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A Study on the Optimal Structural Design using FEM for Micro Stage  

Kim, Jae-Yeol (Dept.of Mechanical Engineering, Chosun University)
Gwak, Lee-Gu (Dept.of Precision Mechanical Engineering, Graduate School of Chosun University)
Han, Jae-Ho (Dept.of Automotive, Songwon College)
Kim, Hang-U (Dept.of Automotive, Songwon College)
Publication Information
Journal of the Korean Society for Precision Engineering / v.19, no.10, 2002 , pp. 60-65 More about this Journal
Abstract
For optimal design of micro stage, we measured the displacement of piezoelectric transducer that was based on voltage value. And the micro stage was analyzed using FEM with displacement data including voltage value of piezoelectric transducer. For verification of analysis results, the displacements were measured by using Laser-interferometer. And researchers confirmed to propriety on design of micro stage with FEM, we obtained 3.5% error rate between measurement results and analyzing results.
Keywords
Piezoelectric transducer; FEM; Micro stage; Ultra Precision; Laser interferometer;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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