• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.35 no.4
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• pp.412-417
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• 2022

Capacitive-type humidity sensors with a high sensitivity and fast response/recovery times have attracted a great attention in non-contact respiration biological signal monitoring applications. However, complicated fabrication processes involving high-temperature heat treatment for the hygroscopic film is essential in the conventional ceramic-based humidity sensors. In this study, a non-toxic ceramic/metal halide (BaTiO₃(BT)/NaCl) humidity sensor was prepared at room temperature using a solvent-free aerosol deposition process (AD) without any additional process. Currently prepared BT/NaCl humidity sensor shows an excellent sensitivity (245 pF/RH%) and superior response/recovery times (3s/4s) due to the NaCl ionization effect resulting in an immense interfacial polarization. Furthermore, the non-contact respiration signal variation using the BT/NaCl sensor was determined to be over 700% by maintaining the distance of 20 cm between the individual and the sensor. Through the AD-fabricated sensor in this study, we expect to develop a non-contact biological signal monitoring system that can be applied to various fields such as respiratory disease detection and management, infant respiratory signal observation, and touchless skin moisture sensing button.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.150-150
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• 2007

ZnO는 3.37eV의 넓은 에너지 밴드갭을 가지고 있으며, 60meV의 큰 엑시톤(exciton) 결합에너지의 특성을 가지고 있어 UV 영역의 소스로서 가장 활용도가 클 것으로 예상된다. 특히 ZnO 박막은 청색과 자외선 발광소자 및 광전자 소자, 화학적 센서로 활용이 가능하다. 최근 ZnO 박막을 이용한 LED 및 LD 소자 제작에 대한 연구가 국내외적으로 매우 활발하게 이루어지고 있다. 이런 소자를 제작할 때 가장 우선시 되는 것이 ZnO 박막의 전기적은 특성(캐리어 밀도, 전도도, 이동도, 비저항)이다. ZnO 박막을 성장하는 방법으로는 sputtering, PLD, MOCVD, sol-gel 법 등 여러방법이 있지만, MOCVD 법은 소스인 DEZn 와 산소의 유량이 조절이 가능하여 박막의 특성 다양하게 변화시킬 수 있는 장정이 있다. 본 연구에서는 MOCVD 법을 이용하여 사파이어 기판위에 ZnO 박막을 성장 시켰다. 성장 시 VI족 소스인 산소가스와 II족 소스인 DEZn 양을 조절함으로써 이때 변화되는 박막의 전기적, 광학적, 구조적 특성에 대해 연구하였다.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.1
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• pp.1-12
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• 2021

Here, we introduce a laser-induced graphene synthesis technology and its applications for the electric/electronic device manufacturing process. Recently, the micro/nanopatterning technique of graphene has received great attention for the utilization of these new graphene structures, which shows progress developments at present with a variety of uses in electronic devices. Some examples of practical applications suggested a great potential for the tunable graphene synthetic manners through the control of the laser set-up, such as a selection of the wavelength, power adjustment, and optical techniques. This emerging technology has expandability to electric/electronic devices combined together with existed micro-packaging technology and can be integrated with the new processing steps to be applied for the operation in the fields of biosensors, supercapacitors, electrochemical sensors, etc. We believe that the laser-induced graphene technology introduced in this paper can be easily applied to portable small electronic devices and wearable electronics in the near future.

• Applied Chemistry for Engineering
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• v.29 no.2
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• pp.191-195
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• 2018

In this study, the influence of microporous structures of activated carbon fibers (ACFs) on dimethyl methylphosphonate (DMMP) gas sensing properties as a nerve agent simulant was investigated. The pore structure was given to carbon fibers by chemical activation process, and an electrode was fabricated for gas sensors by using these fibers. The PAN based ACF electrode, which is an N-type semiconductor, received electrons from a reducing gas such as DMMP, and then electrical resistance of its electrode finally decreased because of the reduced density of electron holes. The sensitivity of the fabricated DMMP gas sensor increased from 1.7% to 5.1% as the micropore volume increased. It is attributed that as micropores were formed for adsorbing DMMP whose molecular size was 0.57 nm, electron transfer between DMMP and ACF was facilitated. In conclusion, it is considered that the appropriate pore structure control of ACFs plays an important role in fabricating the DMMP gas sensor with a high sensitivity.

• Journal of Adhesion and Interface
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• v.23 no.2
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• pp.53-58
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• 2022

Here, the surface characteristics of the dielectric were controlled by introducing the self-assembled monolayers (SAMs) as the intermediate layers on the surface of the AlOx dielectric, and the electrical performances of the organic charge modulated transistor (OCMFET) were significantly improved. The organic intermediate layer was applied to control the surface energy of the AlOx gate dielectric acting as a capacitor plate between the control gate (CG) and the floating gate (FG). By applying the intermediate layers on the gate dielectric surface, and the field-effect mobility (μ_OCMFET) of the OCMFET devices could be efficiently controlled. We used the four kinds of SAM materials, octadecylphosphonic acid (ODPA), butylphosphonic acid (BPA), (3-bromopropyl)phosphonic acid (BPPA), and (3-aminopropyl)phosphonic acid (APPA), and each μ_OCMFET was measured at 0.73, 0.41, 0.34, and 0.15 cm2V-1s-1, respectively. The results could be suggested that the characteristics of each organic SAM intermediate layer, such as the length of the alkyl chain and the type of functionalized end-group, can control the electrical performances of OCMFET devices and be supported to find the optimized fabrication conditions, as an efficient sensing platform device.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.67 no.3
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• pp.406-412
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• 2018

This paper describes the fabrication process of laser induced graphene (LIG) and its transfer method on to a flexible and stretchable PDMS substrate. By irradiating CO2 laser on a polyimide(PI) film surface, a localized high temperature is created, resulting in a three-dimensional porous graphene network structure with good conductivity. This LIG electrode is relatively easy to fabricate and since it is very weak the LIG electrode was transferred to a flexible PDMS substrate to increase the sturdiness as well as possible use in flexible applications. Sheet resistance, thickness, and electrochemical activity of the fabricated in-situ LIG electrodes have been examined and compared with the LIG electrodes after transferring to PDMS elastomer. The properties of the LIG electrodes were also examined depending on the $CO_2$ laser power. As the irradiated laser power increased, the LIG electrode resistance decreases and the LIG electrode thickness increased. At 4.8 W of laser power, the average sheet resistance and thickness of the fabricated LIG electrodes were approximately $31.7{\Omega}/{\Box}$ and $62.67{\mu}m$, respectively. Moreover, the electrochemical activity of the fabricated LIG electrode at 4.8 W of laser power showed a high oxidation current of $28.2{\mu}A$ after transferring to PDMS.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.65 no.4
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• pp.628-634
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• 2016

This paper demonstrates a microfluidic electrochemical sensor for detecting endocrine disruptor such as estradiol at a very low concentration by using preconcentration technique. In addition, self-assembled monolayer(SAM) was also employed on the working electrode of the electrochemical sensor in order to increase the estradiol capture efficiency of the sensor. SAM treatment on the working electrode enhanced the specific binding between the surface of the working electrode and the estradiol antibody. The estradiol antibody was applied on the working electrode at different concentrations(10, 20, 50, 100, 200 pg/ml) for observing the concentration dependency. The measured electrochemical redox current changed with the amount of the bound estradiol on the Au working electrode surface and the sensor can detect all the target material when the immobilized antibody amount is more than the estradiol amount in the water. The elecrochemical estradiol sensor without SAM treatment showed a low current of 7.79 nA, while the sensor treated with SAM resulted in 339 nA at 200 pg/ml, which is more than 40 fold higher output current. When combining the preconcentration technique and the SAM-treated electrode, the measured current became more than 100 fold higher than that of the sensor without neither SAM treatment nor preconcentration technique. The combination of these two techniques can would enable the proposed microfluidic electrochemical sensor to detect a very low concentration endocrine disruptor.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 1998.05a
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• pp.95-95
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• 1998

현장에서 부식속도를 측정하는 방법의 하나인 전기저항 프로브(Electric Resistance Probe, ER probe)는 시편이 부식되는 양에 비례하여 저항이 증가하는 원리를 이용한 것으로 부식기구에 무관하게 직접적인 부식속도의 측정이 가능하다. 그러나, 와이어나 판형으로 기계 가공된 프로브로 제작되어 미량의 부식에는 저항변화폭이 작아 긴 측 정시간이 필요하고, 특히 국부 부식의 경우 부식이 상당히 진행되더라도 전체 저항변 화가 크지 않은 문제점이 있다. 박막형 전기저항프로브는 미량의 부식에서도 저항변화폭이 크게 나타나도록하기 위 하여 금속 박막을 스퍼터링으로 증착하여 동일 부식량에서 저항 변화율을 크게 향상 시킨 프로브이다. 이 프로브는 좁은 선폭(O.25-1mm)의 세선을 복수개 포함한 형상으로 프로브를 설계하여 핏팅이 발생하면 하나의 세선이 끊어지도록 하여 국부적인 부식이 일어날 경우에도 저항변화가 크게 나타나도록 고안되었다. 탄소강의 경우 일반적인 환경에서는 부식속도가 결정립의 크기, 가공경화의 정도등 에 민감하게 변화되지 않는 것으로 알려져 있으나, 박막으로 증착되었을 경우에는 별 크재료와는 전혀 다른 미세구조를 가지므로 벌크의 부식거동과는 다른 거동을 보일 수 있다. 이 연구에서는 증착조건을 달리하여 증착된 철 박막의 결정성, 비저항, 표면 상태, 조성등을 4 point 프로브, SEM, Auger spectroscopy등을 이용하여 조사하고 각각의 전위, 부식속도등과의 상관관계를 조사하였다. 증착된 박막의 비저항은 증착중 혼입된 산소의 양에 따라 매우 민감하게 변화하였다. 산소가 l0at%이상 함유된 철은 강의 알려진 비저항보다 수십배 높은 비저항을 보이며, 부식전위가 높아지고 실제 부식속도 또한 매우 낮게 나타났다. 박막의 부식거동은 미량 불순물에 의해서도 크게 변화하였는데 동일한 수준의 비저 항을 갖는 철 박막에서도 99.9% 순도의 철을 타켓으로 하여 증착된 막은 일반 저탄소 강을 타켓으로 하여 증착된 막보다 훨씬 낮은 부식속도를 보였다.

• Korean Chemical Engineering Research
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• v.57 no.2
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• pp.149-163
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• 2019

Under non-uniform electric field, a directional force along the electric field gradient is applied to matter having permanent or induced dipoles. The transport of particles by the directional force is called dielectrophoresis (DEP). Since the strength and direction of the DEP force depend on parameters, such as permittivity and conductivity of particles and surrounding media, and frequency of the applied AC electric field, particle can be precisely manipulated by controlling the parameters. Moreover, unlike electrophoresis, DEP can be applied to any particles where dipole is effectively induced by electric field. Such a DEP technique has been used in various fields, ranging from microfluidic engineering to biosensor and microchip research. This paper first describes the fundamentals of DEP, and discusses representative microelectrode designs used for DEP study. Then, exemplary applications of DEP, such as separation, capture and self-assembly of particles, are introduced.

• Applied Chemistry for Engineering
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• v.35 no.5
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• pp.372-378
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• 2024

MXene, a two-dimensional transition metal carbide, nitride, or carbonitride, possesses exceptionally thin and large surface areas while also exhibiting remarkable electrical and chemical properties. These properties have attracted considerable interest in the application of MXene, including energy storage devices, sensors, and catalysts. Since the discovery of MXene in 2011, a number of synthetic methods have been proposed. The synthesis of MXene can be mainly divided into two stages: an etching step and a delamination step. The type of terminations or surface defects are dependent on the synthetic method and have a significant impact on key properties such as electrical conductivity. Therefore, research on synthetic methods is essential for the industrialization of MXene. This review provides an overview of the various etching methods and delamination strategies employed in the synthesis of Ti₃C₂T_x MXene, including the commonly used hydrofluoric acid etching method and the fluorine-free method, which has recently emerged as an environmentally friendly alternative. We also address the latest research trends, challenges, and perspectives for the industrialization of MXene.trialization of MXene.