• Journal of the Korean Institute of Intelligent Systems
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• v.26 no.2
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• pp.135-140
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• 2016

Corrective controllers enable fault diagnosis and tolerance for various faults in asynchronous sequential circuits without resort to redesign. In this paper, we propose a static corrective controller in order to decrease the size of the controller. Compared with dynamic controllers, static controllers can be made using only combinational circuits, as they need no inner states. We address the existence condition and design procedures for static corrective controllers that overcome state transition faults. To show the validity and advantage, the proposed controller is applied to an SEU error counter implemented on FPGA.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.45-45
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• 2010

반도체 및 디스플레이 산업에 사용되는 진공펌프의 효율이 증대됨에 따른 성능 평가 기술의 향상 과 미세 유량을 조절 및 측정할 수 있는 시스템의 개발이 요구되고 있다. 유량 시스템 중 소닉노즐은 기체 유량 측정 표준기로 사용되고 있다. 또한 유량 측정에 있어서 사용상의 편리성, 이동성, 재현성 등 여러 가지의 장점을 가지고 있어 산업 현장에서 많이 사용되고 있다. 본 연구는 소닉노즐을 넓은 유량 범위에서 사용할 수 있도록 소닉노즐의 유출계수 교정을 목적으로 한다. ISO 9300에서 제시한 사양에 맞추어 목 직경 0.03 mm와 0.2 mm 그리고 1.6 mm의 소닉노즐을 제작하였다. 한국표준과학연구원에서 진공용 유량측정 장치로 개발된 정적형 유량계를 이용하여 제작된 3 종의 소닉노즐 유출계수를 확장불확도 3% 이내로 교정하였다. 교정된 소닉노즐의 유량 측정범위는 약 0.6~90, 000 cc/min 범위를 갖는 것으로 나타났으며, 사용유동 조건에 해당되는 레이놀드 수(Reynolds number) 범위는 26~75, 700 으로 확인되었다. 이러한 결과는 교정된 소닉노즐을 이용하여 진공공정에서 필요한 극 미세 유량의 정밀측정을 가능하게한 새로운 연구결과로 판단된다. 교정된 소닉노즐을 이용하여 진공펌프의 배기속도 측정결과는 기 구축된 정적법을 이용한 배기속도 측정결과와 3% 이내의 오차범위내로 매우 잘 일치함을 보였다. 교정된 소닉노즐은 향후 반도체 및 디스플레이 공정에 사용되는 다양한 진공펌프들의 배기속도를 현장에서 간단하게 평가할 수 있는 '현장 성능평가 장치'에 활용할 예정이며, 현재 공정현장에서 배기속도 측정에 널리 사용 중인 MFC를 대체할 수 있을 것으로 예상된다.

• Journal of the Korean Vacuum Society
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• v.15 no.6
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• pp.605-611
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• 2006

We have developed in-situ vacuum gauge calibration system in the range 1 Pa to 100 kPa by using constant volume method. The system is capable of gauge calibration by comparison method without demount the reference gauges. The system will be useful for dissemination of national vacuum standards to foreign developing countries and domestic industries.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.45 no.4
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• pp.1-10
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• 2008

The problem of controlling asynchronous sequential machines is addressed in this paper. Corrective control means to make behavior of an asynchronous sequential machine equal to that of a given model. The main objective is to develope a corrective controller, especially when a model is given as nondeterministic, or a set of reference models. The structure of corrective control system for asynchronous sequential machines is addressed first, followed by description of nondeterministic models. Then, we propose a method for analyzing reachability of asynchronous machines and nondeterministic models. Proposed methods are demonstrated in an example.

• Journal of the Korean Vacuum Society
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• v.14 no.4
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• pp.186-194
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• 2005

A Spinning Rotor Gauge was calibrated between $4.04\times10^{-3}$ Pa and $1.11\times10^{-2}$ Pa at the high vacuum standard by static expansion method. The results were analysed according to the document of 'Guide to the Expression of Uncertainty in Measurement' of ISO. The expanded uncertainty was $3.0035\times10^{-3}$ Pa at $7.5448\times10^{-3}$ Pa. $95\%$ confidence level, and coverage factor of k = 1.

• Journal of the Korean Vacuum Society
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• v.19 no.4
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• pp.243-248
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• 2010

Sonic nozzles have been a standard device for measurement of steady state gas flow, as recommended in ISO 9300. This paper introduces two sonic nozzles of diameter ${\Phi}$ 0.03 mm and ${\Phi}$ 0.2 mm precisely machined according to ISO 9300. The constant volume flow meter(CVFM), readily set up in the Vacuum center of KRISS. was used to calibrate the discharge coefficients of both nozzles. The calibration results were shown to determine them within the 3% expanded measurement uncertainty. Calibrated sonic nozzles were found to be applicable for precision measurement of steady state gas flow in the vacuum process in the ranges of 0.6~1,800 cc/min. Those flow conditions are equivalent to the fine gas flow with Reynolds numbers of 26~12,100. Those encouraging results confirm that calibrated sonic nozzles enable precision measurement of extremely low gas flow encountered very often in th vacuum processes. Both calibrated sonic nozzles are proven to provide the precision measurement of the volume flow rate of the dry vacuum pump within one percent difference in reference to CVFM. Calibrated sonic nozzles are applied to a new 'in-situ and in-field' equipment designed to measure the volume flow rate of vacuum pumps in the semiconductor and flat display processes. Furthermore, they can provide other applications to flow control devices in vacuum, such as MFC, etc.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.45 no.4
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• pp.11-19
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• 2008

The problem of controlling asynchronous sequential machines is addressed in this paper Corrective control means to make behavior of an asynchronous sequential machine equal to that of a given model. The main objective is to develope a corrective controller, especially when a model is given as nondeterministic, or a set of reference models. We first review representation of nondeterministic models and model matching problems with nondeterministic models, which are presented in the companion paper. We then propose necessary and sufficient conditions for the existence of corrective controllers and describe their design procedure. To show the applicability, the proposed control scheme is demonstrated in an example.

• Journal of the Korea Institute of Military Science and Technology
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• v.12 no.4
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• pp.491-499
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• 2009

The determination of response characteristics for pressure sensors is routinely limited to static calibration against a deadweight pressure standard. The strength of this method is that the deadweight device is a primary standard used to generate precise pressure. Its weakness lies in the assumption that the static and dynamic responses of the sensor in question are equivalent. Differences in sensor response to static and dynamic events, however, can lead to serious measurement errors. Dynamic techniques are required to calibrate pressure sensors measuring dynamic events in milliseconds. In this paper, a dynamic calibration using negative going dynamic pressure is proposed to determine dynamic pressure response for piezoelectric sensors. Sensitivity and linearity of sensor by the dynamic calibration were compared with those by the static calibration. The uncertainty of calibration results and the goodness of fit test of linear regression analysis were presented. The results show that the dynamic calibration is applicable to determine dynamic pressure response for piezoelectric sensors.

• Proceedings of the Korean Vacuum Society Conference
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• 2003.08a
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• pp.57-57
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• 2003

• Proceedings of the Korean Vacuum Society Conference
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• 2002.06a
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• pp.133-134
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• 2002