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Technology for the Multi-layer Nanoimprint Lithography Equipments  

Lee, Jae-Jong (Nano-mechanical Systems Research Division, KIMM)
Choi, Kee-Bong (Nano-mechanical Systems Research Division, KIMM)
Kim, Gee-Hong (Nano-mechanical Systems Research Division, KIMM)
Park, Soo-Yeon (Department of Nanomechatronics, University of Science and Technology)
Publication Information
Journal of the Korean Society for Precision Engineering / v.26, no.6, 2009 , pp. 21-25 More about this Journal
Keywords
Nanoimprint Lithography; Multi-layer Nanoimprint; Nanostage; Overlay and Alignment; Compliance Mechanism;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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