• Title/Summary/Keyword: 자성박막

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Optical properties of Rare-Earth-Implanted GaN Epilayer (희토류 원소를 이온주입법으로 도핑한 GaN 박막의 광전이 특성)

  • Kim, Yong-Min
    • Journal of the Korean Vacuum Society
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    • v.16 no.3
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    • pp.210-214
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    • 2007
  • We have studied optical transitions of Gd-implanted GaN epilayers. Photoluminescence transition intensity at 590 nm at T=5 K diminishes and its center position moves to short avelength (blue shift) with increasing temperature up to 200 K. Above T=200 K, the transition intensity increases with increasing temperature while the center position remains the same. We believe that such anomalous optical transition behavior is due to the effect of rare-element in the semiconductor host material and lattice imperfection which was occurred during the implantation process well as.

A Study on Thermodynamics for Compositional Separation in Co-Cr magnetic Alloy Films (Co-Cr 자성합금 박막의 조성적 상분리 현상의 열역학적 고찰)

  • Song, O-Seong;Jeon, Jeon-An
    • Korean Journal of Materials Research
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    • v.9 no.4
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    • pp.341-344
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    • 1999
  • We reported compositional separation(CS) into Co-enriched and Cri-enriched components inside the grains of Co-Cr based thin films prepared by rf sputtering. CS strongly depends on the sputtering conditions of substrate temperature and target composition. Tuning the microstructure of the Co-Cr films is important in order to employ the CS for high-density magnetic recording. We investigated the origin of CS from thermodynamic viewpoint. We employ a spinodal decomposition-like model to describe the origin of the CS in Co-Cr films. We consider the total free energy of the Co-Cr films as the sum of several free energies of; 1) thermodynamic mixing entropy of a binary solid solution, 2) magnetic ordering interaction(MOI) energy below the Curie temperature, and 3) excess interaction energy(XS) caused by the sputtering process as a function of temperature and composition. Those energies distorted the total free energy like the spinodal decomposition and caused the compositionally separated fine microstructure inside the grains. If the second derivative of the total free energy with respect to Cr composition becomes negative at a given substrate temperature, we may observe a metastable compositional separation inside the Co-Cr alloy films. We expect to exploit the microstructure of CS for ultra-high density magnetic recording.

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Microstructure and Magnetic properties of $Ti_{1-x}Co_xO_2$ Magnetic semiconductor thin films by Metal Organic Chemical Vapor Deposition (유기금속화학기상증착법으로 제조된 자성반도체 $Ti_{1-x}Co_xO_2$ 박막의 미세구조 및 자기적 특성)

  • Seong, Nak-Jin;Yoon, Soon-Gil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.155-159
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    • 2003
  • Polycrystalline $Ti_{1-x}Co_xO_2$ thin films on $SiO_2$ (200 nm)/Si (100) substrates were prepared using liquid-delivery metalorganic chemical vapor deposition. Microstructures and ferromagnetic properties were investigated as a function of doped Co concentration. Ferromagnetic behaviors of polycrystalline films were observed at room temperature, and the magnetic and structural properties strongly depended on the Co distribution, which varied widely with doped Co concentration. The annealed $Ti_{1-x}Co_xO_2$ thin films with $x{\leq}0.05$ showed a homogeneous structure without any clusters, and pure ferromagnetic properties of thin films are only attributed to the $Ti_{1-x}Co_xO_2$ (TCO) phases. On the other hand, in case of thin films above x=0.05, Co clusters formed in a homogeneous $Ti_{1-x}Co_xO_2$ Phase, and the overall ferromagnetic (FM) properties depended on both $FM_{TCO}$ and $FM_{Co}$. Co clusters with about 10nm-150nm size decreased the value of Mr (the remanent magnetization) and increased the saturation magnetic field.

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Effect of NH4Cl on the Electrodeposition of Cobalt/Phosphorus Alloy (CoP합금의 전기도금 시 NH4Cl의 영향에 관한 연구)

  • Lee, Kwan-Hyi;Jeung, Won-Young
    • Journal of the Korean Electrochemical Society
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    • v.5 no.2
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    • pp.57-61
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    • 2002
  • In this study, the effect of ammonium chloride on the electrodeposition of CoP magnetic alloy film was investigated. The correlation between the electrodeposition condition and the magnetic properties was tried to elucidate by the electro- analytical tests such as cyclic voltammetry. It was observed that the magnetic properties of the films were varied extensively with the ammonium chloride contents in the solution. The reason why the magnetic properties of the films were varied with the addition of ammonium chloride was thought that the addition of ammonium chloride controlled the electrocrystallization of CoP kinetically by charge transfer and increased the grain size and the orientation factor. This may cause the variation of the magnetic properties of CoP films.

Wet Etch Characteristics of Magnetic Thin Films (자성 박막의 습식 식각 특성)

  • 변요한;정지원
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.2
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    • pp.105-109
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    • 2002
  • The wet etching characteristics of magnetic materials such as NiFe and CoFe were investigated in terms of etch rate and etch profile by using variouus etching solutions (etchants). Among the various etching solutions, HNO$_3$, HCl, and H$_2$SO$_4$were selected for the etching of magnetic materials and showed distinct results. In the case of NiFe films, faster etch rate were obtained with HNO$_3$solution. When NiFe films ere etched with HCl solution, white etch residues were found on the surface of etched films. From FEAES analysis of these etch residues, they were proved to be by-product from the reaction of NiFe with Cl element. CoFe thin films showed the similar trend to the case of NiFe films. They were etched fast in HNO$_3$ solution while Chl solution represented slow etching. The etch profiles of CoFe films showed smooth etch profile but revealed the partial etching around the patterns in HNO$_3$solution of relatively high concentration. It was observed that the etched surface was clean and smooth, and that white etch residues were also remained on the etched films.

Fabrication and Sensor Properties of Garnet Thin Films for Magneto-Optic Electrical Current and Magnetic Field Sensor (광자기 전류 자장 센서용 가넷 박막의 제조 및 센서 특성)

  • 김덕실;조재경
    • Journal of the Korean Magnetics Society
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    • v.8 no.2
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    • pp.74-78
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    • 1998
  • High quality single cystal Bi, Gd : YIG films have been grown on GCMZGG wafers by LPE techniques. The magnetic, magneto-optic and sensor properties of the films have been investigated. The films showed high linearity with almost no hystersis, saturaton Faraday rotation angle of 45$^{\circ}$, saturation field of about 1.1 kOe, Verdet constant of 5.6$^{\circ}$ /(Oe, cm) at room temperature, and temperture coefficient of Verset constant of 0.0056$^{\circ}$ /(Oe, cm, $^{\circ}C$) in the range of 0 $^{\circ}C$~100 $^{\circ}C$. The sensor made out of the film exhibited highly linear signal in the range of 3 A-300 A.

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Effect of a Ferromagnetic Layer Thickness on a Narrow Domain Wall Width (좁은 자벽의 두께에 강자성층의 두께가 미치는 영향)

  • Lim, Ho-Tack;You, Chun-Yeol
    • Journal of the Korean Magnetics Society
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    • v.15 no.6
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    • pp.303-306
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    • 2005
  • Effect of a ferromagnetic layer thickness on a narrow domain wall width is investigated. It is found that the narrow domain wall is formed in ferromagnetic/nonmagnetic/ferromagnetic multi layer structure with a loc at interlayer exchange coupling, and that the width of the narrow domain wall is affected by the ferromagnetic layer thickness. We performed micromagnetics simulations for the $Fe_1/Cr/Fe_2$ system with the local interlayer exchange coupling, with fixed thickness (20-nm) of $Fe_2$ layer and various $Fe_1$ layer thickness (1, 2, 4, and 6 nm). Consequently, we confirmed that the thinner the $Fe_1$ layer thickness, the thinner the width of the domain wall is formed, because of the surface energy nature of the interlayer exchange coupling.

A Study on Structure and Magnetic Properties of Fe-N Thin Films with Different DC Magnetron Sputtering Power and Time (증착 Power의 세기와 시간에 따른 Fe-N 박막의 구조와 자성 특성)

  • Han, Dong-Won;Park, Won-Uk;Kim, Jong-Woo;Kwon, Ah-Ram
    • Journal of the Korean institute of surface engineering
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    • v.50 no.2
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    • pp.119-124
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    • 2017
  • Due to the high saturation magnetization (~2.4 T), $Fe_{16}N_2$ is interesting for the thin film application such as an actuator, data record storage and sensor etc. In this study, Fe-N thin films were deposited on Si(001) substrate with various power and deposition time by DC magnetron sputtering, in order to get high portion of $Fe_{16}N_2$ phase. Surface morphology, phase formation and magnetic properties were measured. As a result, Saturation magnetization and Remanence magnetization reach to ~2.45 T and 1.41T. But, Coercivity was not enough in this experiments. Its value lower than 100 Oe. Which is very close to theoretical value.

Properties of Fe-based Soft magnetic Thin Film with Hybrid Structures (Hybrid 구조의 Fe계 연자성 박막의 특성)

  • 송재성;이원재;허정섭;김현식;오영우
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.11
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    • pp.963-968
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    • 2000
  • Magnetic properties and microstructures of Fe$\_$93-x/Zr$_3$B$_4$Ag$\_$x/ thin films were investigated as a function of addition of element Ag, (X$\_$Ag/=0 to 6 at.%) and annealing temperature, T$\_$a/=300$\^{C}$ to 600$\^{C}$. In the case of adding Ag, magnetic properties of Fe$\_$93-x/Zr$_3$B$_4$Ag$\_$x/ thin films were improved than those of Ag-free Fe$\_$93/Zr$_3$B$_4$thin films. The prominent soft magnetic properties with coercivity of 1.1 Oe, saturation magnetization of 2.2 T and permeability of 5400 at 50㎒ were obtained from Fe$\_$88/Zr$_3$B$_4$Ag$\_$5/ thin film annealed was lower than that of Fe-base or Co-base thin films reported previously. Such enhanced magnetic properties are presumably attributed to the format in ultra fine grains. Also, the reduced eddy current loss in the annealed sample is due to refined micro magnetic domains with increasing the amount of Ag in Fe$\_$93-x/Zr$_3$B$_4$Ag$\_$x/ thin films.

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ZnNiO thin films deposited by r.f. magnetron sputtering method (RF Magnetron Sputtering법으로 증착된 ZnNiO박막의 특성)

  • 오형택;이태경;김동우;박용주;박일우;김은규
    • Journal of the Korean Vacuum Society
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    • v.12 no.4
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    • pp.269-274
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    • 2003
  • The electrical, optical and structural properties of ZnNiO thin _ films deposited on Si substrates using rf-magnetron sputtering method have been investigated before and after the thermal annealing processes. The crystallinity of the ZnNiO thin film become degraded with increasing the Ni contents. This is mainly because the lattice of the thin film was expanded due to the oxygen-deficient conditions. Concerning the electrical properties of the thin film, the carrier concentration increases ($6.81\times10^{14}\textrm{cm}^{-2}$) and Hall mobility decreases (36.3 $\textrm{cm}^2$/Vㆍs) with higher doping concentration of Ni. However, the carrier concentration and Hall mobility became low ($1.10\times10^{14}\textrm{cm}^2$ and high (209.6 $\textrm{cm}^2$/Vㆍs), respectively, after the thermal annealing process at $1000 ^{\circ}C$. We also observed a strong luminescene center peaking at 546 nm in photoluminescence spectra, which was caused by a deep level center in the ZnO band gap with oxygen deficient ZnNiO structure.