• Air Cleaning Technology
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• v.16 no.1 s.60
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• pp.50-51
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• 2003

• Air Cleaning Technology
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• v.31 no.4
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• pp.12-22
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• 2018

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3413-3417
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• 2007

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from the outdoor air introduced into clean room. In the present study, an experiment was carried out to examine the improvement of removal efficiency for the gaseous contaminants. In order to improve the gas removal efficiency, a hot water contact heat exchanger was installed upstream of the air washer to heat and humidify the incoming outdoor air before entering the air washer.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.442-447
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• 2006

In semiconductor manufacturing clean rooms, it becomes important to remove airborne molecular contaminants as well as particulate contaminant in outdoor air introduced into clean rooms. One suitable control technique for these chemical contaminants is air washing by water in an outdoor air handling unit. In order to enhance the removal efficiency of chemical contaminants the effect of adding a heating and humidifying process before an air washer was examined.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.988-992
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• 2006

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3,\;SO_x$ and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. It is desirable to recover heat from exhaust air and use it to reheat outdoor air. In the present study, an experiment was conducted to investigate the heat recovery and gas removal efficiencies of a direct atomization type heat recovery air washer.

• Proceedings of the SAREK Conference
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• 2005.06a
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• pp.152-152
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• 2005

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.22 no.10
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• pp.697-703
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• 2010

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants from the outdoor air introduced into a clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is useful for reducing the outdoor air conditioning load required to maintain a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to cool or heat the outdoor air. In the present study, numerical analysis was conducted to evaluate the recovered heat of an exhaust air heat recovery type air washer system, which is the key part of an energy saving outdoor air conditioning system for semiconductor clean rooms. The present numerical results showed relatively good agreement with the available experimental data.

• Proceedings of the SAREK Conference
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• 2008.06a
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• pp.844-849
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• 2008

In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. From the energy saving point of view, heat recovery is useful for the reduction of air conditioning energy consumption for clean room. Therefore it is desirable to recover heat from the exhaust air and use it to reheat the outdoor air. However, so far there have not been sufficient studies of analyzing the comparison of the amounts of energy consumption and saving. In the present study, an experiment was conducted to investigate the energy consumption and heat recovery of a fin-coil type air washer system for semiconductor manufacturing clean rooms.

• Proceedings of the SAREK Conference
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• 2007.06a
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• pp.208-208
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• 2007

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.24 no.4
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• pp.297-305
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• 2012

In recent large-scale semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems to heat, humidify, cool and dehumidify incoming outdoor air represents about 45% of the total air conditioning load required to maintain a clean room environment. Therefore, the energy performance evaluation and analysis of outdoor air conditioning systems is useful for reducing the outdoor air conditioning load for a clean room. In the present study, an experiment was conducted to compare the energy consumption of outdoor air conditioning systems with a simple air washer, an exhaust air heat recovery type air washer and a DCC return water heat recovery type air washer. It was shown from the present lab-scale experiment with an outdoor air flow of 1,000 $m^3/h$ that the exhaust air heat recovery type and DCC return water heat recovery type air washer outdoor air conditioning systems were more energy-efficient for the summer and winter operations than the simple air washer outdoor air conditioning system and furthermore, the DCC return water heat recovery type one was the most energy-efficient in the winter operation.