대한설비공학회:학술대회논문집 (Proceedings of the SAREK Conference)
- 대한설비공학회 2005년도 하계학술발표대회
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- Pages.152-152
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- 2005
반도체 클린룸용 에어와셔 시스템의 열회수 및 가스제거 실험
An Experiment on Heat Recovery and Gas Removal of an Air Washer System for Semiconductor Clean Room
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Yoo, Kyung-Hoon
(Aerosol and Filtration Technology Laboratory, KITECH)
;
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Yeo, Kuk-Hyun
(Aerosol and Filtration Technology Laboratory, KITECH)
- 발행 : 2005.06.29