• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2788-2793
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• 2008

A numerical analysis has been conducted for flow characteristics and performance of a micropump with piezodisk and MHD(Magnetohydrodynamics) fluid. Various micro systems which could not be considered in the past have been recently growing with the development of MEMS(Micro Electro Mechanical System) and micro machining technology. Especially, micropumps, essential part of micro fluidic devices, are being lively studies by many researchers. In the present study, the piezo electric micropump with electromagnetic resistance for electrically conducting fluids is considered. The prescribed grid deformation method is used for the displacement of the membrane. The change of the performance of the micropump and flow characteristics of the electrically conducting fluid with the magnitude of the magnetic fields, duct size, the position of the inlet and outlet duct are investigated in the present study.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.4
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• pp.39-47
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• 2005

In this paper, a novel high power micropump using active check valves in place of conventional passive check valves employed at the inlet and outlet ports is presented. It actively controls open/close motion of check valves using piezoelectric actuator for expansion/contraction of pump chamber. A prototype micropump having an effective size of $17mm{\times}8mm{\times}11mm$ is fabricated. Frequency-dependent flow rate characteristics, bi-directional flow characteristics and load characteristics are experimentally investigated using a timing control method for valve closing motion. From the obtained experimental results, it is ascertained that optimal values of the phase shift compared to the voltage to drive pump chamber are $15^{\circ}$ for inlet check valve and $195^{\circ}$ for outlet. Based on the obtained results, a sheet-type active shuttle valve that has a unified valve-body for inlet and outlet check valves is proposed. A micropump with an effective size of $10mm{\times}10mm{\times}10mm$ is fabricated and the basic characteristics are experimentally investigated.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3104-3109
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• 2007

The present study has been carried out to investigate the pumping characteristics for different figures of inlet and outlet in diffuser/nozzle based on piezoelectric micropump. Piezoelectric micropump system consists of several parts like a pumping chamber, diffuser/nozzle, piezoelectric element and tubes. Parts of the micropump connected with diffuser/nozzle and tubes have been analyzed.. The magnified parts have been classified into two different models based on their resistance. These models have been further classified into six models with each one having three different angles at the magnified parts. Each model has been compared and analyzed using the simulation tool, namely, CFD-ACE depending on their flow rates and characteristics.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.4 s.247
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• pp.350-357
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• 2006

A new valveless micropump for bi-directional application has been developed and tested. The micropump was fabricated on silicon and glass substrates by micromachining process. The micropump in this study consists of a membrane actuator, a pumping chamber, fluidic channels and two piezoelectric ceramic films. The channels and pumping chamber were etched on a glass wafer and the membrane was made on a silion wafer which is actuated by a piezoelectric ceramic (PZT) film. The geometry of the micropump was optimized by numerical analysis and the performance of the micropump was investigated by the experiments. The maximum flow rate was $323{\mu}L/min$ and the maximum back pressure was 294 Pa when the membrane actuator of $10{\times}10mm^2$ was driven at 130 Hz and 385 V.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.16 no.8
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• pp.707-713
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• 2004

A numerical analysis has been conducted for flow characteristics of piezoelectric micropumps. In the present study, FSI (Fluid-Structure Interaction) model and grid deform model have been employed for each of two different geometries of the micropumps with two different frequencies in the piezoelectric diffuser/nozzle based micropumps. The displacement of piezo disk and flow rates have been closely examined at the inlet and outlet. It has been found that the motion of the piezo disk investigated with FSI model is not in accordance with that with grid deform model. The results show that the time averaged flow rate calculated with FSI model is larger than that with grid deform model. This study presents the performance analysis of piezoelectric micropumps with two different numerical models for different types of pumps.

• Journal of Drive and Control
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• v.12 no.4
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• pp.71-76
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• 2015

The therapy of injecting a fixed amount of a prescribed drug for a predetermined time is an effective treatment in relieving pain during anticancer treatments. Due to recent medical technology development, cancer is currently classified as a disease that can be managed in the patient's lifetime. If patients were able to use a drug delivery system that was portable, sustainable and had an accurate flow control, they would be able to inject medication whenever they need. In this study we developed a piezoelectric micropump for a drug delivery system by designing a pump chamber, check valve and diaphragm. We also developed a driving circuit that consumes low power and to which we applied a variety of signals. We fabricated a portable drug delivery system with this piezoelectric micropump and driving circuit. In addition, through a performance test, we confirmed that the system can precisely control the drug flow rate.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1864-1869
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• 2003

A novel piezoelectric micropump using active check valves in place of conventional passive check valves in inlet and outlet has been proposed and investigated. It actively controls open/close motion of check valves using piezoelectric actuator for expansion/contraction of pump chamber. In this paper, bi-directional flow characteristics and load characteristics are experimentally investigated using an adequate timing control for valve closing motion with a prototype micropump fabricated with the effective size of $17{\times}8{\times}11mm^{3}$. From the experimental results, it is ascertained that optimal values of phase shift against voltage to drive pump chamber for realization of a miniaturized but powerful micropump, are $15^{\circ}$ in inlet check valve and $195^{\circ}$ in outlet. Based on the obtained results, a sheet-type active shuttle valve that has a unified valve-body for inlet and outlet check valves is proposed. A micropump with the effective size of $10{\times}10{\times}10mm^{3}$ is fabricated and basic characteristics are experimentally investigated.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.3
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• pp.362-367
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• 2012

Though a micro pump is a crucial element in miniaturized bio-fluidic systems or drug delivery systems, most of the conventional micro pumps still have some limitations to miniaturize their controller system and to obtain the sufficient back pressure which can rise over the inner pressure of human body or experimental animals. In this paper, to overcome these limitation, a new PZT disc and its controller were designed and fabricated to get the sufficient flowrate and the back pressure with guaranteeing embeddability of the controller into pumping body. The amplitudes of the disc deflections were as large as 40 ${\mu}m$ at 200 V - 100 Hz condition. As results of experiments, the flow rate and the back pressure increase when the frequency increases. The obtainable maximum flow rate and back pressure are 5.2 ml/min at 95 Hz and 13.14 kPa at 90 Hz respectively.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.3
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• pp.355-361
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• 2012

Though a micro pump is a crucial element in miniaturized bio-fluidic systems or drug delivery systems, it has some intrinsic disadvantages such as backward flow, pulsation of flow, low repeatability and producibility, and high cost. To overcome these limitation, a PZT disc actuated micro pump including a novel ring-shaped multi-flap check valve is introduced. To enhance the performance of the micro pump, the static behaviour of flap valve module and the micro fluidic behavior of fluids are numerically modelled and analyzed. As results of the numerical analysis, the optimal dimension and configuration of the ring-shaped multi flap valve are $1{\times}0.05$ mm and 2 (inlet side)${\times}1$ (outlet side) type. The obtained maximum flow rates and flow resolution are about 90 ml/min and 30 ${\mu}l$/stroke respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.325-325
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• 2008

스크린 프린팅에 의한 압전 후막은 MEMS 공정을 이용하여 마이크로 펌프, 마이크로 벨브, 마이크로 센서, 마이크로 로봇 등 여러 초소형 기계부품에 응용되고 있으며, Sol-Gel, PLD를 이용해 증착된 막 등에 비해 수십${\mu}m$의 비교적 두꺼운 막을 형성시킬 수 있는 장점을 가지고 있다. 그러나 실리콘 기판을 사용하여 스크린 프린팅으로 형성된 압전 후막의 경우, 공정상 바인더를 연소시키는 과정을 거치게 되므로, 밀집된(Dense) 구조를 가지는 막을 만들기가 어렵다. 이로 인해 스크린 프린팅에 의한 후막은 전기적 특성 및 기계적 특성이 떨어지는 경향이 있다. 본 연구에서는 스크린 프린팅에 의한 압전 후막의 밀집된 구조 및 특성을 향상시키기 위해 0.01Pb$(Mg_{1/2}W_{1/2})$O3-0.41Pb$(Ni_{1/3}Nb_{2/3})O_3-0.35PbTiO_3-0.23PbZrO_3$의 powder와 Attrition 밀링 처리된 powder를 비율별로 혼합하여 입자의 크기를 변화시켜 막의 충진 밀도를 향상시켰으며, 열처리 효과를 극대화시키기 위해 RTA(Rapidly Thermal Annealing)를 통해 열처리 하였다. Attrition 밀링에 의한 파우더를 각각 비율별로 100%, 50%, 25%로 혼합하여 만든 압전 세라믹 페이스트는 P-type(100)Si Wafer sample 위에 $1{\mu}m$의 하부전극용($1100^{\circ}C$) Ag 전극을 screen print하여 소결했다. 그리고 다시 전극이 형성된 Si wafer 위에 스크린 프린팅하고, 건조 한 후 RTA로 300초 동안 열처리 한 결과 밀집된 구조를 가지는 압전 후막을 제작 수 있었다.