• 제목/요약/키워드: 정밀스테이지

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초정밀 3축 이송 스테이지의 개발 : 2. 제작 및 성능 평가 (Development of 3-axis fine Positioning Stage : Part 2. Fabrication and Performance Evaluation)

  • 강중옥;백석;한창수;홍성욱
    • 한국정밀공학회지
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    • 제21권3호
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    • pp.155-162
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    • 2004

  • This paper presents the fabrication procedure and the experiments for the 3-axis fine positioning stage proposed in［1］. First, the dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the stage design specifications. Secondly, the performance of the stage is also evaluated on the accuracy associated with linear positioning, angular error, and straightness error. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning. Through the analysis and experiment, the developed fine positioning stage are found to have a long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design.

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초정밀 3축 이송 스테이지의 개발: 1. 해석 및 설계 (Development of 3-axis Fine Positioning Stage: Part 1. Analysis and Design)

  • 강중옥;서문훈;한창수;홍성욱
    • 한국정밀공학회지
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    • 제21권3호
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    • pp.147-154
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    • 2004

  • This paper presents a procedure for analysis and design of a fine positioning stage, which has many applications in industries for machine tools, semiconductor, LCD and so forth. The stage considered here is based on a single module with 3 axes which is composed of flexures hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs(the flexures hinges). An experimental design procedure is applied to determine the dimension of flexures hinges. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage. An actual fine stage is made and verified through an experiment on the dynamic characteristics.

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