• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.150-155
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• 2005

In recent years, as the demands of VBNS(Very high speed Backbone Network Service) and VDSL(Very high-data rate Digital Subscriber Line) increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, WDM elements increase. The alignment and the attachment technology are very important to fabricate the optical elements for communication. In this paper, the mechanism of rotational stage are studied. with the three different method and the results of them are applied to the design of the system. The performance test of resolution and travel is performed.

• Proceedings of the Korea Information Processing Society Conference
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• 2002.04b
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• pp.1293-1296
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• 2002

본 연구에서는 서브 스위치를 이용한 오류허용 정렬 네트워크를 제안한다. 기존의 정렬 네트워크에서는 여분의 경로와 네트워크의 복잡성문제가 있었다. 제안된 구조에서는 여분 경로를 확장시키기 위해서 각 스테이지마다 $\frac{N}{4}\sum\limits_{i=0}^{n=2}{(\frac{1}{2})}^i$ (N=입 출력수) 서브 스위치를 추가함으로써 여분의 경로가 $3^{n(n+1)/2}$만큼 증가하였다. 또한 제안된 정렬 네트워크는 기존의 네트워크의 이중 네트워크 plane 개념에서 사용한 스위치 소자와 링크 수와 비교해 볼 때 제안된 구조의 단일 plane을 이용한 구조가 복잡도에서 낮다. 결론적으로 제안된 서브 스위치를 이용한 오류 허용 정렬 네트워크는 여분의 경로를 증가시키면서 하드웨어적 복잡도를 감소시킬 수 있다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1514-1517
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• 2005

In recent years, as the demands of VBNS(Very high speed Backbone Network Service) and VDSL(Very high-data rate Digital Subscriber Line) increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, WDM elements increase. The alignment and the attachment technology are very important to fabricate the optical elements for communication. In this paper, the mechanism of rotational stage are studied. with the three different method and the results of them are applied to the design of the system. The performance test of resolution and travel is performed.

• Korean Journal of Optics and Photonics
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• v.32 no.2
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• pp.49-54
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• 2021

In this paper, we design and construct the equipment to manufacture large-diameter optical fiber end caps, which are the core parts of high-power fiber lasers, and we fabricate large-diameter optical fiber end caps using the home-made equipment. This equipment consists of a CO2 laser as a fusion-splice heat source, a precision stage assembly for transferring the position of a large-diameter optical fiber and an end cap, and a vision system used for alignment when the fusion splice is interlocked with the stage assembly. The output of the laser source is interlocked with the stage assembly to control the output, and the equipment is manufactured to align the polarization axis of the large-diameter polarization-maintaining optical fiber with the vision system. Optical fiber end caps were manufactured by laser fusion splicing of a large-diameter polarization-maintaining optical fiber with a clad diameter of 400 ㎛ and an end cap of 10×5×2 ㎣ (W×D×H) using home-made equipment. Signal-light insertion loss, polarization extinction ratio, and beam quality M2 of the fabricated large-diameter optical fiber end caps were measured to be 0.6%, 16.7 dB, and 1.21, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.263-263
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• 2010

실제 옷처럼 입는 컴퓨터를 구현하거나 복잡하고 움직임이 많은 사람의 장기 등 생체에 이식 가능한 정보 전자 소자를 개발하려는 시도가 많이 이루어지고 있다. 현재는 기존의 반도체 공정과 실리콘 소재를 기반으로 연구 결과가 보고되고 있는데, 이는 소자 제작에 있어서 높은 공정 온도 등으로 인해 응용성이 제한되는 상황이다. 우리는 metal oxide 나노선과 단일벽 탄소나노튜브 (SWCNT)를 성장하여 각각 슬라이딩 전이법과 thermal tape 전이법을 이용하여 원하는 기판에 전이하고 소자를 제작하였다. metal oxide 나노선은 슬라이딩 전이를 통해 정렬된 상태로 패턴을 제작하였으며, SWCNT는 density 제어와 채널 크기 조정을 통해 반도체성 채널을 유도하여 소자 특성을 확보하였다. 또한 각 나노선의 전계효과소자와 SWCNT로 구성된 PMOS inverter를 유연한 고분자 필름기판위에 구현하고, 이를 스트레칭이 가능한 스테이지를 이용해 strain 대비 전기특성 변화를 분석하였다. 유연성이 좋은 나노선/나노튜브로 제작된 해당 소자는 전체 소자가 스트레칭이 가능할 수 있게 연결구조를 디자인하여 수십% 의 stain에도 각각의 전기특성이 유지되었다. 이처럼 스트레칭이 가능한 1차원 나노소재 소자는 그 유연성을 바탕으로 입는 옷처럼 구겨지거나 늘여지게 되는 다양한 스트레칭 상황에도 특성이 보장되어 미래 정보전자소자로 많은 응용이 가능할 것으로 예상된다.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.4
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• pp.355-360
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• 2010

In this study, a modeling process of a 3-axis planar alignment stage is suggested. Vibration tests using a laser vibro-meter is performed to find the modeling parameters of the stage. By analyzing the result of the test, the stiffness of prismatic joints and revolute joints, as well as the contact conditions of the thrust bearings, can be calculated. The modeling of the stage was validated by comparing six normal mode shapes, which are acquired from experiments and simulations.

• Korean Journal of Optics and Photonics
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• v.4 no.1
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• pp.15-21
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• 1993

This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.6
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• pp.21-25
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• 2009

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.119-124
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• 2021

In a situation where Moore's law, which states that the performance of semiconductor integrated circuits doubles every two years, is showing a limit from a certain point, and it is difficult to increase the performance due to the limitations of exposure technology.In this study, a wafer hybrid method that can increase the degree of integration Various research on bonding technology is currently in progress. In this study, in order to achieve rotational precision between wafers in wafer hybrid bonding technology, modeling of θ_z alignment stage and VCM actuator modeling used for rotational alignment, magnetic field analysis and desgin, control, and evaluation are performed. The system of this study was controlled by VCM actuator, capactive sensor, and dspace, and the working range was ±7200 arcsec, and the in-position and resoultion were ±0.01 arcsec. The results of this study confirmed that safety and precise control are possible, and it is expected to be applied to the process to increase the integration.

• Journal of the Korea Computer Graphics Society
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• v.24 no.1
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• pp.27-33
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• 2018

This paper presents a new adaptive LSB steganography for high capacity in spatial color images. The number of least signi ficant bit (LSB) of each RGB component in a color image pixel, to replace with the data bits to be hidden, was determine d through analysis of the worst case peak signal noise ratio (PSNR). In addition, the combination of the number of bits is determined adaptively according to image content. That is, 70% of the data to be hidden is proposed to be replaced with 3 bit LSB of two components, 2 bit LSB of the rest component, and 30% be replaced with 4 bit LSB of each RGB compon ent. To find edge areas in an image, delta sorting in local area is also suggested. Using the proposed method, the data cap acity is 9.2 bits per pixel (bpp). The average PSNR value of the tested images with concealed data of up to 60Kbyte was 43.9 db and also natural histograms were generated.