• Clean Technology
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• v.29 no.4
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• pp.255-261
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• 2023

Power semiconductors are semiconductors used for power conversion, transformation, distribution, and control. Recently, the global demand for high-voltage power semiconductors is increasing across various industrial fields, and optimization research on high-voltage IGBT components is urgently needed in these industries. For high-voltage IGBT development, setting the resistance value of the wafer and optimizing key unit processes are major variables in the electrical characteristics of the finished chip. Furthermore, the securing process and optimization of the technology to support high breakdown voltage is also important. Etching is a process of transferring the pattern of the mask circuit in the photolithography process to the wafer and removing unnecessary parts at the bottom of the photoresist film. Ion implantation is a process of injecting impurities along with thermal diffusion technology into the wafer substrate during the semiconductor manufacturing process. This process helps achieve a certain conductivity. In this study, dry etching and wet etching were controlled during field ring etching, which is an important process for forming a ring structure that supports the 3.3 kV breakdown voltage of IGBT, in order to analyze four conditions and form a stable body junction depth to secure the breakdown voltage. The field ring ion implantation process was optimized based on the TEG design by dividing it into four conditions. The wet etching 1-step method was advantageous in terms of process and work efficiency, and the ring pattern ion implantation conditions showed a doping concentration of 9.0E13 and an energy of 120 keV. The p-ion implantation conditions were optimized at a doping concentration of 6.5E13 and an energy of 80 keV, and the p+ ion implantation conditions were optimized at a doping concentration of 3.0E15 and an energy of 160 keV.

• Applied Chemistry for Engineering
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• v.9 no.7
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• pp.990-997
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• 1998

In this work, the $SiO_2$ films on the silicon substrate with different orientations were first prepared by the low temperature process using the ECR plasma diffusion as a function of microwave power and oxidation time. Before and after thermal treatment, the surface morphology, Si/O ratio from physicochemical properties, and the electrical properties of the oxide films were also investigated. The oxidation rate increased with microwave power, while surface morphology showed the nonuniform due to etching. The film quality, therefore, was lowered with increasing the defect by etching and the content of positive oxide ions in the oxide films from bulk by higher self-DC bias. The content of positive oxide ions in the oxide films with different Si orientations showed Si(100) < Si(111) < poly Si. The defects in $Si/SiO_2$ interface of $SiO_2$ film could be decreased by annealing, while $Q_{it}$ and $Q_f$ were independent of thermal treatment and the dependent on concentration of reactive oxide ions and self-DC bias of substrate. At microwave power of 300, and 400 W, the high quality $SiO_2$ film that had lower surface roughness and defect in $Si/SiO_2$ interface was obtained. The value of interface trap density, then, was ${\sim}9{\times}10^{10}cm^{-2}eV^{-1}$.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.7
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• pp.667-674
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• 2020

The adsorption of reactive orange 16 (RO 16) dye by activated carbon was investigated using the amount of adsorbent, pH, initial concentration, contact time and temperature as adsorption variables. The investigated process parameters were separation coefficient, rate constant, rate controlling step, activation energy, enthalpy, entropy, and free energy. The adsorption of RO 16 was the highest at pH 3 due to the electrostatic attraction between the cations (H⁺) on the surface of the activated carbon and the sulfonate ions and hydroxy ions possessed by RO 16. Isotherm data were fitted into Langmuir, Freundlich and Temkin isotherm models by applying the evaluated separation factor of Langmuir (RL=0.459~0.491) and Freundlich (1/n=0.398~0.441). Therefore, the adsorption operation of RO 16 by activated carbon was confirmed as an appropriate removal method. Temkin's adsorption energy indicated that this adsorption process was physical adsorption. The adsorption kinetics studies showed that the adsorption of RO 16 follows the pseudo-second-order kinetic model and that the rate controlling step in the adsorption process was the intraparticle diffusion step. The positive enthalpy change indicated an endothermic process. The negative Gibbs free energy change decreased in the order of -3.16 <-11.60 <-14.01 kJ/mol as the temperature increased. Therefore, it was shown that the spontaneity of the adsorption process of RO 16 increases with increasing temperature.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.7
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• pp.1193-1203
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• 2000

In this study, in order to remove Cd(II) from aqueous solutions, strongly acidic cation exchange resin(SK1B) by Diaion Co. was employed as an adsorbent. Experiments were mainly performed in two parts at room temperature($25{\pm}5^{\circ}C$) : batch tests and adsorption kinetics tests. In batch tests adsorption equilibrium time, pH effects, temperature effects, several adsorption isotherms, and finally desorption tests were examined. In differential bed tests, an optimum flow rate and an overall adsorption rate were obtained. In the batch experiment, adsorption capability increased with pH and became constant above pH 6 and adsorption quantity increased with temperature. Batch experimental data found that Freundlich and Sips adsorption isotherms were more favorable than Langmuir adsorption isotherm over the range of concentration (5~15ppm). The desorbent used in the desorption test was hydrochloric acid solution with different concentrations(0.01~2N). The degree of regeneration increased with concentration of desorbent and decreased slightly with the number of regeneration. In the continuous flow process using a differential bed reactor, the optimum flow rate was $564m{\ell}/min$ above which the film diffusion resistance was minimized. The overall adsorption rate for the removal of Cd(II) by cation exchange resin was found as follows ; $r=1.3785C_{fc}^{1.2421}-2.0907{\times}10^{0.0746C_i}\;q_e^{0.0121C_i-0.0301}$

• Applied Chemistry for Engineering
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• v.19 no.2
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• pp.228-235
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• 2008

Nickel plating thickness increased with the electric current density, and the augmentation was more thick in $6{\sim}10A/dm^2$ than low current. Hull-cell analysis was tested to evaluate the current density. Optimum thickness was obtained at a temperature of $60^{\circ}C$, and the pH fluctuation of 3.5~4.0. Over the Nickel ion concentration of 300 g/L, plating thickness increased with the current density. The rate of decrease in nickel ion concentration was increased with the current density. The quantity of plating electro-deposition was increased at the anode surface, which was correlated with the increase of plating thickness. The plating thickness was increased because of the quick plating speed. However, the condition of the plating surface becomes irregular and the minuteness of nickel plating layer was reduced with the plating rate. After the corrosion test of 25 h, it was resulted in that maintaining low electric current density is desirable for the excellent corrosion resistance in lustered nickel plating. According to the program simulation, the thickness of diffusion layer was increased and the concentration of anode surface was lowered for the higher current densities. The concentration profile showed the regular distribution at low electric current density. The field plating process was controlled by the electric current density and the plating thickness instead of plating time for the productivity. The surface physical property of plating structure or corrosion resistance was excellent in the case of low electric current density.

• Korean Chemical Engineering Research
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• v.43 no.1
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• pp.118-124
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• 2005

In this study, a novel deposition method of Pt catalysts onto Nafion membranes modified with polypyrrole (PPy) has been proposed for PEMFC application. The PPy/Nafion composite membranes were fabricated by chemical polymerization of pyrrole using $FeCl_3$ and $Na_2S_2O_8$ as initiator. The proton conductivity and water uptake of the chemically prepared PPy/Nafion composites were investigated. The ionic conductivity and water uptake of PPy/Nafion composite membrane prepared with $Na_2S_2O_8$ were decreased with polymerization time of pyrrole. In the case of $FeCl_3$, the ionic conductivity was almost retained and the water uptake was decreased with polymerization time of pyrrole. When the Pt particle was deposited on PPy/Nafion composites membrane by chemical reduction of $H_2PtCl_6$, the Pt loading on Nafion membrane was enhanced by polypyrrole due to electronic conduction property. The performance evaluation with membrane electrode assembly composed of Pt/PPy/Nafion composite and diffusion electrode was carried out using a single cell. As a result of fuel cell test, current density of $569mA/cm^2$ at 0.3 V has been obtained for MEA contained with Pt/PPy/Nafion composite. This study shows that direct deposition of Pt catalysts on Nafion impregnated polypyrrole is a promising method to prepare thin catalyst layer for the PEMFC.

• Journal of the Korean Chemical Society
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• v.20 no.6
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• pp.469-478
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• 1976

Clinoptilolite zeolite samples were treated with hydrochloric acid, sulfuric acid and phosphoric acid of different strength and the adsorption characteristics and crystal structures of the original and acid-treated clinoptilolites were studied. By treating with hydrochloric acid, the adsorbed amount increased to 5-fold for nitrogen, to 3-fold for benzene, but for methanol no significant change was observed. As acid strength increased further, there were declines both in adsorption capacity and crystallinity. The results showed that the increase of adsorbed amount was caused by the rearrangement of the pore entrance and cation exchange. A method for determination of clinoptilolite content in natural mineral based on benzene adsorption on acid-treated sample is proposed. By this method, the original sample used in this study was found to contain approximately 40% of clinoptilolite. Using pulse technique in micro-catalytic reactor system, the catalytic activities of hydrochloric acid-treated clinoptilolites in cumene cracking and toluene disproportionation reactions were measured. For cumene cracking reaction, the maximum conversion was observed for the 0.5 N hydrochloric acid-treated sample. It is instructive to note that the maximum benzene adsorption was also observed for the sample treated with 0.5 N HCl. This suggest that the conversion rate was determined mainly by the rate of transport of reactants and the products through the pore structure. In the toluene disproportionation reaction, the same trend was observed. But the rate of deactivation was high for samples with strong acid sites. Since catalyst having higher activity was deactivated more easily, the conversion maximum was shifted to the sample treated with higher concentration of acid, -1N. The catalytic activity of $Ca^{2+} and La^{3+} ion exchanged samples for the toluene disproportion was much lower than that of acid-treated samples. Introduction of Ca^{2+} and La^{3+}$ into the pore structure apparently decreases the effective pore diameter of acid-treated clinoptilolite thus limiting the diffusion of reactants and products.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.164-164
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• 2016

항만 및 해양 구조물은 육상과는 비교할 수 없을 정도로 가혹한 해수 환경에서 사용되며 계속적으로 부식 손상을 받는다. 따라서 강구조물이 장기적으로 안전하게 사용되기 위해서는 적절한 방식은 물론 철저한 유지관리가 필수적이다. 한편, 현재 해양환경 중 항만, 조선, 해양산업 등에 많이 이용되는 강구조물은 이에 대응하기 위하여 일반적으로 도장방식이나 음극방식이 사용되고 있다. 음극방식은 피방식체를 일정전위로 음극 분극하는 원리로써 외부전원을 인가하거나 비전위의 금속을 희생양극으로 연결하여 방식하는 방법이다. 이와같이 해수 중 음극방식을 실시할 경우 해수 중 용존하는 많은 이온들 중에서 특히 $Ca^{2+}$ 이나 $Mg^{2+}$ 이온이 탄산칼슘, 수산화마그네슘을 주성분으로하는 화합물로 형성된다. 이렇게 생성된 전착막은 산소 확산을 방지하는 물리적 장벽을 형성하고 부식율을 감소시키는 것으로 보고되고 있다. 그러나 전착막은 소지 금속과의 결합력이 불균일 함은 물론 막을 형성하는데 있어서 장시간이 소요된다는 단점이 있다. 따라서 본 연구에서는 해수 중 음극방식 응용 원리에 의해 전착막을 형성하고, 석출속도, 밀착성 및 내식특성을 향상시키기 위해 해수 중 기체를 용해시켜 제작한 막의 특성을 분석-평가하였다. 본 연구에 사용된 기판(substrate)은 일반구조용 강(SS400)을 사용하였으며, 면적은 $70mm{\times}30mm$, 두께는 1 mm로 제작하여 실험을 진행하였다. 외부전원은 정류기(Rectifier, xantrex, XDL 35-5T)를 사용하여 3 및 $5A/m^2$ 의 조건으로 인가하였고, 양극은 Carbon Rod를 사용하였다. 이때 해수에 주입한 이산화탄소의 양은 0.5 NL/min 였다. 각 조건별로 제작된 전착막에 대해 외관관찰, 석출량, 모폴로지, 조성원소 및 결정구조 분석을 실시하였고, 밀착성 및 내식특성을 평가하기 위해 테이핑 테스트(Taping Test, JIS K 5600-5-6)와 3.5 % NaCl 용액에서 전기화학적 양극 분극 시험을 진행하였다. 시간에 따른 전착막의 외관관찰 결과 전류밀도의 증가와 함께 상대적으로 많은 피막이 형성되었고, 용해시킨 기체에 의해 더 치밀하고 두터운 피막이 형성됨을 확인할 수 있었다. 성분 및 결정구조 분석 결과 $Mg(OH)_2$ 성분의 Brucite 및 $CaCO_3$ 성분의 Calcite 구조 및 Aragonite 구조를 확인하였으며, 용해시킨 기체의 영향으로 $CaCO_3$ 성분의 Aragonite 구조가 상대적으로 많이 검출되었다. 이는 해수 중 용해된 이산화탄소의 영향으로 인해 풍부한 ${CO_3}^{2-}$ 이온이 형성되고 용액 pH를 낮게 유지시켜 Ca 화합물 형성이 용이한 환경이 조성되는 것으로 판단된다. 밀착성 및 내식성 평가를 실시한 결과 해수중 용해시킨 기체에 의해 제작한 시편의 경우 견고하고 화학적 친화력이 높은 Aragonite 결정이 표면을 치밀하게 덮어 전해질로부터 산소와 물의 침입을 차단하는 역할을 하여 기체를 용해시키지 않은 $3A/m^2$ 및 $5A/m^2$ 보다 비교적 우수한 밀착성 및 내식 특성을 보이는 것으로 사료된다.

• Membrane Journal
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• v.12 no.1
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• pp.41-50
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• 2002

The streaming potential generated by the electrokinetic flow within electric double layer of charged microchannel is applied to determine the zeta potential of hollow-fiber membrane pore by using the general Helmholtz-Smoluchowski equation. The streaming potential is know to provide a useful real-time information on the surface property and the interaction between pore and particles in actual situations and physicochemical conditions. The influence of physicochemical parameters upon the filtration with hollow-fibers has been examined with an in-situ and simultaneously monitoring the streaming potential as well as permeate flux. In particular, the present study examined an experimental method to identify the effect of cake layer which can vary according to the axial position of a hollow-fiber and the progress of membrane fouling by measuring the position-dependent streaming potential. As the latex concentration increases, the permeate flux decreased but the streaming potential increased. The growth of cake layer has been mire developed with increasing latex concentration, however, the effect of surface charges of latexes deposited on the membrane surface leads to increase the streaming potential. With increasing ionic concentration of KCI, both the permeate flux and the streaming potential decrease. The increase of ionic concentration provides a compact cake layer due to the shrinkage of Debye length and the decreased streaming potential results from the weakened ionic flows owing to a thin diffusive double layer.

• Journal of Adhesion and Interface
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• v.15 no.1
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• pp.22-30
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• 2014

Self-photoinitiating acrylate (SPIA) which can undergo self-initiation under UV irradiation was synthesized by a Michael addition in the presence of a base catalyst. The SPIA polymerizations were investigated by photo-differential scanning calorimeter (photo-DSC) and surface physical properties such as pendulum hardness and pencil hardness. The results showed that the SPIA can cure upon UV irradiation by itself without a photoinitiator. But we found out that both the curing rate and the conversion were too low for the self-curing reaction of SPIA. In order to improve the SPIA curing properties, we introduced the SPIA/cationic hybrid system and observed the effects of the addition of commercial free radical type monomer and photoinitiator on the curing behaviors. SPIA/cationic hybrid system was the best suitable to improve the SPIA curing properties. The kinetic analysis indicated that the cationic monomer and photoinitiator apparently accelerated the cure reaction and rate of the hybrid SPIA system, mostly due to the synergistic effect of cationic monomer and photoinitiator increasing the mobility of active species and the generation of reactive species (free radical, cation) during the photopolymerization process. The physical properties showed that, unlike typical free radical system, the hybrid systems did not show oxygen inhibition effect because of cationic reaction on the coating surface.