• Title/Summary/Keyword: 초음파 분무 열분해법

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Indium Diffusion Effects on the Structural and Electrical Properties of ZnO Films Prepared by Ultrasonic Spray Pyrolysis (초음파 분무 열분해법으로 제조한 ZnO막의 전기적, 구조적 특성에 미치는 인듐 확산 효과)

  • 심대근;배성찬;마대영
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.10
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    • pp.828-834
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    • 2001
  • Zinc oxide (ZnO) films deposited on indium (In) films were post-annealed in a rapid thermal anealing (RTA) system. The ZnO/In films were RTA-treated in air or a vacuum ambient. The crystallographic properties and surface morphologies of the films were studied before and after the RTA by X-ray diffraction(XRD) and scanning electron microscopy (SEM), respectively. The resistivity variation of the films with RTA temperature and time was measured by the 4-point probe method. Auger electron spectroscopy (AES) was carried out to figure out the redistribution of indium atoms in the ZnO films. The resistivity of the ZnO/In films decreased to 2$\times$10$\^$-3/ Ωcm by diffusion of the In. The In diffusion into the ZnO films roughened the surface of ZnO films. The results of depth profile by AES showed a hump of In atoms around ZnO/In interface after the RTA at 800 $\^{C}$. The effects of temperature time and ambient during the RTA on the structural and electrical properties of the ZnO/In films were discussed.

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Growth Mechanism Evolution of ZnO Nanostructures by Leidenfrost Effect in Ultrasonic Spray Pyrolysis Deposition (초음파 분무 열분해법에 의한 ZnO 나노구조 성장시 Leidenfrost 효과에 의한 성장 거동 변화)

  • Han, In Sub;Park, Il-Kyu
    • Korean Journal of Materials Research
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    • v.27 no.11
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    • pp.609-616
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    • 2017
  • We investigated a Leidenfrost effect in the growth of ZnO nanostructures on silicon substrates by ultrasonic-assisted spray pyrolysis deposition(SPD). Structural and optical properties of the ZnO nanostructures grown by varying the growth parameters, such as substrate temperature, source concentration, and suction rate of the mist in the chambers, were investigated using field-emission scanning electron microscopy, X-ray diffraction, and photoluminescence spectrum analysis. Structural investigations of the ZnO nanostructures showed abnormal evolution of the morphologies with variation of the substrate temperatures. The shape of the ZnO nanostructures transformed from nanoplate, nanorod, nanopencil, and nanoprism shapes with increasing of the substrate temperature from 250 to $450^{\circ}C$; these shapes were significantly different from those seen for the conventional growth mechanisms in SPD. The observed growth behavior showed that a Leidenfrost effect dominantly affected the growth mechanism of the ZnO nanostructures.

Synthesis and Photoluminescence Properties of ZrO2:Eu3+ Nanoparticles Using Salt-Assisted Ultrasonic Pyrolysis Process (염 보조 초음파 분무 열분해법을 이용한 ZrO2:Eu3+ 나노입자의 합성 및 발광 특성)

  • Hwangbo, Young;Lim, Hyo Ryoung;Lee, Young-In
    • Korean Journal of Materials Research
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    • v.27 no.5
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    • pp.270-275
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    • 2017
  • Inorganic phosphors based on $ZrO_2:Eu^{3+}$ nanoparticles were synthesized by a salt-assisted ultrasonic spray pyrolysis process that is suitable for industrially-scalable production because of its continuous nature and because it does not require expensive precursors, long reaction time, physical templates or surfactant. This facile process results in the formation of tiny, highly crystalline spherical nanoparticles without hard agglomeration. The powder X-ray diffraction patterns of the $ZrO_2:Eu^{3+}$ (1-20 mol%) confirmed the body centered tetragonal phase. The average particle size, estimated from the Scherrer equation and from TEM images, was found to be approximately 11 nm. Photoluminescence (PL) emission was recorded under 266 nm excitation and shows an intense emission peak at 607 nm, along with other emission peaks at 580, 592 and 632 nm which are indicated in red.

Synthesis and Characterization of a Ceria Based Composite Electrolyte for Solid Oxide Fuel Cells by an Ultrasonic Spray Pyrolysis Process (초음파분무 열분해법을 이용한 고체산화물 연료전지용 세리아계 복합체 전해질의 제조 및 특성)

  • Lee, Young-In;Choa, Yong-Ho
    • Journal of Powder Materials
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    • v.21 no.3
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    • pp.222-228
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    • 2014
  • Much research into fuel cells operating at a temperature below $800^{\circ}C$. is being performed. There are significant efforts to replace the yttria-stabilized zirconia electrolyte with a doped ceria electrolyte that has high ionic conductivity even at a lower temperature. Even if the doped ceria electrolyte has high ionic conductivity, it also shows high electronic conductivity in a reducing environment, therefore, when used as a solid electrolyte of a fuel cell, the powergeneration efficiency and mechanical properties of the fuel cell may be degraded. In this study, gadolinium-doped ceria nanopowder with $Al_2O_3$ and $Mn_2O_3$ as a reinforcing and electron trapping agents were synthesized by ultrasonic pyrolysis process. After firing, their microstructure and mechanical and electrical properties were investigated and compared with those of pure gadolinium-doped ceria specimen.

Effect of Li-Incorporation on the Properties of ZnO Thin Films Deposited by Ultrasonic-Assisted Spray Pyrolysis Deposition Method (초음파 분무 열분해법에 의해 성장된 ZnO 박막의 특성에 미치는 Li 첨가의 영향)

  • Han, In Sub;Park, Il-Kyu
    • Korean Journal of Materials Research
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    • v.28 no.2
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    • pp.101-107
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    • 2018
  • Li-incorporated ZnO thin films were deposited by using ultrasonic-assisted spray pyrolysis deposition (SPD) system. To investigate the effect of Li-incorporation on the performance of ZnO thin films, the structural, electrical, and optical properites of the ZnO thin films were analyzed by means of X-ray diffraction (XRD), field-emssion scanning electron microscopy (FE-SEM), Hall effect measurement, and UV-Vis spectrophotometry with variation of the Li concentraion in the ZnO sources. Without incorporation of Li element, the ZnO surface showed large spiral domains. As the Li content increases, the size of spiral domains decreased gradually, and finally formed mixed small grain and one-dimensional nanorod-like structures on the surface. This morphological evolution was explained based on an anti-surfactant effect of Li atoms on the ZnO growth surface. In addition, the Li-incorporation changed the optical and electrical properties of the ZnO thin films by modifying the crystalline defect structures by doping effects.

Growth of Copper Oxide Thin Films Deposited by Ultrasonic-Assisted Spray Pyrolysis Deposition Method (초음파 분무 열분해법을 이용한 구리산화물 박막 성장)

  • Han, In Sub;Park, Il-Kyu
    • Korean Journal of Materials Research
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    • v.28 no.9
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    • pp.516-521
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    • 2018
  • Copper oxide thin films are deposited using an ultrasonic-assisted spray pyrolysis deposition (SPD) system. To investigate the effect of substrate temperature and incorporation of a chelating agent on the growth of copper oxide thin films, the structural and optical properites of the copper oxide thin films are analyzed by X-ray diffraction (XRD), field-emssion scanning electron microscopy (FE-SEM), and UV-Vis spectrophotometry. At a temperature of less than $350^{\circ}C$, three-dimensional structures consisting of cube-shaped $Cu_2O$ are formed, while spherical small particles of the CuO phase are formed at a temperature higher than $400^{\circ}C$ due to a Volmer-Weber growth mode on the silicon substrate. As a chelating agent was added to the source solutions, two-dimensional $Cu_2O$ thin films are preferentially deposited at a temperature less than $300^{\circ}C$, and the CuO thin film is formed even at a temperature less than $350^{\circ}C$. Therefore the structure and crystalline phase of the copper oxide is shown to be controllable.

Spherical Bi2Te3 Powder Synthesized by Oxide-Reduction Process via Ultrasonic Spray Pyrolysis (초음파 분무 열분해법에 의한 산화물 환원 공정의 구형 Bi2Te3 분말 합성)

  • Song, Chul-Han;Jang, Dae-Hwan;Jin, Yun-Ho;Kong, Man-Sik
    • Journal of the Korean institute of surface engineering
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    • v.50 no.2
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    • pp.114-118
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    • 2017
  • Bismuth telluride ($Bi_2Te_3$) and its alloys are well-known thermoelectric materials for ambient temperature applications. In this study, the dissolved Bi-Te precursor solution was used to synthesis metallic $Bi_2Te_3$ powder via ultrasonic spray pyrolysis and reduction process. The droplets of the Bi-Te precursor solution were decomposed to Bi-Te oxide powders by ultrasonic spray pyrolysis. The spherical $Bi_2Te_3$ powders were synthesized by reduction reaction in atmosphere of hydrogen gas at the temperature above $375^{\circ}C$ for 6h. The reduced $Bi_2Te_3$ powders have a mean particle size of $1.5{\mu}m$. The crystal structure of the powder was evaluated by X-Ray diffraction(XRD), and the microstructure with size and shape powders was observed by fieldemission scanning electron microscope(FE-SEM) and transmission electron microscope(TEM).

The Synthesis of Lithium Lanthanum Titanium Oxide for Solid Electrolyte via Ultrasonic Spray Pyrolysis (초음파 분무 열분해법을 이용한 고체전해질용 Lithium Lanthanum Titanium Oxide 제조)

  • Jaeseok, Roh;MinHo, Yang;Kun-Jae, Lee
    • Journal of Powder Materials
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    • v.29 no.6
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    • pp.485-491
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    • 2022
  • Lithium lanthanum titanium oxide (LLTO) is a promising ceramic electrolyte because of its high ionic conductivity at room temperature, low electrical conductivity, and outstanding physical properties. Several routes for the synthesis of bulk LLTO are known, in particular, solid-state synthesis and sol-gel method. However, the extremely low ionic conductivity of LLTO at grain boundaries is one of the major problems for practical applications. To diminish the grain boundary effect, the structure of LLTO is tuned to nanoscale morphology with structures of different dimensionalities (0D spheres, and 1D tubes and wires); this strategy has great potential to enhance the ion conduction by intensifying Li diffusion and minimizing the grain boundary resistance. Therefore, in this work, 0D spherical LLTO is synthesized using ultrasonic spray pyrolysis (USP). The USP method primarily yields spherical particles from the droplets generated by ultrasonic waves passed through several heating zones. LLTO is synthesized using USP, and the effects of each precursor and their mechanisms as well as synthesis parameters are analyzed and discussed to optimize the synthesis. The phase structure of the obtained materials is analyzed using X-ray diffraction, and their morphology and particle size are analyzed using field-emission scanning electron microscopy.

Synthesis of Zn2SiO4 : Mn Phosphor Particles by Spray-pyrolysis Method (분무 열 분해법을 이용한 Zn2SiO4 : Mn 나노 형광체의 광학적 특성에 관한 연구)

  • Nam, Sang-Hun;Kim, Myoung-Hwa;Lee, Sang-Duck;Boo, Jin-Hyo
    • Journal of the Korean Vacuum Society
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    • v.19 no.1
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    • pp.66-71
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    • 2010
  • Spherical shape $Zn_2SiO_4:Mn$ phosphor particles with the mean particle size from submicron to micron sizes were prepared by ultrasonic spray pyrolysis method. A droplet separator was introduced to control the size distribution of the phosphor particles with spherical shape. The $Zn_2SiO_4:Mn$ phosphor particles with 2 mol% doping concentration of manganese have decay time and have photoluminescence intensities comparable with those of the latest commercial product prepared by the solid state reaction method. The size of the phosphor particles was decreased from 1 to 0.2 micrometers as the inorganic salt solution concentration was changed from 0 to 5 M. The phosphor particles prepared from the solutions above 0.5 M have photoluminescence intensities comparable with that of the latest commercial product.

Properties of ZnO Films on r-plane Sapphires Prepared by Ultrasonic Spray Pyrolysis (초음파(超音波) 분무(噴霧) 열분해법(熱分解法)으로 r-plane 사파이어 위에 증착(蒸着)된 ZnO 막(膜)의 특성(特性))

  • Ma, Tae-Young;Moon, Hyun-Yul;Lee, Soo-Chul
    • Journal of Sensor Science and Technology
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    • v.6 no.2
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    • pp.155-162
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    • 1997
  • Zinc oxide(ZnO) thin films were deposited on r-plane sapphires from a solution containing zinc acetate. The films were obtained in a hot wall reactor by the pyrolysis of an aerosol produced by an ultrasonic generator. The crystallinity, surface morphology and composition of the films have been studied using the x-ray diffraction method(XRD) scanning electron microscopy(SEM) and Auger electron spectroscopy (AES) respectively. The influences of the substrate temperature on the crystallinity of the films were studied. Strongly (110) oriented ZnO films were obtained at a substrate temperature of $350^{\circ}C$. The resistivity was increased to above $3{\times}10^{6}{\Omega}{\cdot}cm$ with copper doping and vapor oxidation.

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