A Study on the Optimal Structural Design using FEM for Micro Stage

마이크로 스테이지의 유한요소해석

  • Kim, Jae-Yeol (Dept.of Mechanical Engineering, Chosun University) ;
  • Gwak, Lee-Gu (Dept.of Precision Mechanical Engineering, Graduate School of Chosun University) ;
  • Han, Jae-Ho (Dept.of Automotive, Songwon College) ;
  • Kim, Hang-U (Dept.of Automotive, Songwon College) ;
  • Published : 2002.10.01

Abstract

For optimal design of micro stage, we measured the displacement of piezoelectric transducer that was based on voltage value. And the micro stage was analyzed using FEM with displacement data including voltage value of piezoelectric transducer. For verification of analysis results, the displacements were measured by using Laser-interferometer. And researchers confirmed to propriety on design of micro stage with FEM, we obtained 3.5% error rate between measurement results and analyzing results.

Keywords

References

  1. Simokohbe 외 2 인, 'Control performance of Lead screw Positioning with Intelligent Control Methods,' 日本 精密工學誌 Vol. 64, No. 11, pp. 1627-1632, 1998
  2. Benjamin C. Kuo, 'Automatic Control Systems,' Prentice Hall. Englewood Cliffs. N. J 07632, pp. 689-699, 1994
  3. 이창우, '이중서보를 이용한 초정밀 X-Y 테이블 평면 3 자유도 위치제어,' 박사학위 논문, 한국과학기술원, pp. 28, 1997
  4. H. Nakazawa, 'Principles of Precision Engineering,' Gordon and Breach Science Publishers, pp. 75-82, pp. 140-167, 1994
  5. S. T. Smith and D. G. Chetwynd, 'Foundation of Ultra- Precision Mechanism Design,' Gordon and Breach Science Publishers, pp. 95-128, 1992
  6. Kaiji SATO 외 5 인, 'Performance Evaluation Lead screw Positioning System with Five Kinds og Control Methode(2nd Report),' 日本 精密工學誌 Vol. 63, No. 12, pp. 1759-1763, 1997
  7. 김재열, 윤성훈, 한재호, 곽이구, 김항우, '유한 요소법을 이용한 초정밀 미동스테이지 설계에 관한 연구 (I),' 정밀공학회 춘계발표논문집, 2001
  8. MARC Analysis Research Corporation manual, VOLUME A, VOLUME B, VOLUME C, VOLUME D, 1994
  9. Thomas J.R. Hughes, 'The Finite Element Method,' Prentice-Hall International Editions , pp. 90-91, 1987
  10. D. Keith Bowen, 'Development in Nanotechnology,' Gordon and Breach Science Publishers, pp. 95-129, 1992
  11. 김정용, 이병룡, 안순용, 안경관, '역 히스테리시스 모델을 이용한 압전구동기의 정밀 위치 제어,' 한국정밀공학회 2001 추계학술논문집, pp. 349-352, 2001