• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.329-329
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• 2010

반도체 및 디스플레이의 진공부품은 알루미늄 모제에 전해연마법(electrolytic polishing), 양극산화피막법(Anodizing), 플라즈마 용사법(Plasma spray) 등을 사용하여 $Al_2O_3$ 피막을 성장시켜 사용되고 있다. 반도체 제조공정 중 30~40% 이상의 비중을 차지하는 식각(etching) 및 증착(deposition) 공정은 대부분 플라즈마를 사용하고 있다. 플라즈마에 의해 화학적, 물리적 침식이 발생하여 코팅막에 손상을 일으켜 코팅막이 깨지거나 박리되면서 다량의 Particle을 생성함으로써 생산수율에도 문제를 야기 시킨다고 알려져 있다. 하지만 이들 코팅막을 평가하는 방법은 거의 전무하여 산업계에서 많은 애로를 겪고 있다. 이러한 코팅부품의 내플라즈마 성능평가 방법과 기준이 없어 적절한 교체시기를 파악하기 위한 코팅부품의 손상정도를 정량화 및 평가 방법의 표준화를 구축하는 연구를 수행하였다. 본 연구에서는 이러한 소재의 특성평가를 위해 공정에서 사용 중 손상되어 교체된 샘플의 모폴로지 관찰하고 내전압 측정으로 전기적 특성을 분석하여 손상 전, 후의 변화를 관찰하였다. 또한 플라즈마의 영향에 따른 코팅 막 형태 변화 및 전기적 특성의 변화를 알아보기 위하여 양극산화피막법(Anodizing)으로 $Al_2O_3$를 성장시킨 평가용 샘플을 제작한 후, Plasma chamber 장비를 이용하여 플라즈마 처리에 따른 코팅막의 내전압, 식각율, 표면 미세구조의 변화를 측정하였고 이를 종합적으로 고려하여 진공 장비용 코팅부품의 공정영향에 의한 내플라즈마 특성평가방법 개발에 관하여 연구하였다. 이러한 실험을 통해 플라즈마 처리 후 코팅 막에 크랙이 발생되는 것을 확인할 수 있었고 코팅 막의 손상으로 전기적 특성이 감소를 것을 확인할 수 있었다. 또한 ISPM 장비를 이용하여 진공 장비용 코팅부품이 플라즈마 공정에서 발생하는 오염 입자를 측정할 수 있는 방법을 연구하였다. 이러한 결과를 이용하여 진공공정에서 사용되는 코팅부품이 플라즈마에 의한 손상정도를 정량화 하고 평가방법을 개발하여 부품 양산업체의 진공장비용 코팅부품 개발 신뢰성 향상이 가능할 것으로 본다.

• Journal of Welding and Joining
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• 제19권1호
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• pp.95-103
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• 2001

The properties of the detonation sprayed cermet coating are investigated through the mechanical, corrosion and erosion test. The test results are also compared with the properties of the substrate materials, STS 329J1, dual phase stainless steel and the plasma sprayed cermet coatings. The two kinds of carbide cermet power, WC+NiCr, Cr$_3$C$_2$+NiCr were used in this experiment. The experimental results showed that the anti-corrosive and anti-erosive properties of the detonation sprayed cermet coatings are superior to the plasma sprayed cermet coatings. The WC+NiCr cermet coating appears to be more effective than Cr$_3$C$_2$+NiCr cermet coating in abrasive erosion environment, whereas the Cr$_3$C$_2$+NiCr cermet coatings are more effective in cavitation erosion environment.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2003년도 춘계학술발표대회 개요집
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• pp.114-116
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• 2003

The multi function sprayed coating is used for direct-heating, wear resistance and high bonding strength. The merits of surface direct-heating coatings are short warming time, low power consumption and better wear resistance that can be used in many organization parts. In this study, the surface direct-heating and wear resistance can be improved by spraying the proper materials on the surface $Al_2$O$_3$40%TiO$_2$ powder and Ni-20%Cr powder that had the properties of conduction and high wear resistivity are used in order to improve wear resistance, electrical properties and bonding strength.

• Journal of Advanced Marine Engineering and Technology
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• 제13권2호
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• pp.64-77
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• 1989

In this study, the experiments were carried out for the purpose of establishment of aluminium cementation to steel surface by diffusible heat treatment after making the coated film onto the substrate by arc spray method. Also, the microstructure and mechanical properties of the cementation layer produced by this study were inspected for various heat treatment and spraying conditions. Main results obtained are as follow ; 1. The coating film characteristics which have excellent errosion-resistance, high temperature oxidation-resistance are obtained by aluminium penetration heat treatment after making the sprayed aluminum coating film onto the steel substrate. 2. Aluminium diffusion penetration takes place at higher temperature than 660.deg.C, and the more heat treatment time and the higher heat treatment temperature adopted, the deeper diffusion layer obtained. 3. Insert gas arc spraying using argon gas as the carrier gas higher improvement of mechanical property than that of compressed air environment. 4. The coating film characteristics appeared to be improvement of adhesive property, porosity plugging effect by heat treatment in air environment.

• 한국건축시공학회지
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• 제16권2호
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• pp.107-115
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• 2016

본 연구에서는 금속용사 시스템을 수처리 시설 콘크리트 구조물의 방수/방식 공법으로 사용하기 위하여 콘크리트 표면처리 방법에 따른 기초적 성능 평가 실험을 진행하였다. 실험결과 Sa-P-R-(S)(샌딩-침투성표면강화제-조면형성제-봉공처리)의 경우가 3.57MPa로 가장 높은 부착성능을 나타냈다. 부착성능이 확보된 면처리 방법을 기반으로 투수성, 투기계수 측정실험을 진행하였다. 실험 결과 Sa-P-R-(S)의 경우가 각각 $0.68{\times}10^{-8}cm/sec$, $0.45{\times}10^{-16}m^2$로 가장 우수한 성능을 나타내었다. 또한 SEM분석 결과 침투성 표면강화제를 도포한 실험체가 그렇지 않은 경우에 비해 콘크리트의 미세 구조가 더 치밀한 것을 확인 할 수 있었으며, 이러한 구조로 인해 침투제를 도포한 경우의 실험체에서 가장 높은 부착성능이 나타난 것으로 판단된다. 따라서 콘크리트의 표면 처리 방법은 금속용사 시스템을 적용하는데 있어, 매우 중요한 영향을 미치는 것으로 판단되며, 본 연구를 통하여 Sa-P-R-(S)의 경우가 수처리 시설 콘크리트 구조물의 적용하기에는 가장 적합한 면처리 방법이라 판단된다.

• 한국구조물진단유지관리공학회 논문집
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• 제24권3호
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• pp.87-95
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• 2020

EIS를 이용한 아크 금속용사 표면처리기법이 적용된 강재의 콘크리트 내 부식거동에 관한 실험적 연구로서 콘크리트 내부환경을 모사한 Ca(OH)₂ 포화수용액 침지 및, NaCl 수용액에서의 침지실험을 통해 부식거동을 실험하였다. Nyquist plot의 분석을 통하여 등가회로를 도출하였으며 Ca(OH)₂ 수용액에서의 계면저항과 분극저항을 비교한 결과 계면저항은 Al ATMS가 가장 우수하였으며 분극저항은 Zn ATMS가 가장 우수한 것으로 나타났다. 시멘트 모르타르에 금속용사 표면처리 된 강재를 매립후 NaCl 수용액에 침지하여 침지 시간에 따른 임피던스 측정에서는 초기 침지 임피던스 측정값은 Zn ATMS시험체가 가장 높았으나 침지 2주후에는 Al ATMS 시험체의 임피던스가 가장 높고 안정적으로 나타났다. 이는 이온화 경향이 높은 Al이 강알칼리 환경에서 지속적으로 산화하며 피막을 형성하였으며, 염소 이온의 침투로부터 강재를 보호하기 때문으로 판단된다.

• 한국자동차공학회논문집
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• 제24권3호
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• pp.285-293
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• 2016

The high velocity oxygen fuel(HVOF) thermal spray is a kind of surface modification techniques to produce the sprayed coating layer. This process is to form the coating layer after spraying the powder to molten or semi-molten state by the ultra-high speed at the high-temperature heat source and conflicting with a substrate. The efficiency of thermal spraying is dropped, however, because the semi-molten powder in a spray process become a factor that degrades the mechanical property by the formed pore within the coating layer. Therefore, it is necessary to melt completely the thermal spray powder in order to produce the coating layer with an optimal adhesive force. In this study, to improve the wear resistance, corrosion resistance and heat resistance, the plungers of high-speed and ultra-high pressure reciprocating hydraulic pumps used in ironworks are manufactured with STS $420J_2$ and are coated by the powders of WC-Co-Cr and WC-Cr-Ni including the WC of high hardness using a HVOF thermal sprayer developed in this laboratory. These are called by the surface-modified plungers. The surface roughness, hardness, and surface and cross-sectional microstructure of these two surface-modified and conventional ceramic plungers are measured and compared before operation with after operation for 100 days. It is found that the values of centerline average surface roughness and maximum height for conventional ceramic plunger are 9.5 to 10.8 and 5.2 to 5.7 times higher than those of surface-modified ones coated by WC-Co-Cr and WC-Cr-Ni because the fine tops and bottoms on surface roughness curve of conventional ceramic plunger are approximately 100 times higher than those of surface-modified ones. In addition, the pores and scratches in the surface microstructure are considerably formed in the order of conventional ceramic, WC-Cr-Ni and WC-Co-Cr surface-modified plungers. The greater the WC content of high hardness powder is less the change in the plunger surface.

• Journal of Welding and Joining
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• 제27권2호
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• pp.38-43
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• 2009

In this study, we investigated photocatalytic ability of plasma sprayed $TiO_2$ and Ag sputtering $TiO_2$(Ag-$TiO_2$) coatings. A sputtering processes were adopted to coat the surface of $TiO_2$ with Ag(99.99%). Ag was sputtered at 10mA, 450V for $1{\sim}11$ seconds. $TiO_2$ and Ag-$TiO_2$ coatings were heat-treated at 250, 300, 350, $400^{\circ}C$ for $0{\sim}240$seconds. Photoelectrical conductivity was measured by four-point probe, and photodegradation was calculated by UV-V is spectrometer. Microstructure observation of $TiO_2$ and Ag-$TiO_2$ coatings were investigated by SEM. Crystal structure of $TiO_2$ and Ag-$TiO_2$ coatings were investigated by XRD. Qualitative analyses of $TiO_2$ and Ag-$TiO_2$ coatings were conducted by EDX. When $TiO_2$ coatings were heat-treated at $350^{\circ}C$ for 30 sec, photoelectrical conductivity and photodegradation were best. And in XRD analysis result, (101)/(110) relative intensity ratio of $TiO_2$(rutile) was comparably changed with photoelectrical conductivity. When Ag-$TiO_2$ coatings were heat-treated at $350^{\circ}C$ for 30 [sec] after sputtering Ag for 7 sec, Photoelectrical conductivity and photodegradation are best. Surface of coatings in such condition has very small and uniform Ag particles.

• 한국재료학회지
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• 제24권2호
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• pp.116-122
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• 2014

$Bi_2Sr_2CaCu_2O_x$(Bi-2212) and $Bi_2Sr_2Ca_2Cu_3O_y$(Bi-2223) high-Tc superconductors(HTS) have been manufactured by plasma spraying, partial melt process(PMP) and annealing treatment(AT). A Bi-2212/2223 HTS coating layer was synthesized through the peritectic reaction between a 0212 oxide coating layer and 2001 oxide coating layer by the PMP-AT process. The 2212 HTS layer consists of whiskers grown in the diffusion direction. The Bi-2223 phase and secondary phase in the Bi-2212 layer were observed. The secondary phase was distributed uniformly over the whole layer. As annealing time goes on, the Bi-2212 phase decreases with mis-orientation and irregular shape, but the Bi-2223 phase increases because a new Bi-2223 phase is formed inside the pre-existing Bi-2212 crystals, and because of the nucleation of a Bi-2223 phase at the edge of Bi-2212 crystals by diffusion of Ca and Cu-O bilayers. In this study the spray coated layer showed superconducting transitions with an onset Tc of about both 115 K, and 50 K. There were two steps. Step 1 at 115 K is due to the diamagnetism of the Bi-2223 phase and step 2 at 50 K is due to the diamagnetism of the Bi-2212 phase.

• Journal of Welding and Joining
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• 제25권4호
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• pp.28-34
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• 2007

The heating unit of direct heating method manufactured as the plasma spray coating of $TiO_2/NiCr$ conductive heating material on the surface of heating unit in order to improve the disadvantages of indirect heating method. $TiO_2$ and NiCr (80wt.%Ni-20wt.%Cr) that had the properties of conduction and heating was chosen for the conductive heating material. The compositions of the composite powders were studied $TiO_2-30wt.%NiCr\;and\;TiO_2-10wt.%NiCr$. As the heating temperature was increased, the hardness of heating layer was increased because of the fine microstructure and the decrease of porosity. The adhesion strength was decreased for coarsening and connection of voids in the insulation layer, and the electrical resistivity of heating layer was increased for fine crack formation and growth. In this study, the best efficient sprayed coatings with heating unit was concluded as the plasma sprayed $TiO_2-10wt.%NiCr$ coatings that was heat treated at $300^{\circ}C$.