• Korean Chemical Engineering Research
• /
• v.45 no.2
• /
• pp.203-207
• /
• 2007

In this paper efficient method for particle removal from silicon wafers by usage of HF and ozone was studied. It was found that at least 0.3 vol% concentration of HF was required for particle removal and removal efficiency increased with the application of megasonic in ozonated water. Additional cleaning with minute amount of ammonia (0.01 vol%) after HF/Ozone step showed over 99% in removal efficiency. It is proposed that the superior cleaning efficiency of HF-Ozone-ammonia is due to micro-etching of silicon surface and impediment of particle re-adsorption in alkali environment. Compared to SC-1 cleaning method micro roughness has also been slightly improved. Therefore it is expected that HF-ozone-ammonia cleaning method is a viable alternative to the conventional wet cleaning methods.

• Journal of Korean Society of Environmental Engineers
• /
• v.29 no.4
• /
• pp.419-424
• /
• 2007

According to increase of consumer's desire for clean tap water, advanced treatment processes include with membrane, ozone, and granular activated carbon(GAC) were introduced. In order to evaluate the effect of advanced treatment processes for residual chlorine decay and trihalomethane(THM) formation in water distribution system, dissolved organic matter(DOC) removal of each advanced treatment process was investigated. The residual chlorine decay and THM formation using bottle tests were also evaluated. $UV_{254}$ removal in all advanced treatment was better than DOC removal. Especially, DOC by ozone treated was removed as 4% in contrast with sand filtered water, but $UV_{254}$ was removed about 17%. This result might be due to convert from hydrophobic DOC to hydrophilic DOC by ozonation. Ozone/GAC process was most effective process for DOC removal. The residual chlorine decay constants in treated water by sand filtration, ozonation, GAC adsorption, and ozone/GAC processes were 0.0230, 0.0307, 0.0117 and 0.0098 $hr^{-1}$, respectively. The sand filtered water was produced 81.8 ${\mu}g/L$ of THM after 190 hours of reaction time, as the treated water by ozone, GAC, and Ozone/GAC was less produced 6.0, 26.2, 30.3% in contrast with sand filtered water, respectively. Consequently, the durability of residual chlorine and reduction of THM formation were improved by advanced treatment processes.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
• /
• 2004.04a
• /
• pp.413-416
• /
• 2004

매립장 침출수로 인해 오염된 매립장 주변 지하수 정화를 위한 실내실험을 실시하였다. 오염물로는 대표적 염화용제인 TCE와 PCE, 그리고 중금속인 As, Cd, Cr, Pb에 대하여 Air-sparging, 오존 산화법, 화학적 처리방법에 의한 정화효율 실험을 실시하였다. Air-sparging은 TCE, PCE에서 높은 제거효율을 가졌으며, 오존 산화법은 Cr, Pb에서 제거 효율이 좋았다. 반응제를 첨가한 공침방법의 경우, 모든 중금속에 대하여 소석회 첨가시 매우 높은 제거효율을 보였으며, As는 황산제일철에서, Cd, Cr, Pb는 탄산칼슘과 제올라이트 첨가시 높은 제거효율을 나타내었다. 실험결과로부터, 유기오염물과 중금속이 혼합되어 나타나는 매립장 주변 오염 지하수의 경우 휘발성 유기오염물의 제거를 위해서는 폭기방법이, 중금속의 경우에는 공침방법에 의해 수산화물, 탄산염으로 만들어 고형물로 처리하는 방법이 제거효과가 좋은 것으로 나타났다.

• Journal of Korean Society of Environmental Engineers
• /
• v.32 no.2
• /
• pp.219-226
• /
• 2010

In order to evaluate a removal characteristic of chloramphenicol, salicylic acid and ketoprofen according to dose of oxidants, $Cl_2$, $O_3$ and $O_3/H_2O_2$ are used as oxidants in this study. In case of that $Cl_2$ is used for oxidizing harmaceuticals, chloramphenicol, salicylic acid and ketoprofen is not removed entirely at $Cl_2$ dose rang of 0.5~5.0 mg/L for 60 min. However, removal tendency of salicylic acid is so obviously at $Cl_2$ dose higher than 1.0 mg/L. In addition, as $Cl_2$ dose and contact time increase, the removal rate of salicylic acid is enhanced. When $O_3$ is used as oxidant, chloramphenicol and ketoprofen is not eliminated at $O_3$ dose range of 0.2~2.0 mg/L. On the contrary, 30~70% of salicylic acid is removed at $O_3$ dose of 1.0~5.0 mg/L. Only 30% removal of salicylic acid is achieved at contact time of 5 min, however, the removal rate is enhanced remarkably at contact time over 10 min. In experiments using $O_3/H_2O_2$ as an oxidant, we can find that $O_3/H_2O_2$ is much more effective than $O_3$ only for removal of 3 pharmaceuticals, and the efficiency is raised according to increase of $H_2O_2$ dose. On reaction rate constant and half-life of 3 pharmaceuticals depending on $Cl_2$, $O_3$ and $O_3/H_2O_2$ dose, experiments using $O_3/H_2O_2$ show that oxidation of pharmaceuticals is less effective as the $H_2O_2/O_3$ ratio increases to above pproximately 1.0 related to reaction rate constant. An oxidation of salicylic acid by $Cl_2$ and $O_3$ particularly has a comparatively high reaction rate constant comparing $O_3/H_2O_2$, and thus salicylic acid is easily eliminated in oxidation processes.

• Journal of Korean Society of Environmental Engineers
• /
• v.27 no.11
• /
• pp.1162-1167
• /
• 2005

Livestock wastewater is known to be very difficult to treat because it contains highly non-biodegradable organic material. Thus the DOF(Dissolved Ozone Flotation) system and the PO2(Pressurized Ozone Oxidation) system were built at the livestock wastewater treatment plant, and characteristics of treatments were investigated in this paper. Suspended Solids(SS) removal efficiency was over 94% by DOF system. 90% of $COD_{Mn}$ was removed, from 620 mg/L down to 63 mg/L by the DOF-PO2 system. During the period of operation, $SCOD_{Cr}$ was removed an average of 82%, from 890 mg/L down to 160 mg/L. 96% of UV-254 absorbance was also removed. TP removal efficiency was over 98%, from 27 mg/L to 0.35 mg/L, and TN was also removed 68% along with suspended solids. It was possible to meet effluent standards of the livestock wastewater treatment plant by the DOF-PO2 system along with biological treatment.

• Journal of the Korean Society of Urban Environment
• /
• v.18 no.4
• /
• pp.391-399
• /
• 2018

In this study, Diazinon which is the most widely used organophosphorus pesticides (OPPs) among pesticides was removed by ozone/hydrogen peroxide advanced oxidation process (Peroxone AOP). Diazinon is mainly found in groundwater, drinking water, rivers and ponds that are near agricultural areas using the pesticide. Accumulation of Diazinon on the body in the form of metabolites causes neurotoxicity, confusion, dizziness and vomiting. Diazinon is not easily removed by conventional water treatment processes. This study investigated the Diazinon removal characteristics with OH radicals with strong oxidizing power generated by using ozone and hydrogen peroxide. We determined optimal hydrogen peroxide/ozone injection molar ratio and confirmed the elimination reaction to initial Diazinon concentration, pH and DOC concentration, which are factors influencing the removal efficiency. Domestic researches on pesticide removal in the environment are much less than the cases of overseas. This study is expected to provide a basis for the process design for pesticide removal.

• Proceedings of the Korean Environmental Sciences Society Conference
• /
• 2004.05a
• /
• pp.320-323
• /
• 2004

두가지 처리방법을 연계처리하여 실험한 결과 펜톤산화를 전처리로 적용하여 실험한 경우가 COD와 Color의 제거면에서 더 높은 처리효율을 보이고 있으며 본 연구의 실험 목적인 RFP상의 수질기준을 만족하였다. 배출수 수질 기준이 강화된 RFP상의 수질기준을 만족하기 위한 고도산화방법의 연계처리방법 중 오존산화와 펜톤산화를 조합한 결과 유기물과 색도를 고루 제거하는 펜톤산화를 전처리 공정으로 적용하고 유기물의 제거보다는 색도제거에 더 효율적인 오존처리 공정을 후처리로 둔 조합공정이 더 적합한 것으로 판단된다.

• Proceedings of the Korean Nuclear Society Conference
• /
• 1998.05b
• /
• pp.421-426
• /
• 1998

원자력발전소에서 발생되는 방사성 세탁폐액의 처리연구틀 위하여 100L/h 처리용량의 오존접촉조-활성탄탑-역삼투막-이온교환수지탑의 복합공정을 제작하고 영광 4호기에 설치하여 단위공정별 성능실험을 수행하였다. 오존에 의한 세제 제거율은 약 50％로 나타났으며, 활성탄탑을 거친후에는 거의 모든 유기물이 제거되었다. 역삼투막에 의하여 방사성핵종 제거율 설험은 원수의 부피를 1/10로 줄이는 데까지 농축도를 증가시키면서 수행하였는데, 농축도에 따라 핵종제거율이 약간 감소하는 경향은 있었으나 대체적으로 99% 정도의 제거율을 나타내었다.

• Journal of Korean Society of Environmental Engineers
• /
• v.30 no.6
• /
• pp.601-608
• /
• 2008

The objective of this study was to evaluate the effect of ozonation as pretreatment on the removal of dissolved or biodegradable organic matter(DOM or BOM), the variance of DOM fractionation, and microbial regrowth by pilot-scale granular activated carbon processes in which adsorption and biodegradability was proceeding due to long time operation. Regardless of point of ozonation applied, GAC processes with ozonation(i.e., Ozonation combined with GAC Filter-adsorber; Pre O$_3$ + F/A, Ozonation combined with GAC adsorber; Post O$_3$ + GAC) compared with GAC processes without ozonation(i.e., GAC Filter-adsorber; F/A, GAC adsorber; GAC) removed approximately 10 to 20% more of DOC, hydrophilic DOM(HPI), BDOC and AOC after long period of operation that biological activity was assumed to happen. Ozonation was not found to have a significant effect on the removal of DOC, but caused the decrease of AOC by approximately 20%. It was found that the fixed bacterial biomass on GAC media did not show a significant difference between the GAC with ozonation and GAC without ozonation as pre-treatment, whereas the HPC of column effluent was more biostable at Post O$_3$ + GAC compared with F/A or GAC.

• Proceedings of the Korea Water Resources Association Conference
• /
• 2011.05a
• /
• pp.137-137
• /
• 2011

급격한 세계인구의 증가에 의해 물 부족지역이 세계 각지로 확산되고 있다. 이에 따라, 건전한 수자원으로써 하수처리수의 재이용이 주목을 받고 있다. 하수처리수의 재이용시에는 특히, 재이용수의 미생물학적 안전성과 더불어 화학물질 등으로부터 기인할 수 있는 인체 및 생태계에의 리스크를 고려해야 한다. 미국 EPA는 병원성 미생물 뿐만 아니라 화학물질에 대한 안전성을 확보 차원에자외선/과산화수소 등의 고도산화처리법을 검토하였다. 1일 $10m^3$ 처리규모의 연속실험장치를 이용, 검토된 공정별 실제 하수 2차 처리수중에 존재하는 의약품류의 제거효과, 에너지 소비량 및 생태리스크 저감효과 등을 비교, 평가하였다. 에너지 소비량에 있어서는 공정별로 다소 차이가 있었으나, 본 실험동안 검출된 38종의 의약품류 제거에는 각 공정 모두 매우 효과적이었다. 에너지 소비측면에서는 오존 단독공정이 가장 적은 에너지 소비량에서 타 공정과 동일한 수준의 의약품류 서 막처리나 자외선 처리 등의 고도처리시설에 대한 정보를 재이용수 가이드라인에 제시하고 있는 반면, 우리나라에서는 재이용수중에 일정농도 이상의 염소가 잔류하도록 함으로써, 재이용수의 미생물학적 안전성 확보만을 고려하고 있다. 최근, 수환경분야에서는 의약품류라는 화학물질이 유럽, 미국 및 일본 등지를 중심으로 주목을 받아오고 있으며, 이들은 ng/L-${\mu}g$/L 수준으로 수환경중에서 검출되고 있다. 이들의 주요 발생원으로 하수처리시설이 지목되고 있으며, 따라서 하수처리수의 재이용시 잔류 의약품류에 의한 리스크 발생 가능성이 우려되고 있다. 이를 배경으로, 하수처리시설에서 의약품류를 효과적으로 제거할 수 있는 공정으로 오존 및 오존/자외선, 제거효과가 얻어졌다. 한편, 오존처리시 발암성 물질인 브로메이트($BrO_3^-$) 등과 같은 부생성물 생성 가능성을 고려하면, 오존 단독공정보다 상대적으로 많은 에너지를 소비하는 오존/자외선, 자외선/과산화수소 등의 고도산화처리법이 높은 적용성을 갖는 것으로 나타났다. 향후, 수자원 부족문제로 재이용수의 용도가 훨씬 다양해 질 것으로 예상된다. 그에 따라, 재이용수의 안전성 확보를 위해 보다 폭넓은 검토가 예상되지만, 현 단계에서는 오존을 포함, 다소 많은 에너지 소비가 예상되는 자외선을 이용한 고도산화처리법이 다양한 미량 화학물질의 제거에 유효한 공정으로 판단된다.