Dual mode control을 적용하였다. 또한 레이지 간섭계를 이용하여 구동기의 최대속도와 분해능을 측정하였으며 Sinsweep를 이용하여 구동기의 주파수 응답을 구하였다.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.2
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• pp.228-233
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• 2009

An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1193-1197
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• 2008

Bridge is Most from stay of Gantry structures part. In compliance with oneself weight of the bridge deflecting, this occurs drops the location precision of the work tool. Also accelerative at the time of gives a serious load to Y axial motors which transfer the bridge damages. The motor with high-speed transfer of location control which is accurate makes disrupt. The malleability of the bridge to maintain consequently and necessary to minimize a weight. This paper the structural FEM interpretations of the stone and the aluminum alloy with the material by which will be used in the bridge and static deflected and a candle precise plane X-Y stage optimal design with character the interpretation result.