Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Equivalent Modeling of an Alignment Stage Based on the Vibration Tests

진동 실험을 바탕으로 한 정렬 스테이지 등가 모델링

  • 임홍재 (국민대학교 기계자동차공학부) ;
  • 이정석 (국민대학교 자동차공학 전문대학원) ;
  • 이성훈 (국민대학교 자동차공학 전문대학원) ;
  • 정재일 (국민대학교 기계자동차공학부)
  • Published : 2010.04.20
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Abstract

In this study, a modeling process of a 3-axis planar alignment stage is suggested. Vibration tests using a laser vibro-meter is performed to find the modeling parameters of the stage. By analyzing the result of the test, the stiffness of prismatic joints and revolute joints, as well as the contact conditions of the thrust bearings, can be calculated. The modeling of the stage was validated by comparing six normal mode shapes, which are acquired from experiments and simulations.

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References

  1. Lee, S. H., Lee, Y. H., Lee, K. W., Lee, S. B. and Yim, H. J., 2008, "Analysis of Z-axis Displacement for Precision of a Nano Imprinting Stage," Proc. of the KSME 2008 Spring annual Meeting. p.100.
  2. Park, I. S., Won, J. J., Yim, H. J. and Jeong, J. I., 2008, "Deformation of a Mold for Large Area UV- nanoimprint Lithography in Alignment and Curing Processes," Proc. of the KSME 2008 Fall Annual Meeting, pp. 1939-1943.
  3. Lee, J. S., Lee, S. H., Jeong, J. I. and Yim, H. J., 2009, "Analysis of Displacement by External Force of Nano Imprinting Stage," Proc. of the KSME 2009 Spring Annual Meeting, pp. 96-100.
  4. Lee, K. W., Lee, J. W., Lee, S. H., Lim, S. H., Jeong, J. I. and Yim, H. J., 2008, "Vibration Analysis of a Nano Imprinting Stage Using CAE," Proceedings of the KSNVE Annual Spring Conference. pp. 579-584.
  5. Lee, S. Y., Kim, S. R., Jeong, J. I. and Yim, H. J., 2009, "A Study on the Improvement of Vibration Analysis of Visual Alignment System Using CAE Method," Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 19, No. 8, pp. 838-842. https://doi.org/10.5050/KSNVN.2009.19.8.838